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Title: Oxygen diffusion in freestanding body centered cubic tantalum structural thin films in air and in high vacuum

Journal Article · · Thin Solid Films

Not Available

Sponsoring Organization:
USDOE
OSTI ID:
2369026
Journal Information:
Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: C Vol. 800; ISSN 0040-6090
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English

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journal March 2018
Sacrificial Materials and Release Etchants for Metal MEMS That Reduce or Eliminate Hydrogen-Induced Residual Stress Change journal June 2021
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