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Title: First-Principles Simulation of Beam-Induced Processes Underlying Atomic Manipulation in Electron Microscopes

Journal Article · · Accounts of Materials Research

The development of experimental methods and apparatuses capable of promoting atomically precise material manipulations holds great promise for realizing the ultimate limit of feature miniaturization in materials and devices. The ability to modify materials atom by atom is anticipated to usher in new technologies in areas as diverse as separation science, medicine, and quantum information science. Historically, scanning probe-based techniques have been the most prominent approaches in this space. However, these methods are best suited for the manipulation of surface-exposed regions of materials, as the strong perturbations required for bond scission are delivered most effectively to atoms in the near-proximity to the scanning probe. In contrast, convergent electron beams with energies tuned slightly below the threshold for inducing irreversible knock-on damage have recently been employed (within scanning transmission electron microscopy) to promote atomic-scale bond rearrangements in various beam-stable solids. Currently, however, the efficiency and selectivity of beam-induced atomic manipulation processes with focused electron beams are such that long irradiation times are required to induce a desired atomic rearrangement. With a better understanding of the underlying physics dictating the outcome of a given irradiation event, methods can be devised to improve the efficiency of these techniques so that their promise can be fully realized through widespread adoption.To this end, this Account details our recent efforts to develop and apply tractable first-principles simulation approaches for studying the response of materials to electric beam-like external electric potentials applied in real space. We briefly review the concepts and capabilities in the area of atomically precise materials manipulation and review the early demonstrations of accomplishments in this area, focusing on studies using scanned convergent electron beam probes in particular. We expound upon the depth of the challenge and identify critical shortcomings of theoretical methods that have previously been employed in the simulation of beam-induced processes. We then describe the computational methods that we have generalized from the concepts and tools most commonly applied to the study of molecular photochemistry and how our adaptations of these methods can be employed to capture the relevant dynamical phenomena for beam-induced processes ranging from the initial electron scattering to the ensuing multistate reactions. Here, we contextualize these methods within the current state of the art in this area, which has historically focused primarily on the simulation of inelastic image formation in the electron microscope for the purpose of interpreting the results of quantitative electron microscopy experiments. We demonstrate that the spatial distribution of state-specific excitation rates due to the presence of an external (probe) electric charge is inhomogeneous, such that irradiation at particular locations in materials can favor specific electronic transitions (and disallow others). In addition to the potential for excited-state reaction pathways to be accessed through the initial inelastic scattering of the tightly focused electron beam from the targeted atoms, we also identify favorable conditions for the electronically nonadiabatic evolution of the highly vibrationally excited system to open complex multistate reaction pathways. Implications of the early results for understanding the mechanisms and potential routes to improved efficiency and selectivity in beam-induced reactions are discussed. We conclude with a summary of the current state of theory and modeling capabilities in this area and provide our perspective on future directions for theoretical and experimental developments that we view as crucial to advancing the use of convergent electron beams in mode-specific, atomically precise platforms for direct-write materials modifications.

Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC05-00OR22725
OSTI ID:
2351062
Journal Information:
Accounts of Materials Research, Journal Name: Accounts of Materials Research Journal Issue: 6 Vol. 5; ISSN 2643-6728
Publisher:
American Chemical Society (ACS)Copyright Statement
Country of Publication:
United States
Language:
English

References (57)

Evidence of defect formation in monolayer MoS2at ultralow accelerating voltage electron irradiation journal April 2023
Conical intersections and double excitations in time-dependent density functional theory journal March 2006
Direct matter disassembly via electron beam control: electron-beam-mediated catalytic etching of graphene by nanoparticles journal March 2020
Understanding Beam-Induced Electronic Excitations in Materials journal January 2020
Nudged elastic band method for finding minimum energy paths of transitions
  • JÓNsson, Hannes; Mills, Greg; Jacobsen, Karsten W.
  • Proceedings of the International School of Physics, Classical and Quantum Dynamics in Condensed Phase Simulations https://doi.org/10.1142/9789812839664_0016
conference November 2011
A Computational Strategy for Organic Photochemistry book January 2007
Density matrix of inelastically scattered fast electrons journal April 1999
Damage-free vibrational spectroscopy of biological materials in the electron microscope journal March 2016
Propagator Methods book January 2007
A novel shaped-controlled fabrication of nanopore and its applications in quantum electronics journal December 2019
Scanning transmission electron microscopy under controlled low-pressure atmospheres journal August 2019
Geometry optimization: Geometry optimization journal May 2011
Resolving hydrogen atoms at metal-metal hydride interfaces journal January 2020
Silicon–Carbon Bond Inversions Driven by 60-keV Electrons in Graphene journal September 2014
NWChem: Past, present, and future journal May 2020
Primary radiation damage: A review of current understanding and models journal December 2018
Atom-by-atom fabrication with electron beams journal June 2019
Modeling Fast Electron Dynamics with Real-Time Time-Dependent Density Functional Theory: Application to Small Molecules and Chromophores journal April 2011
Multi-purposed Ar gas cluster ion beam processing for graphene engineering journal May 2018
Bridging nano-optics and condensed matter formalisms in a unified description of inelastic scattering of relativistic electron beams journal January 2021
Atomic-Scale Electron-Beam Sculpting of Near-Defect-Free Graphene Nanostructures journal June 2011
Energy deposition and transfer in electron-beam lithography
  • Wu, Bo; Neureuther, Andrew R.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 6 https://doi.org/10.1116/1.1421548
journal January 2001
Optical excitations in electron microscopy journal February 2010
Formation of Defects in Two-Dimensional MoS 2 in the Transmission Electron Microscope at Electron Energies below the Knock-on Threshold: The Role of Electronic Excitations journal March 2020
Liouville–von Neumann molecular dynamics journal June 2009
Signatures of distinct impurity configurations in atomic-resolution valence electron-energy-loss spectroscopy: Application to graphene journal October 2016
Modelling the inelastic scattering of fast electrons journal April 2015
The Atomic Drill Bit: Precision Controlled Atomic Fabrication of 2D Materials journal February 2023
Understanding Nonradiative Recombination through Defect-Induced Conical Intersections journal August 2017
Correlations in space and time and dynamical diffraction of high-energy electrons by crystals journal November 1993
Electron-Beam Manipulation of Silicon Dopants in Graphene journal June 2018
Lagrangian approach to molecular vibrational Raman intensities using time-dependent hybrid density functional theory journal May 2007
The iterative calculation of a few of the lowest eigenvalues and corresponding eigenvectors of large real-symmetric matrices journal January 1975
Building with ions: towards direct write of platinum nanostructures using in situ liquid cell helium ion microscopy journal January 2017
Conical Intersections at the Nanoscale: Molecular Ideas for Materials journal June 2019
Electron Energy-Loss Spectroscopy Calculation in Finite-Difference Time-Domain Package journal February 2015
Radiation damage to organic and inorganic specimens in the TEM journal April 2019
Nonadiabatic Effects on Defect Diffusion in Silicon-Doped Nanographenes journal December 2020
Extracting Inelastic Scattering Cross Sections for Finite and Aperiodic Materials from Electronic Dynamics Simulations journal November 2022
Mechanisms of radiation damage in beam-sensitive specimens, for TEM accelerating voltages between 10 and 300 kV journal July 2012
Transmission Electron Microscopy book January 2009
Adiabatic time-dependent density functional methods for excited state properties journal October 2002
Inelastic Collisions of Fast Charged Particles with Atoms and Molecules—The Bethe Theory Revisited journal July 1971
Towards atomically precise manipulation of 2D nanostructures in the electron microscope journal September 2017
Radiation Damage and Nanofabrication in TEM and STEM journal May 2021
Radiation damage in the TEM and SEM journal August 2004
Damage effects of high energy electrons on metals journal January 1987
Machine learning for automated experimentation in scanning transmission electron microscopy journal December 2023
Electronically Nonadiabatic Structural Transformations Promoted by Electron Beams journal June 2019
Synergistic effects of nuclear and electronic energy deposition on damage production in KTaO 3 journal July 2018
Grand challenges in basic energy sciences journal July 2008
Manipulating low-dimensional materials down to the level of single atoms with electron irradiation journal September 2017
Ab Initio Nonadiabatic Quantum Molecular Dynamics journal February 2018
Depth sectioning with the aberration-corrected scanning transmission electron microscope journal February 2006
Advancing Understanding and Design of Functional Materials Through Theoretical and Computational Chemical Physics book January 2012
Quantum theory of electronic excitation and sputtering by transmission electron microscopy journal January 2023
Electron beam triggered single-atom dynamics in two-dimensional materials journal November 2020