Zinc-Imidazolate Films as an All-Dry Resist Technology

Corkery, Peter; Waltz, Kayley E.; Eckhert, Patrick M.; Ahmad, Mueed; Kraetz, Andrea; Miao, Yurun; Lee, Dennis T.; Abdel‐Rahman, Mohammed K.; Lan, Yucheng; Haghi‐Ashtiani, Paul; Stein, Aaron; Boscoboinik, J. Anibal; Tsapatsis, Michael; Fairbrother, D. Howard

doi:10.1002/adfm.202311149

Title: Zinc-Imidazolate Films as an All-Dry Resist Technology

Journal Article · 26 November 2023 · Advanced Functional Materials

DOI: https://doi.org/10.1002/adfm.202311149 · OSTI ID:2338134

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Johns Hopkins Univ., Baltimore, MD (United States)
Brookhaven National Laboratory (BNL), Upton, NY (United States); Stony Brook Univ., NY (United States)
Johns Hopkins Univ., Baltimore, MD (United States); Stony Brook Univ., NY (United States)
Morgan State Univ., Baltimore, MD (United States)
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Johns Hopkins Univ., Baltimore, MD (United States); Johns Hopkins Univ., Laurel, MD (United States)

Motivated by the drawbacks of solution phase processing, an all-dry resist formation process is presented that utilizes amorphous zinc-imidazolate (aZnMIm) films deposited by atomic/molecular layer deposition (ALD/MLD), patterned with electron beam lithography (EBL), and developed by novel low temperature (120 °C) gas phase etching using 1,1,1,5,5,5-hexafluoroacetylacetone (hfacH) to achieve well-resolved 22 nm lines with a pitch of 30 nm. The effects of electron beam irradiation on the chemical structure and hfacH etch resistance of aZnMIm films are investigated, and it is found that electron irradiation degrades the 2-methylimidazolate ligands and transforms aZnMIm into a more dense material that is resistant to etching by hfacH and has a C:N:Zn ratio effectively identical to that of unmodified aZnMIm. Here, these findings showcase the potential for aZnMIm films to function in a dry resist technology. Sensitivity, contrast, and critical dimensions of the patterns are determined to be 37 mC cm^-2, 0.87, and 29 nm, respectively, for aZnMIm deposited on silicon substrates and patterned at 30 keV. This work introduces a new direction for solvent-free resist processing, offering the prospect of scalable, high-resolution patterning techniques for advanced semiconductor fabrication processes.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities (SUF); USDOE Office of Science (SC), Basic Energy Sciences (BES). Chemical Sciences, Geosciences & Biosciences Division (CSGB); Semiconductor Research Corporation (SRC); National Institutes of Health (NIH)

Grant/Contract Number:: SC0012704; SC0021212; SC0021304

OSTI ID:: 2338134

Alternate ID(s):: OSTI ID: 2222553

Report Number(s):: BNL--225511-2024-JAAM

Journal Information:: Advanced Functional Materials, Journal Name: Advanced Functional Materials Journal Issue: 12 Vol. 34; ISSN 1616-301X

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

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