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Title: Sequential Infiltration Synthesis of Silicon Dioxide in Polymers with Ester Groups─Insight from In Situ Infrared Spectroscopy

Journal Article · · Journal of Physical Chemistry. C
ORCiD logo [1];  [2];  [3];  [1]; ORCiD logo [1]; ORCiD logo [3]
  1. Department of Physics, Illinois State University, Normal, Illinois 61704, United States
  2. Applied Materials Division, Argonne National Laboratory, Chicago, Illinois 60637, United States, Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, Illinois 60439, United States, Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
  3. Applied Materials Division, Argonne National Laboratory, Chicago, Illinois 60637, United States, Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, Illinois 60439, United States

Not Available

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States); Energy Frontier Research Centers (EFRC) (United States). Advanced Materials for Energy-Water Systems (AMEWS)
Sponsoring Organization:
National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
2333075
Journal Information:
Journal of Physical Chemistry. C, Journal Name: Journal of Physical Chemistry. C Journal Issue: 15 Vol. 128; ISSN 1932-7447
Publisher:
American Chemical SocietyCopyright Statement
Country of Publication:
United States
Language:
English

References (62)

Infrared Spectroscopy: Fundamentals and Applications book June 2004
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers journal September 2010
Enhanced Lithographic Imaging Layer Meets Semiconductor Manufacturing Specification a Decade Early journal April 2012
Three-Dimensional Nanofabrication by Block Copolymer Self-Assembly journal April 2014
Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2/SiO2 Nanolaminates and Comparisons with Their Homogeneous Mixtures journal March 2006
In situ measurement of the glass transition temperature of polymers with compressed fluid diluents journal February 1994
Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition journal September 2018
Sequential Infiltration Synthesis of Al2O3 in Polyethersulfone Membranes journal September 2018
New substances for atomic-layer deposition of silicon dioxide journal July 1995
Quasi-monolayer deposition of silicon dioxide journal October 1994
Renewable Resource and Biodegradable Polymers book January 2012
Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions journal February 2000
Structural modification of poly(methyl methacrylate) by proton irradiation journal January 2001
Atomic-layer chemical-vapor-deposition of silicon dioxide films with an extremely low hydrogen content journal June 1998
Mechanisms and reactions during atomic layer deposition on polymers journal December 2013
Metal oxide and carbon nanomaterial based membranes for reverse osmosis and membrane distillation: A comparative review journal November 2021
Investigation on electrical properties of thermally aged PMMA by combined use of FTIR and impedance spectroscopies journal February 2009
The physical characterization of a thermoplastic polymer for endodontic obturation journal November 2006
Characterization by IR spectroscopy of an hybrid sol–gel material used for photonic devices fabrication journal January 2008
A review on techniques to fabricate silicon oxide arrays for biomolecules patterning journal June 2011
Nanostructures and Nanotechnology book July 2015
Understanding and Controlling Polymer–Organometallic Precursor Interactions in Sequential Infiltration Synthesis journal May 2020
Investigating Sequential Vapor Infiltration Synthesis on Block-Copolymer-Templated Titania Nanoarrays journal March 2016
Effect of Nanostructured Domains in Self-Assembled Block Copolymer Films on Sequential Infiltration Synthesis journal November 2017
Ozone-Based Sequential Infiltration Synthesis of Al 2 O 3 Nanostructures in Symmetric Block Copolymer journal November 2016
Polycaprolactone: A Promising Addition to the Sequential Infiltration Synthesis Polymer Family Identified through In Situ Infrared Spectroscopy journal October 2020
Increased Chemical Stability of Vapor-Phase Infiltrated AlO x –Poly(methyl methacrylate) Hybrid Materials journal February 2020
Nanoporous Dielectric Resistive Memories Using Sequential Infiltration Synthesis journal March 2021
Characterizing the Three-Dimensional Structure of Block Copolymers via Sequential Infiltration Synthesis and Scanning Transmission Electron Tomography journal May 2015
Atomic Layer Deposition of Al 2 O 3 Films on Polyethylene Particles journal December 2004
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy journal October 2014
Rapid SiO 2 Atomic Layer Deposition Using Tris( tert -pentoxy)silanol journal October 2008
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis journal July 2011
Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition journal January 2013
Kinetics for the Sequential Infiltration Synthesis of Alumina in Poly(methyl methacrylate): An Infrared Spectroscopic Study journal January 2015
Al 2 O 3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry journal November 2008
Thin-film behavior of poly(methyl methacrylates). 2. An FT-IR study of Langmuir-Blodgett films of isotactic PMMA journal April 1991
Inorganic Nanodots from Thin Films of Block Copolymers journal September 2004
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates journal May 2011
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures journal December 2012
Highly ordered TiO 2 nanostructures by sequential vapour infiltration of block copolymer micellar films in an atomic layer deposition reactor journal January 2013
Patterning at the 10 nanometer length scale using a strongly segregating block copolymer thin film and vapor phase infiltration of inorganic precursors journal January 2016
A controlled synthesis method of alkyl methacrylate block copolymers via living anionic polymerization at ambient temperature journal January 2019
Surface engineering of PDMS for improved triboelectrification journal January 2023
Combinatorial CVD of ZrO2 or HfO2 compositional spreads with SiO2 for high ? dielectrics journal January 2004
Enhanced polymeric lithography resists via sequential infiltration synthesis journal July 2011
Quantitative in situ infrared analysis of reactions between trimethylaluminum and polymers during Al2O3 atomic layer deposition journal January 2012
Ultrathin (<4 nm) SiO2 and Si–O–N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits journal September 2001
Pulsed deposition of silicate films journal September 2003
Vibrational mode frequencies of silica species in SiO 2 -H 2 O liquids and glasses from ab initio molecular dynamics journal April 2012
The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective journal November 2019
The silicon-silicon dioxide system: Its microstructure and imperfections journal August 1994
Resistive Switching Device Technology Based on Silicon Oxide for Improved ON–OFF Ratio—Part I: Memory Devices journal January 2018
Nanoimprint lithography: An old story in modern times? A review
  • Schift, Helmut
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 2, Article No. 458 https://doi.org/10.1116/1.2890972
journal January 2008
Image quality and pattern transfer in directed self assembly with block-selective atomic layer deposition
  • Ruiz, Ricardo; Wan, Lei; Lille, Jeffrey
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 30, Issue 6 https://doi.org/10.1116/1.4758773
journal November 2012
Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
  • Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim
  • Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6 https://doi.org/10.1116/1.4929508
journal November 2015
Rapid Vapor Deposition of Highly Conformal Silica Nanolaminates journal October 2002
Investigation of Silicon Oxide Thin Films Prepared by Atomic Layer Deposition Using SiH2Cl2and O3as the Precursors journal February 2004
Sealing Porous Low-k Dielectrics with Silica journal January 2004
Nanopatterning by Laser Interference Lithography: Applications to Optical Devices journal February 2014
Recent Advances in Sequential Infiltration Synthesis (SIS) of Block Copolymers (BCPs) journal April 2021
Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition journal February 2005