Atomic layer deposition of two-dimensional layered zirconium sulfide

Meng, Xiangbo; Liu, Yuzi; Watanabe, Fumiya; Velasquez Carballo, Kevin; Cai, Jiyu; Chen, Zonghai; Zhou, Hua

doi:10.1016/j.mtchem.2024.102013

Title: Atomic layer deposition of two-dimensional layered zirconium sulfide

Journal Article · 31 March 2024 · Materials Today Chemistry

DOI: https://doi.org/10.1016/j.mtchem.2024.102013 · OSTI ID:2325311

; Liu, Yuzi; Watanabe, Fumiya;

; Cai, Jiyu; Chen, Zonghai;

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Sponsoring Organization:: USDOE

OSTI ID:: 2325311

Journal Information:: Materials Today Chemistry, Journal Name: Materials Today Chemistry Journal Issue: C Vol. 37; ISSN 2468-5194

Publisher:: ElsevierCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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