Controlling the charge of dust particles in an afterglow by modulating the plasma power

Chaubey, Neeraj; Goree, J.

doi:10.1088/1361-6463/ad291c

Title: Controlling the charge of dust particles in an afterglow by modulating the plasma power

Journal Article · 21 February 2024 · Journal of Physics. D, Applied Physics

DOI: https://doi.org/10.1088/1361-6463/ad291c · OSTI ID:2310394

; Goree, J.

Abstract A dust particle immersed in a glow-discharge plasma has long been known to have a charge that is negative , while the plasma is powered. However, in the afterglow, following the stopping of the plasma power, a large positive charge can collect on the particle, as was shown recently for particles in a cathodic sheath. While that outcome of positive charging in the afterglow may be common, an experimental discovery reported here reveals that the opposite outcome is also possible: a particle can develop a negative charge in the afterglow, if the plasma had previously been operated with a modulated power. Before stopping the plasma power off altogether, in a run with power modulated at a low duty cycle of 4.5 $%$ , the particle’s residual charge was negative, but it was positive in a control run without modulation. This result points to a way of controlling the charge of dust particles in a decaying plasma, which can be useful for mitigating defects in semiconductor manufacturing.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0014566; 1672641 and 1689926

OSTI ID:: 2310394

Alternate ID(s):: OSTI ID: 2305406

Journal Information:: Journal of Physics. D, Applied Physics, Journal Name: Journal of Physics. D, Applied Physics Vol. 57 Journal Issue: 20; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

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