Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

Sun, Haomin; Banerjee, Soham; Sharma, Sarveshwar; Powis, Andrew Tasman; Khrabrov, Alexander V.; Sydorenko, Dmytro; Chen, Jian; Kaganovich, Igor D.

doi:10.1063/5.0160853

Title: Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

Journal Article · 25 October 2023 · Physics of Plasmas

DOI: https://doi.org/10.1063/5.0160853 · OSTI ID:2282127

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Ecole Polytechnique Federale Lausanne (EPFL) (Switzerland). Swiss Plasma Center (SPC)
Birla Institute of Technology and Science, Pilani (India)
Institute for Plasma Research, Gandhinagar (India); Homi Bhabha National Institute, Mumbai (India)
Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
Univ. of Alberta, Edmonton, AB (Canada)
Sun Yat-sen University, Zhuhai (China)

Achieving large-scale kinetic modeling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications, such as plasma etching, kinetic simulations are necessary to self-consistently capture the particle dynamics. The standard, explicit, electrostatic, momentum-conserving particle-in-cell method suffers from restrictive stability constraints on spatial cell size and temporal time step, requiring resolution of the electron Debye length and electron plasma period, respectively. This results in a very high computational cost, making the technique prohibitive for large volume device modeling. We investigate the direct implicit algorithm and the explicit energy conserving algorithm as alternatives to the standard approach, both of which can reduce computational cost with a minimal (or controllable) impact on results. These algorithms are implemented into the well-tested EDIPIC-2D and LTP-PIC codes, and their performance is evaluated via 2D capacitively coupled plasma discharge simulations. The investigation reveals that both approaches enable the utilization of cell sizes larger than the Debye length, resulting in a reduced runtime, while incurring only minor inaccuracies in plasma parameters. In conclusion, the direct implicit method also allows for time steps larger than the electron plasma period; however, care must be taken to avoid numerical heating or cooling. It is demonstrated that by appropriately adjusting the ratio of cell size to time step, it is possible to mitigate this effect to an acceptable level.

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Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC)

Sponsoring Organization:: USDOE Laboratory Directed Research and Development (LDRD) Program

Grant/Contract Number:: AC02-09CH11466; AC02-05CH11231

OSTI ID:: 2282127

Alternate ID(s):: OSTI ID: 2567930

Journal Information:: Physics of Plasmas, Journal Name: Physics of Plasmas Journal Issue: 10 Vol. 30; ISSN 1070-664X

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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