Ion concentration ratio measurements of ion beams generated by a commercial microwave electron cyclotron resonance plasma source

Abe, Shota; Koel, Bruce E.

doi:10.1063/5.0166926

Title: Ion concentration ratio measurements of ion beams generated by a commercial microwave electron cyclotron resonance plasma source

Journal Article · 20 November 2023 · Review of Scientific Instruments

DOI: https://doi.org/10.1063/5.0166926 · OSTI ID:2282120

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Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
Princeton Univ., NJ (United States)

A commercially available electron cyclotron resonance (ECR) plasma source (GenII Plasma Source, tectra GmbH) is widely used for surface processing. This plasma source is compatible with ultrahigh vacuum systems, and its working pressure is relatively low, around 10^–6–10^–4 Torr even without differential pumping. Here, we report ion flux concentration ratios for each ion species in an ion beam from this source, as measured by a mass/energy analyzer that is a combination of a quadrupole mass spectrometer, an electrostatic energy analyzer, and focusing ion optics. In this study, the examined beams were those arising from plasmas produced from feed gases of H₂, D₂, N₂, O₂, Ar, and dry air over a range of input power and working pressures. H₂(D₂) plasmas are widely used for nuclear fusion applications and, hence, the ion concentration ratios of H⁺, H₂⁺, and H₃⁺ reported here will be useful information for research that applies this plasma source to well-controlled plasma-material interaction studies. Ion energy distributions, stability of operation, and impurity concentrations were also assessed for each of the plasma species investigated.

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Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: SC0019308; AC02-09CH11466

OSTI ID:: 2282120

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 11 Vol. 94; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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