Quantitative Scanning Transmission Electron Microscopy for Materials Science: Imaging, Diffraction, Spectroscopy, and Tomography

Ophus, Colin

doi:10.1146/annurev-matsci-080921-092646

Title: Quantitative Scanning Transmission Electron Microscopy for Materials Science: Imaging, Diffraction, Spectroscopy, and Tomography

Journal Article · 18 April 2023 · Annual Review of Materials Research

DOI: https://doi.org/10.1146/annurev-matsci-080921-092646 · OSTI ID:2246863

Ophus, Colin ^[1]

Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). Molecular Foundry

Scanning transmission electron microscopy (STEM) is one of the most powerful characterization tools in materials science research. Due to instrumentation developments such as highly coherent electron sources, aberration correctors, and direct electron detectors, STEM experiments can examine the structure and properties of materials at length scales of functional devices and materials down to single atoms. STEM encompasses a wide array of flexible operating modes, including imaging, diffraction, spectroscopy, and 3D tomography experiments. This review outlines many common STEM experimental methods with a focus on quantitative data analysis and simulation methods, especially those enabled by open source software. The hope is to introduce both classic and new experimental methods to materials scientists and summarize recent progress in STEM characterization. The review also discusses the strengths and weaknesses of the various STEM methodologies and briefly considers promising future directions for quantitative STEM research.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). Molecular Foundry

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 2246863

Journal Information:: Annual Review of Materials Research, Vol. 53, Issue 1; ISSN 1531-7331

Publisher:: Annual ReviewsCopyright Statement

Country of Publication:: United States

Language:: English

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