Mitigating dust particle contamination in an afterglow plasma by controlled lifting with a DC electric field

Chaubey, Neeraj; Goree, J.

doi:10.1088/1361-6463/ad1148

Title: Mitigating dust particle contamination in an afterglow plasma by controlled lifting with a DC electric field

Journal Article · 08 December 2023 · Journal of Physics. D, Applied Physics

DOI: https://doi.org/10.1088/1361-6463/ad1148 · OSTI ID:2229166

; Goree, J.

Abstract Particle contamination due to plasma processing motivates the design of a method of electrically lifting particles in a time interval after a plasma’s power is turned off. Small solid dust particles have electric charges that are not frozen until a late stage of the plasma afterglow. Beyond that time, before they fall to a surface below and cause defects, particles can be lifted in a controlled manner by applying an appropriate direct-current (DC) electric field, as we demonstrate experimentally. A few milliseconds after an argon plasma’s capacitively coupled radio-frequency power is switched off, a vertical DC electric field is applied. Thereafter, video imaging shows that the falling of the particles is slowed or stopped altogether, depending on the magnitude of the upward electric force.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0014566; 1672641; 1689926

OSTI ID:: 2229166

Alternate ID(s):: OSTI ID: 2222941

Journal Information:: Journal of Physics. D, Applied Physics, Journal Name: Journal of Physics. D, Applied Physics Vol. 57 Journal Issue: 10; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (77)

Nearly monoenergetic positive ion beam with self-neutralized space charge extracted from a pulsed plasma Chen, Ya-Ming; Sawadichai, Ryan; Tian, Siyuan Journal of Physics D: Applied Physics, Vol. 52, Issue 35 https://doi.org/10.1088/1361-6463/ab294e	journal	July 2019
Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges Staps, T. J. A.; Platier, B.; Mihailova, D. Review of Scientific Instruments, Vol. 92, Issue 9 https://doi.org/10.1063/5.0054851	journal	September 2021
Effect of nanoparticles on an rf discharge afterglow Schweigert, I. V.; Alexandrov, A. L. Journal of Physics D: Applied Physics, Vol. 45, Issue 32 https://doi.org/10.1088/0022-3727/45/32/325201	journal	July 2012
Visco-elastic fluid simulations of coherent structures in strongly coupled dusty plasma medium Singh Dharodi, Vikram; Kumar Tiwari, Sanat; Das, Amita Physics of Plasmas, Vol. 21, Issue 7 https://doi.org/10.1063/1.4888882	journal	July 2014
Modeling results on the dust charge distribution in a plasma afterglow Denysenko, I. B.; Mikikian, M.; Azarenkov, N. A. Physics of Plasmas, Vol. 29, Issue 9 https://doi.org/10.1063/5.0100913	journal	September 2022
Generation of multiple toroidal dust vortices by a non-monotonic density gradient in a direct current glow discharge plasma Kaur, Manjit; Bose, Sayak; Chattopadhyay, P. K. Physics of Plasmas, Vol. 22, Issue 9 https://doi.org/10.1063/1.4929916	journal	September 2015
Transport properties of disordered two-dimensional complex plasma crystal Kostadinova, E. G.; Guyton, F.; Cameron, A. Contributions to Plasma Physics, Vol. 58, Issue 2-3 https://doi.org/10.1002/ctpp.201700111	journal	January 2018
Particle charging during pulsed EUV exposures with afterglow effect Chaudhuri, M.; Heijmans, L. C. J.; van de Kerkhof, M. Plasma Sources Science and Technology, Vol. 32, Issue 9 https://doi.org/10.1088/1361-6595/acf342	journal	September 2023
Comparison of the static structure factor at long wavelengths for a dusty plasma liquid and other liquids Zhuravlyov, Vitaliy; Goree, J.; Douglas, Jack F. Physical Review E, Vol. 106, Issue 5 https://doi.org/10.1103/PhysRevE.106.055212	journal	November 2022
Dusty plasmas Fortov, Vladimir E.; Khrapak, Aleksei G.; Khrapak, Sergei A. Physics-Uspekhi, Vol. 47, Issue 5 https://doi.org/10.1070/PU2004v047n05ABEH001689	journal	May 2004
The effect of a direct current field on the microparticle charge in the plasma afterglow Wörner, L.; Ivlev, A. V.; Couëdel, L. Physics of Plasmas, Vol. 20, Issue 12 https://doi.org/10.1063/1.4843855	journal	December 2013
The charge of micro-particles in a low pressure spatial plasma afterglow van Minderhout, B.; Peijnenburg, T.; Blom, P. Journal of Physics D: Applied Physics, Vol. 52, Issue 32 https://doi.org/10.1088/1361-6463/ab2525	journal	June 2019
Characterization of particle charging in low-temperature, atmospheric-pressure, flow-through plasmas Sharma, Girish; Abuyazid, Nabiel; Dhawan, Sukrant Journal of Physics D: Applied Physics, Vol. 53, Issue 24 https://doi.org/10.1088/1361-6463/ab7c97	journal	April 2020
Rotational properties of annulus dusty plasma in a strong magnetic field Choudhary, Mangilal; Bergert, Roman; Moritz, Sandra Contributions to Plasma Physics, Vol. 61, Issue 1 https://doi.org/10.1002/ctpp.202000110	journal	August 2020
Positive charging of grains in an afterglow plasma is enhanced by ions drifting in an electric field Chaubey, Neeraj; Goree, J.; Lanham, Steven J. Physics of Plasmas, Vol. 28, Issue 10 https://doi.org/10.1063/5.0069141	journal	October 2021
I n s i t u laser diagnostic studies of plasma‐generated particulate contamination Selwyn, G. S.; Singh, J.; Bennett, R. S. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 7, Issue 4 https://doi.org/10.1116/1.576175	journal	July 1989
Charge neutralisation of microparticles by pulsing a low-pressure shielded spatial plasma afterglow van Minderhout, B.; van Huijstee, J. C. A.; Peijnenburg, A. T. A. Plasma Sources Science and Technology, Vol. 30, Issue 4 https://doi.org/10.1088/1361-6595/abd81f	journal	April 2021
A review of nanoparticle decharging in atmospheric pressure plasma afterglows Staps, T. J. A. Frontiers in Physics, Vol. 10 https://doi.org/10.3389/fphy.2022.988812	journal	September 2022
Kelvin-Helmholtz instability in dusty plasma medium: Fluid and particle approach Tiwari, Sanat; Dharodi, Vikram; Das, Amita Journal of Plasma Physics, Vol. 80, Issue 6 https://doi.org/10.1017/S0022377814000397	journal	July 2014
Rotating vortices in two-dimensional inhomogeneous strongly coupled dusty plasmas: Shear and spiral density waves Dharodi, Vikram S. Physical Review E, Vol. 102, Issue 4 https://doi.org/10.1103/PhysRevE.102.043216	journal	October 2020
The role of neutral drag force in pulsed plasma enabled particle contamination control Beckers, Job; van Huijstee, Judith; Blom, Paul Metrology, Inspection, and Process Control XXXVII https://doi.org/10.1117/12.2658259	conference	April 2023
Oxygen content dependent etch rate of single polymer microparticles confined in the sheath region of a low pressure radiofrequency argon/oxygen plasma Schepers, L. P. T.; IJzerman, W. L.; Beckers, J. Journal of Physics D: Applied Physics, Vol. 51, Issue 37 https://doi.org/10.1088/1361-6463/aad5b4	journal	August 2018
Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias Chen, Zhiying; Blakeney, Joel; Carruth, Megan Journal of Vacuum Science & Technology B, Vol. 40, Issue 3 https://doi.org/10.1116/6.0001737	journal	May 2022
Spatio-Temporal Plasma Afterglow Induces Additional Neutral Drag Force on Microparticles van Huijstee, J. C. A.; Blom, P.; Peijnenburg, A. T. A. Frontiers in Physics, Vol. 10 https://doi.org/10.3389/fphy.2022.926160	journal	June 2022
Mach cone shocks in a two-dimensional Yukawa solid using a complex plasma Samsonov, D.; Goree, J.; Thomas, H. M. Physical Review E, Vol. 61, Issue 5 https://doi.org/10.1103/PhysRevE.61.5557	journal	May 2000
COMPACT—a new complex plasma facility for the ISS Knapek, C. A.; Couedel, L.; Dove, A. Plasma Physics and Controlled Fusion, Vol. 64, Issue 12 https://doi.org/10.1088/1361-6587/ac9ff0	journal	November 2022
Complex Plasma Afterglow Couëdel, L.; Mezeghrane, A.; Samarian, A. A. Contributions to Plasma Physics, Vol. 49, Issue 4-5 https://doi.org/10.1002/ctpp.200910025	journal	June 2009
Polygon construction to investigate melting in two-dimensional strongly coupled dusty plasma Ruhunusiri, W. D. Suranga; Goree, J.; Feng, Yan Physical Review E, Vol. 83, Issue 6 https://doi.org/10.1103/PhysRevE.83.066402	journal	June 2011
Modeling nanoparticle charge distribution in the afterglow of non-thermal plasmas and comparison with measurements Suresh, Vikram; Li, Li; Redmond Go Felipe, Joshua Journal of Physics D: Applied Physics, Vol. 54, Issue 27 https://doi.org/10.1088/1361-6463/abf70c	journal	April 2021
Coulomb explosion and fission of charged dust clusters Merlino, R. L.; Meyer, J. K.; Barkan, A. INTERNATIONAL CONFERENCE FOR SCIENCE EDUCATORS AND TEACHERS (ISET) 2017: Proceedings of the 5th International Conference for Science Educators and Teachers (ISET) 2017, AIP Conference Proceedings https://doi.org/10.1063/1.5020409	conference	January 2018
Radiation pressure and gas drag forces on a melamine-formaldehyde microsphere in a dusty plasma Liu, Bin; Goree, J.; Nosenko, V. Physics of Plasmas, Vol. 10, Issue 1 https://doi.org/10.1063/1.1526701	journal	January 2003
Recrystallization of a 2D Plasma Crystal Knapek, C. A.; Samsonov, D.; Zhdanov, S. Physical Review Letters, Vol. 98, Issue 1 https://doi.org/10.1103/PhysRevLett.98.015004	journal	January 2007
Evolution of Dust Clouds in Afterglow Plasmas Meyer, John K.; Merlino, Robert L. IEEE Transactions on Plasma Science, Vol. 44, Issue 4 https://doi.org/10.1109/TPS.2015.2504920	journal	April 2016
Perspective: dusty plasma experiments—a learning tool for physics graduate students Choudhary, Mangilal European Journal of Physics, Vol. 42, Issue 5 https://doi.org/10.1088/1361-6404/abfdfb	journal	June 2021
Observation of dust torus with poloidal rotation in direct current glow discharge plasma Kaur, Manjit; Bose, Sayak; Chattopadhyay, P. K. Physics of Plasmas, Vol. 22, Issue 3 https://doi.org/10.1063/1.4916065	journal	March 2015
Dynamics of pulsed reactive RF discharges in response to thin film deposition Sikimić, B.; Stefanović, I.; Denysenko, I. B. Plasma Sources Science and Technology, Vol. 23, Issue 2 https://doi.org/10.1088/0963-0252/23/2/025010	journal	March 2014
Coulomb expansion of a thin dust cloud observed experimentally under afterglow plasma conditions Chaubey, Neeraj; Goree, J. Physics of Plasmas, Vol. 29, Issue 11 https://doi.org/10.1063/5.0112680	journal	November 2022
Kelvin-Helmholtz instability in a compressible dust fluid flow Kumar, Krishan; Bandyopadhyay, P.; Singh, Swarnima Scientific Reports, Vol. 13, Issue 1 https://doi.org/10.1038/s41598-023-30992-3	journal	March 2023
Confinement of dust particles in a double layer Barkan, A.; Merlino, R. L. Physics of Plasmas, Vol. 2, Issue 9 https://doi.org/10.1063/1.871159	journal	September 1995
Particle charge in PK-4 dc discharge from ground-based and microgravity experiments Antonova, T.; Khrapak, S. A.; Pustylnik, M. Y. Physics of Plasmas, Vol. 26, Issue 11 https://doi.org/10.1063/1.5122861	journal	November 2019
Experimental observation of self excited co-rotating multiple vortices in a dusty plasma with inhomogeneous plasma background Choudhary, Mangilal; Mukherjee, S.; Bandyopadhyay, P. Physics of Plasmas, Vol. 24, Issue 3 https://doi.org/10.1063/1.4977454	journal	March 2017
Electron energy distribution function, effective electron temperature, and dust charge in the temporal afterglow of a plasma Denysenko, I. B.; Kersten, H.; Azarenkov, N. A. Physics of Plasmas, Vol. 23, Issue 5 https://doi.org/10.1063/1.4952633	journal	May 2016
Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation Setyawan, Heru; Shimada, Manabu; Imajo, Yuji Journal of Aerosol Science, Vol. 34, Issue 7 https://doi.org/10.1016/S0021-8502(03)00066-1	journal	July 2003
Electron energy probability function in the temporal afterglow of a dusty plasma Denysenko, I. B.; Azarenkov, N. A.; Ostrikov, K. Physics of Plasmas, Vol. 25, Issue 1 https://doi.org/10.1063/1.5010742	journal	January 2018
Collisional and collisionless expansion of Yukawa balls Piel, Alexander; Goree, John A. Physical Review E, Vol. 88, Issue 6 https://doi.org/10.1103/PhysRevE.88.063103	journal	December 2013
Mass-Loss Rate for MF Resin Microspheres Pavlu, J.; Velyhan, A.; Richterova, I. IEEE Transactions on Plasma Science, Vol. 32, Issue 2 https://doi.org/10.1109/TPS.2004.826120	journal	April 2004
Transverse Waves in a Two-Dimensional Screened-Coulomb Crystal (Dusty Plasma) Nunomura, S.; Samsonov, D.; Goree, J. Physical Review Letters, Vol. 84, Issue 22 https://doi.org/10.1103/PhysRevLett.84.5141	journal	May 2000
Analysis of the particle interactions in a two-dimensional-plasma dust crystal and the use of dust as a probe of the time-averaged presheath electric field Hebner, G. A.; Riley, M. E.; Greenberg, K. E. Physical Review E, Vol. 66, Issue 4 https://doi.org/10.1103/PhysRevE.66.046407	journal	October 2002
Initial measurements of two- and three-dimensional ordering, waves, and plasma filamentation in the Magnetized Dusty Plasma Experiment Thomas, Edward; Konopka, Uwe; Merlino, Robert L. Physics of Plasmas, Vol. 23, Issue 5 https://doi.org/10.1063/1.4943112	journal	May 2016
Dust cluster explosion Saxena, Vikrant; Avinash, K.; Sen, A. Physics of Plasmas, Vol. 19, Issue 9 https://doi.org/10.1063/1.4754010	journal	September 2012
Magnetized dusty plasma: On issues of its complexity and magnetization of charged dust particles Choudhary, Mangilal Contributions to Plasma Physics https://doi.org/10.1002/ctpp.202300072	journal	September 2023
Optical characterization of particle traps Selwyn, G. S. Plasma Sources Science and Technology, Vol. 3, Issue 3 https://doi.org/10.1088/0963-0252/3/3/016	journal	August 1994
Dusty plasmas in the solar system Goertz, C. K. Reviews of Geophysics, Vol. 27, Issue 2 https://doi.org/10.1029/RG027i002p00271	journal	January 1989
Experimental determination of shock speed versus exciter speed in a two-dimensional dusty plasma Kananovich, Anton; Goree, J. Physical Review E, Vol. 101, Issue 4 https://doi.org/10.1103/PhysRevE.101.043211	journal	April 2020
Decharging of Complex Plasmas: First Kinetic Observations Ivlev, A. V.; Kretschmer, M.; Zuzic, M. Physical Review Letters, Vol. 90, Issue 5 https://doi.org/10.1103/PhysRevLett.90.055003	journal	February 2003
Equilibrium properties and phase diagram of two-dimensional Yukawa systems Hartmann, P.; Kalman, G. J.; Donkó, Z. Physical Review E, Vol. 72, Issue 2 https://doi.org/10.1103/PhysRevE.72.026409	journal	August 2005
Coulomb fission of a dusty plasma Merlino, R. L.; Meyer, J. K.; Avinash, K. Physics of Plasmas, Vol. 23, Issue 6 https://doi.org/10.1063/1.4954906	journal	June 2016
Discharging of dust particles in the afterglow of plasma with large dust density Denysenko, I. B.; Stefanović, I.; Sikimić, B. Physical Review E, Vol. 88, Issue 2 https://doi.org/10.1103/PhysRevE.88.023104	journal	August 2013
Three-dimensional dusty plasma in a strong magnetic field: Observation of rotating dust tori Choudhary, Mangilal; Bergert, Roman; Mitic, Slobodan Physics of Plasmas, Vol. 27, Issue 6 https://doi.org/10.1063/5.0004842	journal	June 2020
Compressional and shear wakes in a two-dimensional dusty plasma crystal Nosenko, V.; Goree, J.; Ma, Z. W. Physical Review E, Vol. 68, Issue 5 https://doi.org/10.1103/PhysRevE.68.056409	journal	November 2003
Finite-size effects in the static structure factor S(k) and S(0) for a two-dimensional Yukawa liquid Zhuravlyov, Vitaliy; Goree, J.; Elvati, Paolo Physical Review E, Vol. 108, Issue 3 https://doi.org/10.1103/PhysRevE.108.035211	journal	September 2023
Influence of nanoparticle formation on the time and the space resolved metastable density in argon-acetylene plasmas Stefanović, I.; Sadeghi, N.; Winter, J. Plasma Sources Science and Technology, Vol. 26, Issue 6 https://doi.org/10.1088/1361-6595/aa6f9c	journal	May 2017
Position dependent microparticle charge in a spatiotemporal afterglow plasma van Huijstee, J. C. A.; Blom, P.; Beckers, J. Physics of Plasmas, Vol. 30, Issue 3 https://doi.org/10.1063/5.0139815	journal	March 2023
Controlling the charge of dust particles in a plasma afterglow by timed switching of an electrode voltage Chaubey, Neeraj; Goree, J. Journal of Physics D: Applied Physics, Vol. 56, Issue 37 https://doi.org/10.1088/1361-6463/acd78f	journal	June 2023
Preservation of a Dust Crystal as it Falls in an Afterglow Plasma Chaubey, Neeraj; Goree, J. Frontiers in Physics, Vol. 10 https://doi.org/10.3389/fphy.2022.879092	journal	May 2022
A non-invasive technique to determine ion fluxes and ion densities in reactive and non-reactive pulsed plasmas Sikimić, B.; Stefanović, I.; Denysenko, I. B. Plasma Sources Science and Technology, Vol. 22, Issue 4 https://doi.org/10.1088/0963-0252/22/4/045009	journal	June 2013
Residual dust charges in discharge afterglow Couëdel, L.; Mikikian, M.; Boufendi, L. Physical Review E, Vol. 74, Issue 2 https://doi.org/10.1103/PhysRevE.74.026403	journal	August 2006
Charge control of micro-particles in a shielded plasma afterglow van Minderhout, B.; van Huijstee, J. C. A.; Platier, B. Plasma Sources Science and Technology, Vol. 29, Issue 6 https://doi.org/10.1088/1361-6595/ab8e4f	journal	June 2020
The development and evaluation of the Earth Gravitational Model 2008 (EGM2008): THE EGM2008 EARTH GRAVITATIONAL MODEL Pavlis, Nikolaos K.; Holmes, Simon A.; Kenyon, Steve C. Journal of Geophysical Research: Solid Earth, Vol. 117, Issue B4 https://doi.org/10.1029/2011JB008916	journal	April 2012
Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference Cell Collins, S. M.; Brown, D. A.; O’Hanlon, J. F. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 2 https://doi.org/10.1116/1.580158	journal	March 1996
Probing the Plasma Sheath by the Continuous Mass Loss of Microparticles Carstensen, Jan; Haase, Fabian; Jung, Hendrik IEEE Transactions on Plasma Science, Vol. 41, Issue 4 https://doi.org/10.1109/TPS.2012.2224330	journal	April 2013
Accurate particle position measurement from images Feng, Y.; Goree, J.; Liu, Bin Review of Scientific Instruments, Vol. 78, Issue 5 https://doi.org/10.1063/1.2735920	journal	May 2007
Temporal dusty plasma afterglow: A review Couëdel, Lénaïc Frontiers in Physics, Vol. 10 https://doi.org/10.3389/fphy.2022.1015603	journal	September 2022
High-precision in situ measurements of size and optical properties of single microparticles in an RF plasma Wohlfahrt, Sören; Block, Dietmar Physics of Plasmas, Vol. 28, Issue 12 https://doi.org/10.1063/5.0071904	journal	December 2021
Influence of the ambipolar-to-free diffusion transition on dust particle charge in a complex plasma afterglow Couëdel, L.; Samarian, A. A.; Mikikian, M. Physics of Plasmas, Vol. 15, Issue 6 https://doi.org/10.1063/1.2938387	journal	June 2008
Dust dynamics during the plasma afterglow Denysenko, I. B.; Mikikian, M.; Azarenkov, N. A. Journal of Physics D: Applied Physics, Vol. 55, Issue 9 https://doi.org/10.1088/1361-6463/ac3539	journal	November 2021
Transition from ambipolar to free diffusion in an EUV-induced argon plasma Platier, B.; Limpens, R.; Lassise, A. C. Applied Physics Letters, Vol. 116, Issue 10 https://doi.org/10.1063/1.5142290	journal	March 2020

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