Vapor-Phase Halogenation of Hydrogen-Terminated Silicon(100) Using N -Halogen-succinimides

Raffaelle, Patrick R.; Wang, George T.; Shestopalov, Alexander A.

doi:10.1021/acsami.3c13269

Title: Vapor-Phase Halogenation of Hydrogen-Terminated Silicon(100) Using N -Halogen-succinimides

Journal Article · 14 November 2023 · ACS Applied Materials and Interfaces

DOI: https://doi.org/10.1021/acsami.3c13269 · OSTI ID:2208869

Raffaelle, Patrick R. ^[1];

^[2];

^[1]

Department of Chemical Engineering, Hajim School of Engineering and Applied Sciences, University of Rochester, Rochester, New York 14627, United States
Sandia National Laboratories, Albuquerque, New Mexico 87185, United States

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Sponsoring Organization:: USDOE

Grant/Contract Number:: NA0003525

OSTI ID:: 2208869

Alternate ID(s):: OSTI ID: 2317744; OSTI ID: 2223069

Journal Information:: ACS Applied Materials and Interfaces, Journal Name: ACS Applied Materials and Interfaces Journal Issue: 47 Vol. 15; ISSN 1944-8244

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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