Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO3 thin films

Lau, Claudia; Combs, Nicholas G.; Karapetrova, Evguenia; Jiang, Juan; Stemmer, Susanne; Ahn, Charles H.; Walker, Frederick J.

doi:10.1116/6.0001454

Title: Resonant x-ray scattering method for measuring cation stoichiometry in BaSnO₃ thin films

Journal Article · 21 December 2021 · Journal of Vacuum Science and Technology A

DOI: https://doi.org/10.1116/6.0001454 · OSTI ID:2208840

Lau, Claudia ^[1]; Combs, Nicholas G. ^[2]; Karapetrova, Evguenia ^[3];

^[1];

^[2];

^[1]; Walker, Frederick J. ^[1]

Yale Univ., New Haven, CT (United States)
Univ. of California, Santa Barbara, CA (United States)
Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

In this study, we develop a resonant scattering technique to measure cation stoichiometry of lanthanum-doped BaSnO₃ (BSO) thin films on a DyScO₃ substrate. Samples are grown by a hybrid molecular beam epitaxy method and display high room-temperature carrier mobilities. The measured thin films are grown with widely differing cation arrival rates, with Ba being evaporated from an elemental source and Sn from a SnO₂ source. Differences in mobilities in these films may arise from differences in Ba/Sn cation stoichiometry. Owing to the similar scattering strength of the Ba and Sn cations, odd-order Bragg peaks of BSO are particularly sensitive to the material's cation stoichiometry, i.e., the Ba/Sn ratio. Sensitivity to cation stoichiometry is further enhanced using the technique of resonant x-ray scattering, which changes the scattering strength of a single element across the Ba L absorption edges. We determine that the Ba/Sn cation stoichiometry varies from unity by less than 1% for films of mobility ranging from 84.8 to 144 cm²/(V s) and conclude that the mobility of these films scales with film thickness and growth rate rather than stoichiometry.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS); Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)

Sponsoring Organization:: US Department of the Navy, Office of Naval Research (ONR); USDOE; USDOE Office of Science (SC)

Grant/Contract Number:: AC02-06CH11357; SC0012704

OSTI ID:: 2208840

Journal Information:: Journal of Vacuum Science and Technology A, Journal Name: Journal of Vacuum Science and Technology A Journal Issue: 1 Vol. 40; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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