Synergistic effect on silicon surface under low energy he ion irradiation at elevated temperatures

Termini, Nicholas C.; Tripathi, Jitendra K.; Hassanein, Ahmed

doi:10.1016/j.tsf.2023.140094

Title: Synergistic effect on silicon surface under low energy he ion irradiation at elevated temperatures

Journal Article · 31 October 2023 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2023.140094 · OSTI ID:2204515

Termini, Nicholas C.; Tripathi, Jitendra K.; Hassanein, Ahmed

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Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

OSTI ID:: 2204515

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: C Vol. 785; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

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Title: Synergistic effect on silicon surface under low energy he ion irradiation at elevated temperatures

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