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Title: The effect of step-flow growth on the surface morphology and optical properties of thick diamond films

Journal Article · · Diamond and Related Materials

Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
SC0021230
OSTI ID:
2203156
Journal Information:
Diamond and Related Materials, Journal Name: Diamond and Related Materials Vol. 140 Journal Issue: PB; ISSN 0925-9635
Publisher:
ElsevierCopyright Statement
Country of Publication:
Netherlands
Language:
English

References (24)

Simplified Monte Carlo simulations of chemical vapour deposition diamond growth journal August 2009
Spiral crystal growth journal April 2000
Origin of growth defects in CVD diamond epitaxial films journal January 2008
Effect of steps on dislocations in CVD diamond grown on {001} substrates journal August 2009
Step-related growth phenomena on exact and misoriented {001} surfaces of CVD-grown single-crystal diamonds journal April 1995
Vicinal silicon surfaces: From step density wave to faceting journal July 2007
Defects in Device Grade Homoepitaxial Diamond Thin Films Grown with Ultra-Low CH4/H2 Conditions by Microwave-Plasma Chemical Vapor Deposition journal July 1999
Notes on interface growth kinetics 50 years after Burton, Cabrera and Frank journal March 2004
3D kinetic Monte-Carlo simulations of diamond growth on (1 0 0) surfaces journal March 2022
Isotope shifts of nitrogen-related localised mode vibrations in diamond journal October 1987
Penetration and energy-loss theory of electrons in solid targets journal January 1972
Characterisation of high-quality thick single-crystal diamond grown by CVD with a low nitrogen addition journal October 2006
Attractive interaction between steps journal December 1991
Homoepitaxial deposition of high-quality thick diamond films: effect of growth parameters journal March 2005
Experimentally defining the safe and efficient, high pressure microwave plasma assisted CVD operating regime for single crystal diamond synthesis journal August 2013
Cathodoluminescence studies of isotope shifts associated with localised vibrational modes in synthetic diamond journal October 1989
Growth Rate and Surface Morphology of Diamond Homoepitaxial Films on Misoriented (001) Substrates journal September 1996
Fluctuations and instabilities of steps in the growth and sublimation of crystals journal January 1995
Optical centres related to nitrogen, vacancies and interstitials in polycrystalline diamond films grown by plasma-assisted chemical vapour deposition journal September 1989
Investigation of homoepitaxial growth by microwave plasma CVD providing high growth rate and high quality of diamond simultaneously journal March 2020
Strong excitonic recombination radiation from homoepitaxial diamond thin films at room temperature journal August 1998
Junction properties of homoepitaxial diamond films grown by step–flow mode journal December 1998
Homoepitaxial diamond film growth: High purity, high crystalline quality, isotopic enrichment, and single color center formation: Homoepitaxial diamond film growth journal October 2015
Influence of surface misorientation of HPHT diamond substrates on crystal morphologies and threading dislocations propagation journal July 2013

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