Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

Ribet, Stephanie M.; Zeltmann, Steven E.; Bustillo, Karen C.; Dhall, Rohan; Denes, Peter; Minor, Andrew M.; dos Reis, Roberto; Dravid, Vinayak P.; Ophus, Colin

doi:10.1093/micmic/ozad111

Title: Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

Journal Article · 17 October 2023 · Microscopy and Microanalysis

DOI: https://doi.org/10.1093/micmic/ozad111 · OSTI ID:2202904

; Zeltmann, Steven E.; Bustillo, Karen C.; Dhall, Rohan; Denes, Peter; Minor, Andrew M.;

;

; Ophus, Colin

Abstract In a scanning transmission electron microscope (STEM), producing a high-resolution image generally requires an electron beam focused to the smallest point possible. However, the magnetic lenses used to focus the beam are unavoidably imperfect, introducing aberrations that limit resolution. Modern STEMs overcome this by using hardware aberration correctors comprised of many multipole elements, but these devices are complex, expensive, and can be difficult to tune. We demonstrate a design for an electrostatic phase plate that can act as an aberration corrector. The corrector is comprised of annular segments, each of which is an independent two-terminal device that can apply a constant or ramped phase shift to a portion of the electron beam. We show the improvement in image resolution using an electrostatic corrector. Engineering criteria impose that much of the beam within the probe-forming aperture be blocked by support bars, leading to large probe tails for the corrected probe that sample the specimen beyond the central lobe. We also show how this device can be used to create other STEM beam profiles such as vortex beams and probes with a high degree of phase diversity, which improve information transfer in ptychographic reconstructions.

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Sponsoring Organization:: USDOE Office of Science (SC), Office of Workforce Development for Teachers & Scientists (WDTS); USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI ID:: 2202904

Alternate ID(s):: OSTI ID: 2439723

Journal Information:: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 6 Vol. 29; ISSN 1431-9276

Publisher:: Oxford University PressCopyright Statement

Country of Publication:: United States

Language:: English

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