Epitaxial Growth of (−201) β-Ga 2 O 3 on (001) Diamond Substrates

Nandi, Arpit; Cherns, David; Sanyal, Indraneel; Kuball, Martin

doi:10.1021/acs.cgd.3c00972

Title: Epitaxial Growth of (−201) β-Ga ₂ O ₃ on (001) Diamond Substrates

Journal Article · 16 October 2023 · Crystal Growth and Design

DOI: https://doi.org/10.1021/acs.cgd.3c00972 · OSTI ID:2202527

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^[1]; Sanyal, Indraneel ^[1];

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HH Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol, BS8 1TL, United Kingdom

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Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0021230

OSTI ID:: 2202527

Journal Information:: Crystal Growth and Design, Journal Name: Crystal Growth and Design Journal Issue: 11 Vol. 23; ISSN 1528-7483

Publisher:: American Chemical SocietyCopyright Statement

Country of Publication:: France

Language:: English

References (15)

Cross-sectional TEM imaging of β-Ga₂ O₃ thin films formed on c -plane and a -plane sapphire substrates Nakagomi, Shinji; Kokubun, Yoshihiro physica status solidi (a), Vol. 210, Issue 9 https://doi.org/10.1002/pssa.201329040	journal	May 2013
Towards High-Mobility Heteroepitaxial β-Ga ₂ O ₃ on Sapphire − Dependence on The Substrate Off-Axis Angle Rafique, Subrina; Han, Lu; Neal, Adam T. physica status solidi (a), Vol. 215, Issue 2 https://doi.org/10.1002/pssa.201700467	journal	November 2017
The lattice distortion of β-Ga2O3 film grown on c-plane sapphire Chen, Yuanpeng; Liang, Hongwei; Xia, Xiaochuan Journal of Materials Science: Materials in Electronics, Vol. 26, Issue 5 https://doi.org/10.1007/s10854-015-2821-x	journal	February 2015
Structural, Optical, and Electrical Characterization of Monoclinic β-Ga2O3 Grown by MOVPE on Sapphire Substrates Tadjer, Marko J.; Mastro, Michael A.; Mahadik, Nadeemullah A. Journal of Electronic Materials, Vol. 45, Issue 4 https://doi.org/10.1007/s11664-016-4346-3	journal	February 2016
The oxidation of (100) textured diamond John, P.; Polwart, N.; Troupe, C. E. Diamond and Related Materials, Vol. 11, Issue 3-6 https://doi.org/10.1016/S0925-9635(01)00673-2	journal	March 2002
Crystal orientation of β-Ga2O3 thin films formed on c-plane and a-plane sapphire substrate Nakagomi, Shinji; Kokubun, Yoshihiro Journal of Crystal Growth, Vol. 349, Issue 1 https://doi.org/10.1016/j.jcrysgro.2012.04.006	journal	June 2012
Step flow growth of β -Ga ₂ O ₃ thin films on vicinal (100) β -Ga ₂ O ₃ substrates grown by MOVPE Bin Anooz, S.; Grüneberg, R.; Wouters, C. Applied Physics Letters, Vol. 116, Issue 18 https://doi.org/10.1063/5.0005403	journal	May 2020
Investigations on epitaxy and lattice distortion of sputter deposited β-Ga₂O₃ layers on GaN templates Ghosh, Sahadeb; Srivastava, Himanshu; Rao, P. N. Semiconductor Science and Technology, Vol. 35, Issue 8 https://doi.org/10.1088/1361-6641/ab9326	journal	July 2020
VESTA 3 for three-dimensional visualization of crystal, volumetric and morphology data Momma, Koichi; Izumi, Fujio Journal of Applied Crystallography, Vol. 44, Issue 6 https://doi.org/10.1107/S0021889811038970	journal	October 2011
PTCLab : free and open-source software for calculating phase transformation crystallography Gu, X. -F.; Furuhara, T.; Zhang, W. -Z. Journal of Applied Crystallography, Vol. 49, Issue 3 https://doi.org/10.1107/S1600576716006075	journal	May 2016
High Performance ${\beta}$ -Ga ₂ O ₃ Nano-Membrane Field Effect Transistors on a High Thermal Conductivity Diamond Substrate Noh, Jinhyun; Ye, Peide D.; Alajlouni, Sami IEEE Journal of the Electron Devices Society, Vol. 7 https://doi.org/10.1109/JEDS.2019.2933369	journal	January 2019
Heteroepitaxial growth of β-Ga2O3 films on SiC via molecular beam epitaxy Nepal, Neeraj; Katzer, D. Scott; Downey, Brian P. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 38, Issue 6 https://doi.org/10.1116/6.0000452	journal	October 2020
Two-step growth of β-Ga2O3 films on (100) diamond via low pressure chemical vapor deposition Karim, Md Rezaul; Chen, Zhaoying; Feng, Zixuan Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 39, Issue 2 https://doi.org/10.1116/6.0000854	journal	February 2021
Growth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy Modak, Sushrut; Lundh, James Spencer; Al-Mamun, Nahid Sultan Journal of Vacuum Science & Technology A, Vol. 40, Issue 6 https://doi.org/10.1116/6.0002115	journal	November 2022
Editors' Choice—Si- and Sn-Doped Homoepitaxial β-Ga ₂ O ₃ Layers Grown by MOVPE on (010)-Oriented Substrates Baldini, Michele; Albrecht, Martin; Fiedler, Andreas ECS Journal of Solid State Science and Technology, Vol. 6, Issue 2 https://doi.org/10.1149/2.0081702jss	journal	October 2016

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Title: Epitaxial Growth of (−201) β-Ga ₂ O ₃ on (001) Diamond Substrates