Particle-in-cell modeling of electron beam generated plasma

Journal Article · 22 May 2023 · Plasma Sources Science and Technology

DOI: https://doi.org/10.1088/1361-6595/acd3a9 · OSTI ID:1995167

Rauf, Shahid  ^[1]; Sydorenko, D.  ^[2]; Jubin, S. ^[3]; Villafana, W.  ^[3]; Ethier, S.  ^[3]; Khrabrov, A. ^[3]; Kaganovich, I.  ^[3]

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1. Applied Materials, Inc., Santa Clara, CA (United States)
2. Univ. of Alberta, Edmonton, AB (Canada)
3. Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Plasmas generated using energetic electron beams are well known for their low electron temperature (T_e) and plasma potential, which makes them attractive for atomic-precision plasma processing applications such as atomic layer etch and deposition. A 2-dimensional particle-in-cell model for an electron beam-generated plasma in argon confined by a constant applied magnetic field is described here in this article. Plasma production primarily occurs in the path of the beam electrons in the center of the chamber. The resulting plasma spreads out in the chamber through non-ambipolar diffusion with a short-circuiting effect allowing unequal electron and ion fluxes to different regions of the bounding conductive chamber walls. The cross-field transport of the electrons (and thus the steady-state characteristics of the plasma) are strongly impacted by the magnetic field. T_e is anisotropic in the electron beam region, but low and isotropic away from the plasma production zone. The plasma density increases and the plasma becomes more confined near the region of production when the magnetic field strengthens. The magnetic field reduces both electron physical and energy transport perpendicular to the magnetic field. T_e is uniform along the magnetic field lines and slowly decreases perpendicular to it. Electrons are less energetic in the sheath regions where the sheath electric field repels and confines the low-energy electrons from the bulk plasma. Even though electron and ion densities are similar in the bulk plasma due to quasi-neutrality, electron and ion fluxes on the grounded chamber walls are unequal at most locations. Electron confinement by the magnetic field weakens with increasing pressure, and the plasma spread out farther from the electron beam region.

• Research Organization: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
• Sponsoring Organization: USDOE
• Grant/Contract Number: AC02-09CH11466
• OSTI ID: 1995167
• Journal Information: Plasma Sources Science and Technology, Journal Name: Plasma Sources Science and Technology Journal Issue: 5 Vol. 32; ISSN 0963-0252
• Publisher: IOP PublishingCopyright Statement
• Country of Publication: United States
• Language: English