In-situ study of the crystallization of amorphous CuInSe₂ thin films and the effect of InCl₃ treatment

Journal Article · 12 January 2022 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2022.139095 · OSTI ID:1991288

Palmiotti, Elizabeth ^[1]; Belfore, Benjamin ^[2]; Poudel, Deewakar ^[2]; Marsillac, Sylvain ^[2]; Rockett, Angus  ^[3]

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1. Colorado School of Mines, Golden, CO (United States); Colorado School of Mines
2. Old Dominion University, Norfolk, VA (United States)
3. Colorado School of Mines, Golden, CO (United States)

Amorphous CuInSe₂ films were deposited by rf-magnetron sputtering onto soda-lime glass and silicon substrates. Some were treated with an InCl₃ solution. The films were annealed in a nitrogen environment and studied using in-situ high-temperature x-ray diffraction. CuInSe₂ recrystallization began at ~270°C and all samples showed increasing crystallinity up to ~380°C. The onset and completion temperatures for crystallization varied minimally between samples. Here, the as-deposited films (no InCl₃) showed CuSe phase formation at intermediate temperatures (180-250°C). Na₂O from the soda-lime glass increased the net rate of crystallization. InCl₃ resulted in an even greater increase to crystallization rate and largely improved the final crystalline quality.

• Research Organization: Colorado School of Mines, Golden, CO (United States)
• Sponsoring Organization: USDOE Office of Energy Efficiency and Renewable Energy (EERE); USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office
• Grant/Contract Number: EE0007551
• OSTI ID: 1991288
• Journal Information: Thin Solid Films, Journal Name: Thin Solid Films Vol. 746; ISSN 0040-6090
• Publisher: ElsevierCopyright Statement
• Country of Publication: United States
• Language: English