Electrochemical polishing of chemical vapor deposited niobium thin films

Sun, Zeming; Ge, Mingqi; Maniscalco, James T.; Arrieta, Victor; McNeal, Shawn R.; Liepe, Matthias U.

doi:10.1016/j.tsf.2023.139948

Title: Electrochemical polishing of chemical vapor deposited niobium thin films

Journal Article · 01 September 2023 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2023.139948 · OSTI ID:1989391

; Ge, Mingqi;

; Arrieta, Victor; McNeal, Shawn R.; Liepe, Matthias U.

Not Available

View Journal Article

Cite

Export

Save

Sponsoring Organization:: USDOE

Grant/Contract Number:: SC0015727

OSTI ID:: 1989391

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: C Vol. 780; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (34)

Buffered electrochemical polishing of niobium Ciovati, Gianluigi; Tian, Hui; Corcoran, Sean G. Journal of Applied Electrochemistry, Vol. 41, Issue 6 https://doi.org/10.1007/s10800-011-0286-z	journal	March 2011
Fundamental aspects of electropolishing Landolt, D. Electrochimica Acta, Vol. 32, Issue 1, p. 1-11 https://doi.org/10.1016/0013-4686(87)87001-9	journal	January 1987
Chemical vapor deposition of niobium on graphite Miyake, M.; Hirooka, Y.; Imoto, R. Thin Solid Films, Vol. 63, Issue 2 https://doi.org/10.1016/0040-6090(79)90033-6	journal	November 1979
Intrinsic stress of magnetron-sputtered niobium films Wu, C. T. Thin Solid Films, Vol. 64, Issue 1 https://doi.org/10.1016/0040-6090(79)90549-2	journal	November 1979
Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments Landolt, D.; Chauvy, P. -F.; Zinger, O. Electrochimica Acta, Vol. 48, Issue 20-22 https://doi.org/10.1016/S0013-4686(03)00368-2	journal	September 2003
The growth and structure of epitaxial niobium on sapphire Wildes, A. R.; Mayer, J.; Theis-Bröhl, K. Thin Solid Films, Vol. 401, Issue 1-2 https://doi.org/10.1016/S0040-6090(01)01631-5	journal	December 2001
Concept of microsmoothing in the electropolishing process Hryniewicz, Tadeusz Surface and Coatings Technology, Vol. 64, Issue 2 https://doi.org/10.1016/S0257-8972(09)90006-8	journal	May 1994
Surface studies of niobium chemically polished under conditions for superconducting radio frequency (SRF) cavity production Tian, Hui; Reece, Charles E.; Kelley, Michael J. Applied Surface Science, Vol. 253, Issue 3 https://doi.org/10.1016/j.apsusc.2006.01.083	journal	November 2006
Low pressure chemical vapor deposition of niobium coating on silicon carbide Liu, Qiaomu; Zhang, Litong; Cheng, Laifei Applied Surface Science, Vol. 255, Issue 20 https://doi.org/10.1016/j.apsusc.2009.06.037	journal	July 2009
Extreme diffusion limited electropolishing of niobium radiofrequency cavities Crawford, Anthony C. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 849 https://doi.org/10.1016/j.nima.2017.01.006	journal	March 2017
Niobium oxides and niobates physical properties: Review and prospects Nico, C.; Monteiro, T.; Graça, M. P. F. Progress in Materials Science, Vol. 80 https://doi.org/10.1016/j.pmatsci.2016.02.001	journal	July 2016
Surface morphology of homoepitaxial β-Ga2O3 thin films grown by molecular beam epitaxy Oshima, Takayoshi; Arai, Naoki; Suzuki, Norihito Thin Solid Films, Vol. 516, Issue 17 https://doi.org/10.1016/j.tsf.2007.10.045	journal	July 2008
Low pressure chemical vapor deposition of niobium coatings on graphite Liu, Qiaomu; Zhang, Litong; Cheng, Laifei Vacuum, Vol. 85, Issue 2 https://doi.org/10.1016/j.vacuum.2010.07.006	journal	August 2010
Study of anodic layers and their effects on electropolishing of bulk and electroplated films of copper Huo, J.; Solanki, R.; McAndrew, J. Journal of Applied Electrochemistry, Vol. 34, Issue 3 https://doi.org/10.1023/B:JACH.0000015621.31360.14	journal	March 2004
A compact and cost-effective hard X-ray free-electron laser driven by a high-brightness and low-energy electron beam Prat, Eduard; Abela, Rafael; Aiba, Masamitsu Nature Photonics, Vol. 14, Issue 12 https://doi.org/10.1038/s41566-020-00712-8	journal	November 2020
A MHz-repetition-rate hard X-ray free-electron laser driven by a superconducting linear accelerator Decking, W.; Abeghyan, S.; Abramian, P. Nature Photonics, Vol. 14, Issue 6 https://doi.org/10.1038/s41566-020-0607-z	journal	May 2020
From precision physics to the energy frontier with the Compact Linear Collider Sicking, Eva; Ström, Rickard Nature Physics, Vol. 16, Issue 4 https://doi.org/10.1038/s41567-020-0834-8	journal	April 2020
TEM and SIMS Analysis of (100), (110), and (111) Single Crystal Niobium Batchelor, A. D.; Leonard, D. N.; Russell, P. E. SINGLE CRYSTAL - LARGE GRAIN NIOBIUM TECHNOLOGY: International Niobium Workshop, AIP Conference Proceedings https://doi.org/10.1063/1.2770680	conference	January 2007
Evolution of terrace size distributions during thin-film growth by step-mediated epitaxy Gossmann, H. -J.; Sinden, F. W.; Feldman, L. C. Journal of Applied Physics, Vol. 67, Issue 2 https://doi.org/10.1063/1.345754	journal	January 1990
Niobium films for superconducting accelerating cavities Benvenuti, C.; Circelli, N.; Hauer, M. Applied Physics Letters, Vol. 45, Issue 5 https://doi.org/10.1063/1.95289	journal	September 1984
The distribution function of surface charge density with respect to surface curvature Enze, L. Journal of Physics D: Applied Physics, Vol. 19, Issue 1 https://doi.org/10.1088/0022-3727/19/1/005	journal	January 1986
Mirror-smooth surfaces and repair of defects in superconducting RF cavities by mechanical polishing Cooper, C. A.; Cooley, L. D. Superconductor Science and Technology, Vol. 26, Issue 1 https://doi.org/10.1088/0953-2048/26/1/015011	journal	November 2012
50 years of success for SRF accelerators—a review Padamsee, Hasan Superconductor Science and Technology, Vol. 30, Issue 5 https://doi.org/10.1088/1361-6668/aa6376	journal	April 2017
Development of sputtered Nb ₃ Sn films on copper substrates for superconducting radiofrequency applications Ilyina, E. A.; Rosaz, G.; Descarrega, J. B. Superconductor Science and Technology, Vol. 32, Issue 3 https://doi.org/10.1088/1361-6668/aaf61f	journal	January 2019
Simulation of nonlinear superconducting rf losses derived from characteristic topography of etched and electropolished niobium surfaces Xu, Chen; Reece, Charles E.; Kelley, Michael J. Physical Review Accelerators and Beams, Vol. 19, Issue 3 https://doi.org/10.1103/PhysRevAccelBeams.19.033501	journal	March 2016
Field emission from laser-processed niobium (110) single crystals Porshyn, V.; Serbun, P.; Lützenkirchen-Hecht, D. Physical Review Accelerators and Beams, Vol. 22, Issue 2 https://doi.org/10.1103/PhysRevAccelBeams.22.023101	journal	February 2019
Evaluation of the diffusion coefficient of fluorine during the electropolishing of niobium Tian, Hui; Reece, Charles E. Physical Review Special Topics - Accelerators and Beams, Vol. 13, Issue 8 https://doi.org/10.1103/PhysRevSTAB.13.083502	journal	August 2010
Topographic power spectral density study of the effect of surface treatment processes on niobium for superconducting radio frequency accelerator cavities Xu, Chen; Tian, Hui; Reece, Charles E. Physical Review Special Topics - Accelerators and Beams, Vol. 15, Issue 4 https://doi.org/10.1103/PhysRevSTAB.15.043502	journal	April 2012
Niobium thin film deposition studies on copper surfaces for superconducting radio frequency cavity applications Roach, W. M.; Beringer, D. B.; Skuza, J. R. Physical Review Special Topics - Accelerators and Beams, Vol. 15, Issue 6 https://doi.org/10.1103/PhysRevSTAB.15.062002	journal	June 2012
Circuit quantum electrodynamics Blais, Alexandre; Grimsmo, Arne L.; Girvin, S. M. Reviews of Modern Physics, Vol. 93, Issue 2 https://doi.org/10.1103/RevModPhys.93.025005	journal	May 2021
Recent developments in deep x-ray lithography Ehrfeld, Wolfgang Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 6 https://doi.org/10.1116/1.590490	journal	November 1998
Atomistic Processes in the Early Stages of Thin-Film Growth Zhang, Z. Science, Vol. 276, Issue 5311 https://doi.org/10.1126/science.276.5311.377	journal	April 1997
The Mechanism of Electropolishing of Niobium in Hydrofluoric–Sulfuric Acid Electrolyte Tian, Hui; Corcoran, Sean G.; Reece, Charles E. Journal of The Electrochemical Society, Vol. 155, Issue 9, p. D563-D568 https://doi.org/10.1149/1.2945913	journal	January 2008
On the Mechanism of Niobium Electropolishing Chandra, A.; Sumption, M.; Frankel, G. S. Journal of The Electrochemical Society, Vol. 159, Issue 11 https://doi.org/10.1149/2.054211jes	journal	January 2012

Similar Records

Chemical vapor deposition of vanadium, niobium, and tantalum nitride thin films

Journal Article · 1993 · Chemistry of Materials; (United States) · OSTI ID:6097683

Fix, R; Gordon, R G; Hoffman, D M

Electrochromic properties of niobium oxide thin films prepared by chemical vapor deposition

Journal Article · 1994 · Journal of the Electrochemical Society; (United States) · OSTI ID:7181522

Maruyama, Toshiro; Kanagawa, Tetsuya

Electrochemistry of chemical vapor deposited tungsten films with relevance to chemical mechanical polishing

Journal Article · 1996 · Journal of the Electrochemical Society · OSTI ID:474636

Kneer, E A; Raghunath, C; Raghavan, S; +1 more

Title: Electrochemical polishing of chemical vapor deposited niobium thin films

Citation Formats

References (34)

Similar Records

Related Subjects