Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film

Du, Linfeng; Ruchhoeft, Paul; Economou, Demetre J.; Donnelly, Vincent M.

doi:10.1116/6.0001709

Title: Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film

Journal Article · 25 February 2022 · Journal of Vacuum Science and Technology B

DOI: https://doi.org/10.1116/6.0001709 · OSTI ID:1980708

Du, Linfeng ^[1]; Ruchhoeft, Paul ^[2];

^[3];

^[3]

Univ. of Houston, TX (United States). Plasma Processing Laboratory; Univ. of Michigan, Ann Arbor, MI (United States)
Univ. of Houston, TX (United States)
Univ. of Houston, TX (United States). Plasma Processing Laboratory

A new method for absolute measurement of the vacuum ultraviolet (VUV) photon flux at the edge of a plasma is described. The light produced by the plasma was allowed to strike a negatively biased, gold-coated copper substrate remote from the plasma. The resulting photoelectron emission current was measured, and the absolute photon flux was then found from the known photoelectron yield of Au. The method was used to quantify the amount of VUV light produced by an Ar/He inductively coupled plasma (ICP). Strong emissions at 104.82 and 106.67 nm, corresponding to the 1s₂ and 1s₄ resonant states of Ar, were observed. The maximum, integrated VUV photon flux measured at the remote location was 3.2 × 10¹³ photons/cm² s. This was estimated to correspond to a flux of 5 × 10¹⁵ photons/cm² s at the edge of the ICP, in the range of reported values under similar conditions.

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Research Organization:: Univ. of Michigan, Ann Arbor, MI (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES); National Science Foundation (NSF)

Grant/Contract Number:: SC0001939

OSTI ID:: 1980708

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 2 Vol. 40; ISSN 2166-2746

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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Title: Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film

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