Nonthermal plasma synthesis of silicon carbonitride

Journal Article · 12 May 2023 · Plasma Processes and Polymers

DOI: https://doi.org/10.1002/ppap.202300021 · OSTI ID:1973535

Herzberg, Steven ^[1]; Mathaudhu, Suveen N. ^[2]; Mangolini, Lorenzo  ^[1]

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1. Department of Mechanical Engineering UC Riverside Riverside California USA
2. Department of Mechanical Engineering UC Riverside Riverside California USA, Department of Metallurgical and Materials Engineering Colorado School of Mines Golden Colorado USA

Abstract The use of a low‐temperature plasma for the synthesis of amorphous silicon carbonitride (SiCN) nanoparticles enables the realization of sintered bulk samples with high thermal stability. Amorphous SiCN nanoparticles are produced from a mixture of silane, methane, and ammonia utilizing a mid‐pressure, radio‐frequency, continuous flow reactor. Particle characterization shows that the nanoparticles are largely amorphous with some crystalline silicon and silicon carbide domains <10 nm in size. Compositional tuning, controlled by varying the precursor flow rates, coupled with the uniform mixing of elements at the nanoscale, results in samples that resist crystallization even when sintered at temperatures as high as 2000°C. This study suggests that the low‐temperature plasma synthesis of nanoparticles has great potential to produce bulk structural materials for application in harsh environments.

• Research Organization: University of California, Riverside, CA (United States)
• Sponsoring Organization: USDOE
• Grant/Contract Number: FE0032091
• OSTI ID: 1973535
• Journal Information: Plasma Processes and Polymers, Journal Name: Plasma Processes and Polymers Journal Issue: 8 Vol. 20; ISSN 1612-8850
• Publisher: Wiley Blackwell (John Wiley & Sons)Copyright Statement
• Country of Publication: Germany
• Language: English