Aerosol jet printing of piezoelectric surface acoustic wave thermometer

McKibben, Nicholas; Ryel, Blake; Manzi, Jacob; Muramutsa, Florent; Daw, Joshua; Subbaraman, Harish; Estrada, David; Deng, Zhangxian

doi:10.1038/s41378-023-00492-5

Title: Aerosol jet printing of piezoelectric surface acoustic wave thermometer

Journal Article · 04 May 2023 · Microsystems & Nanoengineering (Online)

DOI: https://doi.org/10.1038/s41378-023-00492-5 · OSTI ID:1972500

McKibben, Nicholas ^[1]; Ryel, Blake ^[1]; Manzi, Jacob ^[2]; Muramutsa, Florent ^[1];

^[3]; Subbaraman, Harish ^[2];

^[4];

^[1]

Boise State University, ID (United States)
Oregon State University, Corvallis, OR (United States)
Idaho National Laboratory (INL), Idaho Falls, ID (United States)
Boise State University, ID (United States); Idaho National Laboratory (INL), Idaho Falls, ID (United States); Center for Advanced Energy Studies, Idaho Falls, ID (United States)

Surface acoustic wave (SAW) devices are a subclass of micro-electromechanical systems (MEMS) that generate an acoustic emission when electrically stimulated. These transducers also work as detectors, converting surface strain into readable electrical signals. Physical properties of the generated SAW are material dependent and influenced by external factors like temperature. By monitoring temperature-dependent scattering parameters a SAW device can function as a thermometer to elucidate substrate temperature. Traditional fabrication of SAW sensors requires labor- and cost- intensive subtractive processes that produce large volumes of hazardous waste. This study utilizes an innovative aerosol jet printer to directly write consistent, high-resolution, silver comb electrodes onto a Y-cut LiNbO₃ substrate. The printed, two-port, 20 MHz SAW sensor exhibited excellent linearity and repeatability while being verified as a thermometer from 25 to 200^°C. Sensitivities of the printed SAW thermometer are -96.9 x 10^-6 °C^-1 and -92.0 x 10^-6 °C^-1 when operating in pulse-echo mode and pulse-receiver mode, respectively. These results highlight a repeatable path to the additive fabrication of compact high-frequency SAW thermometers.

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Research Organization:: Idaho National Laboratory (INL), Idaho Falls, ID (United States)

Sponsoring Organization:: USDOE Office of Nuclear Energy (NE); National Institutes of Health (NIH); USDOE

Grant/Contract Number:: AC07-05ID14517; NE0008677; NE0008496; P20GM103408; P20GM109095; DEAC07- 05ID14517; AC07- 05ID14517

OSTI ID:: 1972500

Alternate ID(s):: OSTI ID: 1987461

Report Number(s):: INL/JOU-22-67076-Revision-0; TRN: US2402777

Journal Information:: Microsystems & Nanoengineering (Online), Vol. 9, Issue 1; ISSN 2055-7434

Publisher:: Springer NatureCopyright Statement

Country of Publication:: United States

Language:: English

References (50)

Surface elastic waves White, R. M. Proceedings of the IEEE, Vol. 58, Issue 8 https://doi.org/10.1109/PROC.1970.7900	journal	January 1970
Fully inkjet-printed multilayered graphene-based flexible electrodes for repeatable electrochemical response Pandhi, Twinkle; Cornwell, Casey; Fujimoto, Kiyo RSC Advances, Vol. 10, Issue 63 https://doi.org/10.1039/D0RA04786D	journal	January 2020
AlN MEMS filters with extremely high bandwidth widening capability Gao, Anming; Liu, Kangfu; Liang, Junrui Microsystems & Nanoengineering, Vol. 6, Issue 1 https://doi.org/10.1038/s41378-020-00183-5	journal	September 2020
An aptamer-based shear horizontal surface acoustic wave biosensor with a CVD-grown single-layered graphene film for high-sensitivity detection of a label-free endotoxin Ji, Junwang; Pang, Yiquan; Li, Dongxiao Microsystems & Nanoengineering, Vol. 6, Issue 1 https://doi.org/10.1038/s41378-019-0118-6	journal	February 2020
Controlling and assessing the quality of aerosol jet printed features for large area and flexible electronics Smith, Michael; Choi, Yeon Sik; Boughey, Chess Flexible and Printed Electronics, Vol. 2, Issue 1 https://doi.org/10.1088/2058-8585/aa5af9	journal	February 2017
Determining the cutoff diameter and counting efficiency of optical particle counters with an aerodynamic aerosol classifier and an inkjet aerosol generator Tran, Steven; Iida, Kenjiro; Yashiro, Kumiko Aerosol Science and Technology, Vol. 54, Issue 11 https://doi.org/10.1080/02786826.2020.1777252	journal	June 2020
Engineering inclined orientations of piezoelectric films for integrated acoustofluidics and lab-on-a-chip operated in liquid environments Fu, Yong-Qing; Pang, Hua-Feng; Torun, Hamdi Lab on a Chip, Vol. 21, Issue 2 https://doi.org/10.1039/D0LC00887G	journal	January 2021
Mist flow visualization for round jets in Aerosol Jet ^® printing Feng, James Q. Aerosol Science and Technology, Vol. 53, Issue 1 https://doi.org/10.1080/02786826.2018.1532566	journal	October 2018
Direct Piezoelectric Coupling to Surface Elastic Waves White, R. M.; Voltmer, F. W. Applied Physics Letters, Vol. 7, Issue 12 https://doi.org/10.1063/1.1754276	journal	December 1965
High-Performance Piezoelectric Crystals, Ceramics, and Films Trolier-McKinstry, Susan; Zhang, Shujun; Bell, Andrew J. Annual Review of Materials Research, Vol. 48, Issue 1 https://doi.org/10.1146/annurev-matsci-070616-124023	journal	July 2018
Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements Qian, Jingui; Begum, Habiba; Lee, Joshua E. -Y. Microsystems & Nanoengineering, Vol. 7, Issue 1 https://doi.org/10.1038/s41378-021-00288-5	journal	August 2021
Ultra-rapid, sensitive and specific digital diagnosis of HIV with a dual-channel SAW biosensor in a pilot clinical study Gray, Eleanor R.; Turbé, Valérian; Lawson, Victoria E. npj Digital Medicine, Vol. 1, Issue 1 https://doi.org/10.1038/s41746-018-0041-5	journal	August 2018
Inkjet Printing of Plate Acoustic Wave Devices Kuznetsova, Iren; Smirnov, Andrey; Anisimkin, Vladimir Sensors, Vol. 20, Issue 12 https://doi.org/10.3390/s20123349	journal	June 2020
Tunable Nanowire Patterning Using Standing Surface Acoustic Waves Chen, Yuchao; Ding, Xiaoyun; Steven Lin, Sz-Chin ACS Nano, Vol. 7, Issue 4 https://doi.org/10.1021/nn4000034	journal	April 2013
The effect of viscosity and surface tension on inkjet printed picoliter dots Krainer, Sarah; Smit, Chris; Hirn, Ulrich RSC Advances, Vol. 9, Issue 54 https://doi.org/10.1039/C9RA04993B	journal	January 2019
High-Temperature Piezoelectric Sensing Jiang, Xiaoning; Kim, Kyungrim; Zhang, Shujun Sensors, Vol. 14, Issue 1 https://doi.org/10.3390/s140100144	journal	December 2013
Surface Acoustic Wave Devices Printed at the Aerosol-Jet Resolution Limit Lariviere, Benjamin A.; Joshi, Pooran C.; Mcintyre, Timothy J. IEEE Access, Vol. 8 https://doi.org/10.1109/ACCESS.2020.3040087	journal	January 2020
Mapping drift in morphology and electrical performance in aerosol jet printing Yoo, David; Mahoney, Clare M.; Deneault, James R. Progress in Additive Manufacturing, Vol. 6, Issue 2 https://doi.org/10.1007/s40964-021-00165-7	journal	February 2021
The Effect of Droplet Sizes on Overspray in Aerosol-Jet Printing Chen, Guang; Gu, Yuan; Tsang, Harvey Advanced Engineering Materials, Vol. 20, Issue 8 https://doi.org/10.1002/adem.201701084	journal	April 2018
Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet Morales-Rodriguez, Marissa E.; Joshi, Pooran C.; Humphries, James R. IEEE Access, Vol. 6 https://doi.org/10.1109/ACCESS.2018.2824118	journal	January 2018
Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire Yang, Shuai; Ai, Yujie; Zhang, Yun Journal of Micromechanics and Microengineering, Vol. 28, Issue 8 https://doi.org/10.1088/1361-6439/aabc87	journal	May 2018
Excitation and reception of pure shear horizontal waves by using face-shear d₂₄mode piezoelectric wafers Miao, Hongchen; Huan, Qiang; Li, Faxin Smart Materials and Structures, Vol. 25, Issue 11 https://doi.org/10.1088/0964-1726/25/11/11LT01	journal	October 2016
Relating electrophotographic printing model and ISO13660 standard attributes Barney Smith, Elisa H. SPIE Proceedings https://doi.org/10.1117/12.841770	conference	January 2010
Anomalous Attenuation of Piezoacoustic Surface Waves by Liquid Helium Thin Films Byeon, H.; Nasyedkin, K.; Lane, J. R. Journal of Low Temperature Physics, Vol. 195, Issue 3-4 https://doi.org/10.1007/s10909-018-02115-0	journal	December 2018
A multi-objective optimization framework for aerosol jet customized line width printing via small data set and prediction uncertainty Zhang, Haining; Choi, Joon Phil; Moon, Seung Ki Journal of Materials Processing Technology, Vol. 285 https://doi.org/10.1016/j.jmatprotec.2020.116779	journal	November 2020
Shear horizontal wave transducers for structural health monitoring and nondestructive testing: A review Miao, Hongchen; Li, Faxin Ultrasonics, Vol. 114 https://doi.org/10.1016/j.ultras.2021.106355	journal	July 2021
Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography Ryu Cho, Yu Kyoung; Rawlings, Colin D.; Wolf, Heiko ACS Nano, Vol. 11, Issue 12 https://doi.org/10.1021/acsnano.7b06307	journal	November 2017
A review of aerosol jet printing—a non-traditional hybrid process for micro-manufacturing Wilkinson, N. J.; Smith, M. A. A.; Kay, R. W. The International Journal of Advanced Manufacturing Technology, Vol. 105, Issue 11 https://doi.org/10.1007/s00170-019-03438-2	journal	May 2019
3D Printing of Multilayered and Multimaterial Electronics: A Review Goh, Guo Liang; Zhang, Haining; Chong, Tzyy Haur Advanced Electronic Materials, Vol. 7, Issue 10 https://doi.org/10.1002/aelm.202100445	journal	July 2021
Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band Moutoulas, Evangelos; Hamidullah, Muhammad; Prodromakis, Themis Sensors, Vol. 20, Issue 15 https://doi.org/10.3390/s20154294	journal	July 2020
Freestanding Functional Structures by Aerosol‐Jet Printing for Stretchable Electronics and Sensing Applications Jing, Qingshen; Choi, Yeon Sik; Smith, Michael Advanced Materials Technologies, Vol. 4, Issue 7 https://doi.org/10.1002/admt.201900048	journal	March 2019
Metallic Nanoparticle Inks for 3D Printing of Electronics Tan, Hong Wei; An, Jia; Chua, Chee Kai Advanced Electronic Materials, Vol. 5, Issue 5 https://doi.org/10.1002/aelm.201800831	journal	March 2019
Thermal transport in layer-by-layer assembled polycrystalline graphene films Estrada, David; Li, Zuanyi; Choi, Gyung-Min npj 2D Materials and Applications, Vol. 3, Issue 1 https://doi.org/10.1038/s41699-019-0092-8	journal	March 2019
Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices Serrano, Diego E.; Zaman, Mohammad F.; Rahafrooz, Amir Microsystems & Nanoengineering, Vol. 2, Issue 1 https://doi.org/10.1038/micronano.2016.15	journal	April 2016
Temperature Dependence of the Elastic, Piezoelectric, and Dielectric Constants of Lithium Tantalate and Lithium Niobate Smith, R. T.; Welsh, F. S. Journal of Applied Physics, Vol. 42, Issue 6, p. 2219-2230 https://doi.org/10.1063/1.1660528	journal	May 1971
Principles of aerosol jet printing Secor, Ethan B. Flexible and Printed Electronics, Vol. 3, Issue 3 https://doi.org/10.1088/2058-8585/aace28	journal	July 2018
Potential of Printed Electrodes for Electrochemical Impedance Spectroscopy (EIS): Toward Membrane Fouling Detection Goh, Guo Liang; Tay, Ming Feng; Lee, Jia Min Advanced Electronic Materials, Vol. 7, Issue 10 https://doi.org/10.1002/aelm.202100043	journal	August 2021
Optimization of Aerosol Jet Printing for High-Resolution, High-Aspect Ratio Silver Lines Mahajan, Ankit; Frisbie, C. Daniel; Francis, Lorraine F. ACS Applied Materials & Interfaces, Vol. 5, Issue 11 https://doi.org/10.1021/am400606y	journal	May 2013
Guided ink and process design for aerosol jet printing based on annular drying effects Secor, Ethan B. Flexible and Printed Electronics, Vol. 3, Issue 3 https://doi.org/10.1088/2058-8585/aadffd	journal	September 2018
Structure, electrical characteristics, and high-temperature stability of aerosol jet printed silver nanoparticle films Rahman, Md Taibur; McCloy, John; Ramana, C. V. Journal of Applied Physics, Vol. 120, Issue 7 https://doi.org/10.1063/1.4960779	journal	August 2016
On Waves Propagated along the Plane Surface of an Elastic Solid Rayleigh, Lord Proceedings of the London Mathematical Society, Vol. s1-17, Issue 1 https://doi.org/10.1112/plms/s1-17.1.4	journal	November 1885
Hybrid Machine Learning Method to Determine the Optimal Operating Process Window in Aerosol Jet 3D Printing Zhang, Haining; Moon, Seung Ki; Ngo, Teck Hui ACS Applied Materials & Interfaces, Vol. 11, Issue 19 https://doi.org/10.1021/acsami.9b02898	journal	April 2019
Study of ultrasonic thermometry based on ultrasonic time-of-flight measurement Jia, Ruixi; Xiong, Qingyu; Wang, Lijie AIP Advances, Vol. 6, Issue 3 https://doi.org/10.1063/1.4943676	journal	March 2016
Computational Fluid Dynamics Modeling and Online Monitoring of Aerosol Jet Printing Process Salary, Roozbeh (Ross); Lombardi, Jack P.; Samie Tootooni, M. Journal of Manufacturing Science and Engineering, Vol. 139, Issue 2 https://doi.org/10.1115/1.4034591	journal	October 2016
Comparison of different piezoelectric materials for GHz acoustic microscopy transducers Jakob, A.; Bender, M.; Knoll, T. 2009 IEEE International Ultrasonics Symposium https://doi.org/10.1109/ULTSYM.2009.5442024	conference	September 2009
High‐Performance Flexible Bismuth Telluride Thin Film from Solution Processed Colloidal Nanoplates Hollar, Courtney; Lin, Zhaoyang; Kongara, Madhusudan Advanced Materials Technologies, Vol. 5, Issue 11 https://doi.org/10.1002/admt.202000600	journal	October 2020
Additive Manufacturing of Miniaturized Peak Temperature Monitors for In-Pile Applications Fujimoto, Kiyo T.; Hone, Lance A.; Manning, Kory D. Sensors, Vol. 21, Issue 22 https://doi.org/10.3390/s21227688	journal	November 2021
Lithography-Based Nanoelectrochemistry Rassaei, Liza; Singh, Pradyumna S.; Lemay, Serge G. Analytical Chemistry, Vol. 83, Issue 11 https://doi.org/10.1021/ac200307n	journal	April 2011
Piezoelectric and Elastic Properties of Lithium Niobate Single Crystals Yamada, Tomoaki; Niizeki, Nobukazu; Toyoda, Hiroo Japanese Journal of Applied Physics, Vol. 6, Issue 2 https://doi.org/10.1143/JJAP.6.151	journal	February 1967
Quantum control of surface acoustic-wave phonons Satzinger, K. J.; Zhong, Y. P.; Chang, H. -S. Nature, Vol. 563, Issue 7733 https://doi.org/10.1038/s41586-018-0719-5	journal	November 2018

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