DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Automated High‐Throughput Fatigue Testing of Freestanding Thin Films

Journal Article · · Small Methods
 [1];  [1];  [1];  [2]; ORCiD logo [1]
  1. Center for Integrated Nanotechnologies Sandia National Laboratories Albuquerque NM 87185 USA
  2. Center for Integrated Nanotechnologies Sandia National Laboratories Albuquerque NM 87185 USA, Department of Nuclear Engineering University of Tennessee Knoxville TN 37996 USA

Abstract Mechanical testing at small length scales has traditionally been resource‐intensive due to difficulties with meticulous sample preparation, exacting load alignments, and precision measurements. Microscale fatigue testing can be particularly challenging due to the time‐intensive, tedious repetition of single fatigue experiments. To mitigate these challenges, this work presents a new methodology for the high‐throughput fatigue testing of thin films at the microscale. This methodology features a microelectromechanical systems‐based Si carrier that can support the simultaneous and independent fatigue testing of an array of samples. To demonstrate this new technique, the microscale fatigue behavior of nanocrystalline Al is efficiently characterized via this Si carrier and automated fatigue testing with in situ scanning electron microscopy. This methodology reduces the total testing time by an order of magnitude, and the high‐throughput fatigue results highlight the stochastic nature of the microscale fatigue response. This manuscript also discusses how this initial capability can be adapted to accommodate more samples, different materials, new geometries, and other loading modes.

Sponsoring Organization:
USDOE
OSTI ID:
1971574
Alternate ID(s):
OSTI ID: 1983537
Journal Information:
Small Methods, Journal Name: Small Methods Vol. 7 Journal Issue: 7; ISSN 2366-9608
Publisher:
Wiley Blackwell (John Wiley & Sons)Copyright Statement
Country of Publication:
United States
Language:
English

References (63)

Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties journal February 2020
Automated high-throughput tensile testing reveals stochastic process parameter sensitivity journal January 2020
Probabilistic fatigue life prediction using AFGROW and accounting for material variability journal July 2010
High-throughput stochastic tensile performance of additively manufactured stainless steel journal March 2017
How accurate are Stoney’s equation and recent modifications journal November 2000
Advanced microelectromechanical systems-based nanomechanical testing: Beyond stress and strain measurements journal June 2019
Fatigue and microstructure of ultrafine-grained metals produced by severe plastic deformation journal October 2004
In-situ tensile testing of nano-scale specimens in SEM and TEM journal March 2002
Velocity-Dependent Fatigue Crack Paths in Nanograined Pt Films journal August 2008
MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements journal May 2010
A combined thermomechanical and radiation testing platform for a 6 MV tandem accelerator
  • Briggs, Samuel A.; Steckbeck, Mackenzie; Heckman, Nathan M.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 509 https://doi.org/10.1016/j.nimb.2021.08.011
journal December 2021
A review of MEMS-based microscale and nanoscale tensile and bending testing journal September 2003
Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization journal October 2007
Recent advances in MEMS sensor technology-mechanical applications journal April 2012
Silicon as an anisotropic mechanical material: Deflection of thin crystalline plates journal December 2014
Mechanical Metamaterials and Their Engineering Applications journal December 2018
Recent Developments Concerning Saint-Venant’s Principle: An Update journal November 1989
A Novel Method for In Situ Uniaxial Tests at the Micro/Nanoscale—Part II: Experiment journal December 2010
Novel temperature dependent tensile test of freestanding copper thin film structures journal June 2012
Fatigue stress concentration and notch sensitivity in nanocrystalline metals journal March 2016
Stress-assisted discontinuous grain growth and its effect on the deformation behavior of nanocrystalline aluminum thin films journal May 2006
A novel high-throughput fatigue testing method for metallic thin films journal October 2011
Length-scale-controlled fatigue mechanisms in thin copper films journal June 2006
Emerging materials for microelectromechanical systems at elevated temperatures journal August 2014
Mechanical characterization of materials at small length scales journal February 2012
Mechanical metamaterials associated with stiffness, rigidity and compressibility: A brief review journal May 2018
Anomalous Fatigue Behavior and Fatigue-Induced Grain Growth in Nanocrystalline Nickel Alloys journal May 2011
Study of nanomechanical properties of thin films using in-situ “Push-to-Pull” method in the column of transmission electron microscope journal November 2020
A versatile lab-on-chip test platform to characterize elementary deformation mechanisms and electromechanical couplings in nanoscopic objects journal March 2016
Inter- and intragranular plasticity mechanisms in ultrafine-grained Al thin films: An in situ TEM study journal January 2013
Quantifying microscale drivers for fatigue failure via coupled synchrotron X-ray characterization and simulations journal June 2020
Microfabrication-based nanomechanical laboratory for testing the ductility of submicron aluminium films journal November 2007
Fatigue Degradation Properties of LIGA Ni Films Using Kilohertz Microresonators journal February 2013
On-wafer time-dependent high reproducibility nano-force tensile testing journal November 2014
Tension–Torsion Combined Loading Test Equipment for a Minute Beam Specimen journal December 2012
Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of environment and surface oxide thickness journal January 2007
High Cycle Fatigue in the Transmission Electron Microscope journal July 2016
Understanding fatigue crack growth in aluminum alloys by in situ X-ray synchrotron tomography journal December 2013
Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect journal August 2011
Atomistic Studies of Nanoindentation—A Review of Recent Advances journal September 2017
Small-scale high-cycle fatigue testing by dynamic microcantilever bending journal June 2020
Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures journal July 2012
Fracture strength of micro- and nano-scale silicon components journal June 2015
Recent developments in MEMS sensors: a review of applications, markets and technologies journal September 2013
A Review of Fatigue Behavior in Nanocrystalline Metals journal October 2009
Wafer-Scale Microtensile Testing of Thin Films journal October 2009
The role of specimen thickness in the fracture toughness and fatigue crack growth resistance of nanocrystalline platinum films journal February 2012
What is the Young's Modulus of Silicon? journal April 2010
A comparative study of Hillock formation in aluminum films journal December 1995
A review of nanoindentation continuous stiffness measurement technique and its applications journal February 2002
Micro-/Nanostructured Mechanical Metamaterials journal August 2012
Design and Development of a Biaxial Tensile Test Device for a Thin Film Specimen journal December 2011
Microscale Characterization of Mechanical Properties journal August 2007
Overview on micro- and nanomechanical testing: New insights in interface plasticity and fracture at small length scales journal January 2018
High-throughput experiments for rare-event rupture of materials journal February 2022
Tensile properties of free-standing aluminum thin films journal September 2001
Review of Nanoindentation Size Effect: Experiments and Atomistic Simulation journal October 2017
Watching High-Cycle Fatigue with Automated Scanning Electron Microscope Experiments book January 2021
Micro- and nanoscale tensile testing of materials journal March 2009
Length Scale Effect on Deformation and Failure Mechanisms of Ultra-Fine Grained Aluminum journal January 2005
In-situ SEM investigation on fatigue behaviors of additive manufactured Al-Si10-Mg alloy at elevated temperature journal June 2019
Torsional bridge setup for the characterization of integrated circuits and microsensors under mechanical shear stress journal December 2011
Effects of stress ratio on fatigue crack propagation properties of submicron-thick free-standing copper films journal September 2013