A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

Levine, Zachary H.; Alpert, Bradley K.; Dagel, Amber L.; Fowler, Joseph W.; Jimenez, Edward S.; Nakamura, Nathan; Swetz, Daniel S.; Szypryt, Paul; Thompson, Kyle R.; Ullom, Joel N.

doi:10.1038/s41378-023-00510-6

Title: A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

Journal Article · 14 April 2023 · Microsystems & Nanoengineering (Online)

DOI: https://doi.org/10.1038/s41378-023-00510-6 · OSTI ID:1969760

^[1];

^[2];

^[3]; Fowler, Joseph W. ^[4]; Jimenez, Edward S. ^[3]; Nakamura, Nathan ^[4]; Swetz, Daniel S. ^[2]; Szypryt, Paul ^[4]; Thompson, Kyle R. ^[3]; Ullom, Joel N. ^[4]

National Institute of Standards and Technology (NIST), Gaithersburg, MD (United States)
National Institute of Standards and Technology (NIST), Boulder, CO (United States)
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
National Institute of Standards and Technology (NIST), Boulder, CO (United States); Univ. of Colorado, Boulder, CO (United States)

We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate x-rays in a 100 nm spot and energy-resolving x-ray detectors that minimize backgrounds and hold promise for the identification of materials within the sample. The x-ray generation target, a layer of platinum, is fabricated on the circuit wafer itself. A region of interest is imaged from a limited range of angles and without physically removing the region from the larger circuit. The reconstruction is consistent with the circuit’s design file.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); Intelligence Advanced Research Projects Activity (IARPA)

Grant/Contract Number:: NA0003525; D2019-1908080004; D2019-1906200003; D2021-2106170004; FA8702-15-D-0001

OSTI ID:: 1969760

Alternate ID(s):: OSTI ID: 2469879

Journal Information:: Microsystems & Nanoengineering (Online), Vol. 9, Issue 1; ISSN 2055-7434

Publisher:: Springer NatureCopyright Statement

Country of Publication:: United States

Language:: English

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