A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

Brown, Hamish G.; Pelz, Philipp M.; Hsu, Shang-Lin; Zhang, Zimeng; Ramesh, Ramamoorthy; Inzani, Katherine; Sheridan, Evan; Griffin, Sinéad M.; Schloz, Marcel; Pekin, Thomas C.; Koch, Christoph T.; Findlay, Scott D.; Allen, Leslie J.; Scott, Mary C.; Ophus, Colin; Ciston, Jim

doi:10.1017/S1431927622012090

Title: A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

Journal Article · 01 October 2022 · Microscopy and Microanalysis

DOI: https://doi.org/10.1017/S1431927622012090 · OSTI ID:1914336

; Pelz, Philipp M.; Hsu, Shang-Lin; Zhang, Zimeng; Ramesh, Ramamoorthy; Inzani, Katherine; Sheridan, Evan; Griffin, Sinéad M.; Schloz, Marcel; Pekin, Thomas C.;

;

; Allen, Leslie J.; Scott, Mary C.; Ophus, Colin; Ciston, Jim

Abstract Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data. We apply the approach to a lead iridate, PbIrO, and yttrium-stabilized zirconia, YZrO, heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction. We demonstrate that Pb–Ir atomic columns are visible in the uppermost layers of the reconstructed volume. We compare this approach to the alternative techniques of depth sectioning using differential phase contrast scanning transmission electron microscopy (DPC-STEM) and multislice ptychographic reconstruction.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: Australian Research Council; German Research Foundation (DFG); US Air Force Office of Scientific Research (AFOSR); USDOE; USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1914336

Journal Information:: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 5 Vol. 28; ISSN 1431-9276

Publisher:: Oxford University PressCopyright Statement

Country of Publication:: United States

Language:: English

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Title: A Three-Dimensional Reconstruction Algorithm for Scanning Transmission Electron Microscopy Data from a Single Sample Orientation

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