Temperature Mapping of Stacked Silicon Dies from X-Ray-Diffraction Intensities

Chalise, Darshan; Kenesei, Peter; Shastri, Sarvjit D.; Cahill, David G.

doi:10.1103/physrevapplied.18.014076

Title: Temperature Mapping of Stacked Silicon Dies from X-Ray-Diffraction Intensities

Journal Article · 29 July 2022 · Physical Review Applied

DOI: https://doi.org/10.1103/physrevapplied.18.014076 · OSTI ID:1905078

^[1]; Kenesei, Peter ^[2]; Shastri, Sarvjit D. ^[2];

^[1]

Univ. of Illinois at Urbana-Champaign, IL (United States)
Argonne National Lab. (ANL), Lemont, IL (United States)

Increasing power densities in integrated circuits have led to an increased prevalence of thermal hotspots in integrated circuits. Tracking these thermal hotspots is imperative to prevent circuit failures. In three- dimensional (3D) integrated circuits, conventional surface techniques like infrared thermometry are unable to measure the 3D temperature distribution, and optical and magnetic resonance techniques are difficult to apply due to the presence of metals and large current densities. X-rays offer a high penetration depth and can be used to probe 3D structures. We report a method utilizing the temperature dependence of x-ray-diffraction intensity via the Debye-Waller factor to simultaneously map the temperature of individual silicon dies in a stack. Here, utilizing beamline 1-ID-E at the Advanced Photon Source (Argonne), we demonstrate, for each individual silicon die, a temperature resolution of 3 K, a spatial resolution of 100 × 400 μm², and a temporal resolution of 20 s. Utilizing a sufficiently high-intensity laboratory source, e.g., from a liquid-anode source, this method can be scaled down to laboratories for noninvasive temperature mapping of 3D integrated circuits.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: Semiconductor Research Corporation (SRC); USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1905078

Journal Information:: Physical Review Applied, Journal Name: Physical Review Applied Journal Issue: 1 Vol. 18; ISSN 2331-7019

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

References (30)

Elements of Modern X-ray Physics Als-Nielsen, Jens; McMorrow, Des https://doi.org/10.1002/9781119998365	book	March 2011
A review of techniques for parameter sensitivity analysis of environmental models Hamby, D. M. Environmental Monitoring and Assessment, Vol. 32, Issue 2 https://doi.org/10.1007/BF00547132	journal	September 1994
Thermal expansion of some engineering materials from 20 to 293°K Arp, V.; Wilson, J. H.; Winrich, L. Cryogenics, Vol. 2, Issue 4 https://doi.org/10.1016/0011-2275(62)90057-7	journal	June 1962
High intensity compact Compton X-ray sources: Challenges and potential of applications Jacquet, M. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 331 https://doi.org/10.1016/j.nimb.2013.10.078	journal	July 2014
THE HEAT CAPACITY OF SILICON AT LOW TEMPERATURES¹ Anderson, C. Travis Journal of the American Chemical Society, Vol. 52, Issue 6 https://doi.org/10.1021/ja01369a017	journal	June 1930
Linear Thermal Expansion Coefficient of Silicon from 293 to 1000 K Watanabe, Hiromichi; Yamada, Naofumi; Okaji, Masahiro International Journal of Thermophysics, Vol. 25, Issue 1 https://doi.org/10.1023/B:IJOT.0000022336.83719.43	journal	January 2004
Thermal conductivity measurement from 30 to 750 K: the 3ω method Cahill, David G. Review of Scientific Instruments, Vol. 61, Issue 2 https://doi.org/10.1063/1.1141498	journal	February 1990
A 24 keV liquid-metal-jet x-ray source for biomedical applications Larsson, D. H.; Takman, P. A. C.; Lundström, U. Review of Scientific Instruments, Vol. 82, Issue 12 https://doi.org/10.1063/1.3664870	journal	December 2011
Oxygen diffusivity in silicon derived from dynamical X-ray diffraction Will, J.; Gröschel, A.; Kot, D. Journal of Applied Physics, Vol. 113, Issue 7 https://doi.org/10.1063/1.4792747	journal	February 2013
Time-domain thermoreflectance (TDTR) measurements of anisotropic thermal conductivity using a variable spot size approach Jiang, Puqing; Qian, Xin; Yang, Ronggui Review of Scientific Instruments, Vol. 88, Issue 7 https://doi.org/10.1063/1.4991715	journal	July 2017
Measuring temperature-dependent thermal diffuse scattering using scanning transmission electron microscopy Wehmeyer, Geoff; Bustillo, Karen C.; Minor, Andrew M. Applied Physics Letters, Vol. 113, Issue 25 https://doi.org/10.1063/1.5066111	journal	December 2018
Refractive index of silicon and germanium and its wavelength and temperature derivatives Li, H. H. Journal of Physical and Chemical Reference Data, Vol. 9, Issue 3 https://doi.org/10.1063/1.555624	journal	July 1980
Line focus x-ray tubes—a new concept to produce high brilliance x-rays Bartzsch, Stefan; Oelfke, Uwe Physics in Medicine & Biology, Vol. 62, Issue 22 https://doi.org/10.1088/1361-6560/aa910b	journal	October 2017
Effect of Thermal Vibrations on Diffraction from Perfect Crystals. II. The Bragg Case of Reflection Batterman, Boris W. Physical Review, Vol. 127, Issue 3 https://doi.org/10.1103/PhysRev.127.686	journal	August 1962
Vibrational Amplitudes in Germanium and Silicon Batterman, Boris W.; Chipman, David R. Physical Review, Vol. 127, Issue 3 https://doi.org/10.1103/PhysRev.127.690	journal	August 1962
Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point Glassbrenner, C. J.; Slack, Glen A. Physical Review, Vol. 134, Issue 4A https://doi.org/10.1103/PhysRev.134.A1058	journal	May 1964
Optical properties of a small-particle composite Cummings, K. D.; Garland, J. C.; Tanner, D. B. Physical Review B, Vol. 30, Issue 8 https://doi.org/10.1103/PhysRevB.30.4170	journal	October 1984
Optical Constants of the Noble Metals Johnson, P. B.; Christy, R. W. Physical Review B, Vol. 6, Issue 12, p. 4370-4379 https://doi.org/10.1103/PhysRevB.6.4370	journal	December 1972
Lattice dynamical Debye-Waller factor for silicon Flensburg, Claus; Stewart, Robert F. Physical Review B, Vol. 60, Issue 1 https://doi.org/10.1103/PhysRevB.60.284	journal	July 1999
Intensity of diffracted intensities Brown, P. J.; Fox, A. G.; Maslen, E. N. International Tables for Crystallography, p. 554-595 https://doi.org/10.1107/97809553602060000600	book	October 2006
FabIO: easy access to two-dimensional X-ray detector images in Python Knudsen, Erik B.; Sørensen, Henning O.; Wright, Jonathan P. Journal of Applied Crystallography, Vol. 46, Issue 2 https://doi.org/10.1107/S0021889813000150	journal	February 2013
Cryogenically cooled bent double-Laue monochromator for high-energy undulator X-rays (50–200 keV) Shastri, S. D.; Fezzaa, K.; Mashayekhi, A. Journal of Synchrotron Radiation, Vol. 9, Issue 5 https://doi.org/10.1107/S0909049502009986	journal	August 2002
Hotspot-Limited Microprocessors: Direct Temperature and Power Distribution Measurements Hamann, Hendrik F.; Weger, Alan; Lacey, James A. IEEE Journal of Solid-State Circuits, Vol. 42, Issue 1 https://doi.org/10.1109/JSSC.2006.885064	journal	January 2007
Stable thermoreflectance thermal imaging microscopy with piezoelectric position control Shakouri, Alexander; Ziabari, Amirkoushyar; Kendig, Dustin 2016 32nd Thermal Measurement, Modeling & Management Symposium (SEMI-THERM) https://doi.org/10.1109/SEMI-THERM.2016.7458456	conference	March 2016
Monitoring of temperature-mediated phase transitions of adipose tissue by combined optical coherence tomography and Abbe refractometry Yanina, Irina Y.; Popov, Alexey P.; Bykov, Alexander V. Journal of Biomedical Optics, Vol. 23, Issue 01 https://doi.org/10.1117/1.JBO.23.1.016003	journal	January 2018
Temperature Effect on the Profile of X-Ray Diffraction of the Bragg Case from a Germanium Single Crystal Kohra, Kazutake; Kikuta, Seishi; Annaka, Shoichi Journal of the Physical Society of Japan, Vol. 20, Issue 10 https://doi.org/10.1143/JPSJ.20.1964	journal	October 1965
Study on Temperature Effect on X-Ray Diffraction Curves from Single Crystals by a Triple-Crystal Spectrometer Kohra, K.; Kikuta, S.; Annaka, S. Journal of the Physical Society of Japan, Vol. 21, Issue 8 https://doi.org/10.1143/JPSJ.21.1565	journal	August 1966
Thermal monitoring of real processors Nowroz, Abdullah Nazma; Cochran, Ryan; Reda, Sherief Proceedings of the 47th Design Automation Conference on - DAC '10 https://doi.org/10.1145/1837274.1837291	conference	January 2010
Scanning Thermal Microscopy Majumdar, A. Annual Review of Materials Science, Vol. 29, Issue 1 https://doi.org/10.1146/annurev.matsci.29.1.505	journal	August 1999
Nanopillar quantum well lasers directly grown on silicon and emitting at silicon-transparent wavelengths Lu, Fanglu; Bhattacharya, Indrasen; Sun, Hao Optica, Vol. 4, Issue 7 https://doi.org/10.1364/OPTICA.4.000717	journal	June 2017

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