Surface Integrity of Diamond Turned (100)Ge

Tunesi, M.; Lucca, D. A.; Davies, M. A.; Zare, A.; Gordon, M. C.; Sizemore, N. E.; Wang, Y. Q.

doi:10.1016/j.procir.2022.03.103

Title: Surface Integrity of Diamond Turned (100)Ge

Journal Article · 31 December 2021 · Procedia CIRP

DOI: https://doi.org/10.1016/j.procir.2022.03.103 · OSTI ID:1878415

Tunesi, M.; Lucca, D. A.; Davies, M. A.; Zare, A.; Gordon, M. C.; Sizemore, N. E.; Wang, Y. Q.

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Sponsoring Organization:: USDOE

Grant/Contract Number:: 89233218CNA000001

OSTI ID:: 1878415

Journal Information:: Procedia CIRP, Journal Name: Procedia CIRP Journal Issue: C Vol. 108; ISSN 2212-8271

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (14)

Micro-Raman analysis of stress in machined silicon and germanium Sparks, R. G.; Paesler, M. A. Precision Engineering, Vol. 10, Issue 4 https://doi.org/10.1016/0141-6359(88)90053-0	journal	October 1988
Algorithms for the rapid simulation of Rutherford backscattering spectra Doolittle, Lawrence R. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 9, Issue 3 https://doi.org/10.1016/0168-583X(85)90762-1	journal	June 1985
Diamond Turning of Brittle Materials for Optical Components Nakasuji, T.; Kodera, S.; Hara, S. CIRP Annals, Vol. 39, Issue 1 https://doi.org/10.1016/S0007-8506(07)61009-9	journal	January 1990
The investigation of microsystems using Raman spectroscopy De Wolf, Ingrid; Jian, Chen; van Spengen, W. Merlijn Optics and Lasers in Engineering, Vol. 36, Issue 2 https://doi.org/10.1016/S0143-8166(01)00033-1	journal	August 2001
Manufacturing and measurement of freeform optics Fang, F. Z.; Zhang, X. D.; Weckenmann, A. CIRP Annals, Vol. 62, Issue 2 https://doi.org/10.1016/j.cirp.2013.05.003	journal	January 2013
Parameterization of ion channeling half-angles and minimum yields Doyle, Barney L. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 371 https://doi.org/10.1016/j.nimb.2015.08.047	journal	March 2016
Germanium: A review of its US demand, uses, resources, chemistry, and separation technologies Patel, Madhav; Karamalidis, Athanasios K. Separation and Purification Technology, Vol. 275 https://doi.org/10.1016/j.seppur.2021.118981	journal	November 2021
RAMAN SCATTERING OF ION‐IMPLANTED GaAs Peercy, P. S. Applied Physics Letters, Vol. 18, Issue 12 https://doi.org/10.1063/1.1653546	journal	June 1971
Raman Scattering by Silicon and Germanium Parker, J. H.; Feldman, D. W.; Ashkin, M. Physical Review, Vol. 155, Issue 3 https://doi.org/10.1103/PhysRev.155.712	journal	March 1967
Pressure dependence of Raman phonons of Ge and 3 C -SiC Olego, Diego; Cardona, Manuel Physical Review B, Vol. 25, Issue 2 https://doi.org/10.1103/PhysRevB.25.1151	journal	January 1982
Chemical Etching of Germanium with H ₃ PO ₄ –H ₂ O ₂ –H ₂ O Solution Kagawa, Shuzo; Mikawa, Takashi; Kaneda, Takao Japanese Journal of Applied Physics, Vol. 21, Issue Part 1, No. 11 https://doi.org/10.1143/JJAP.21.1616	journal	November 1982
Effect of Pressure on the Raman Shift in Ge Asaumi, Katsuyuki; Minomura, Shigeru Journal of the Physical Society of Japan, Vol. 45, Issue 3 https://doi.org/10.1143/JPSJ.45.1061	journal	September 1978
Freeform Optical Surfaces: A Revolution in Imaging Optical Design Thompson, Kevin P.; Rolland, Jannick P. Optics and Photonics News, Vol. 23, Issue 6, p. 30-35 https://doi.org/10.1364/OPN.23.6.000030	journal	January 2012
Topic Review: Application of Raman Spectroscopy Characterization in Micro/Nano-Machining Xu, Zongwei; He, Zhongdu; Song, Ying Micromachines, Vol. 9, Issue 7 https://doi.org/10.3390/mi9070361	journal	July 2018

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