6000 lines/mm blazed grating for a high-resolution x-ray spectrometer
Abstract
We have designed and fabricated a high groove density blazed grating for a Resonant Inelastic X-ray Scattering spectrometer for the new Qerlin beamline at the Advanced Light Source (ALS) synchrotron facility. The gratings were fabricated using a set of nanofabrication techniques including e-beam lithography, nanoimprint, plasma etch, and anisotropic wet etching. Two gratings with groove density of 6000 lines/mm and 3000 lines/mm and optimized for operation in the 1st and 2nd negative diffraction order respectively were fabricated and tested. We report on fabrication details and characterization of the gratings at beamline 6.3.2 of the ALS.
- Authors:
-
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1872426
- Alternate Identifier(s):
- OSTI ID: 1925198
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Volume: 30; Journal Issue: 16; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION; x-ray optics; x-ray diffraction gratings; nanofabrication; diffraction efficiency; x-ray spectrometer
Citation Formats
Voronov, D. L., Park, S., Gullikson, E. M., Salmassi, F., and Padmore, H. A. 6000 lines/mm blazed grating for a high-resolution x-ray spectrometer. United States: N. p., 2022.
Web. doi:10.1364/oe.460740.
Voronov, D. L., Park, S., Gullikson, E. M., Salmassi, F., & Padmore, H. A. 6000 lines/mm blazed grating for a high-resolution x-ray spectrometer. United States. https://doi.org/10.1364/oe.460740
Voronov, D. L., Park, S., Gullikson, E. M., Salmassi, F., and Padmore, H. A. Thu .
"6000 lines/mm blazed grating for a high-resolution x-ray spectrometer". United States. https://doi.org/10.1364/oe.460740. https://www.osti.gov/servlets/purl/1872426.
@article{osti_1872426,
title = {6000 lines/mm blazed grating for a high-resolution x-ray spectrometer},
author = {Voronov, D. L. and Park, S. and Gullikson, E. M. and Salmassi, F. and Padmore, H. A.},
abstractNote = {We have designed and fabricated a high groove density blazed grating for a Resonant Inelastic X-ray Scattering spectrometer for the new Qerlin beamline at the Advanced Light Source (ALS) synchrotron facility. The gratings were fabricated using a set of nanofabrication techniques including e-beam lithography, nanoimprint, plasma etch, and anisotropic wet etching. Two gratings with groove density of 6000 lines/mm and 3000 lines/mm and optimized for operation in the 1st and 2nd negative diffraction order respectively were fabricated and tested. We report on fabrication details and characterization of the gratings at beamline 6.3.2 of the ALS.},
doi = {10.1364/oe.460740},
journal = {Optics Express},
number = 16,
volume = 30,
place = {United States},
year = {Thu Jul 21 00:00:00 EDT 2022},
month = {Thu Jul 21 00:00:00 EDT 2022}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Refraction effects in soft x-ray multilayer blazed gratings
journal, January 2016
- Voronov, D. L.; Salmassi, F.; Meyer-Ilse, J.
- Optics Express, Vol. 24, Issue 11
Optical demultiplexer using a silicon echelette grating
journal, February 1980
- Fujii, Y.; Aoyama, K.; Minowa, J.
- IEEE Journal of Quantum Electronics, Vol. 16, Issue 2
Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating
journal, January 2014
- Voronov, D. L.; Gullikson, E. M.; Salmassi, F.
- Optics Letters, Vol. 39, Issue 11
A review on fabrication of blazed gratings
journal, May 2021
- Gao, Jian; Chen, Peng; Wu, Lei
- Journal of Physics D: Applied Physics, Vol. 54, Issue 31
Highly efficient ultra-low blaze angle multilayer grating
journal, May 2021
- Voronov, D. L.; Park, S.; Gullikson, E. M.
- Optics Express, Vol. 29, Issue 11
Wavelength demultiplexer: using echelette gratings on silicon substrate
journal, January 1985
- Philippe, P.; Valette, S.; Mendez, O. Mata
- Applied Optics, Vol. 24, Issue 7
X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching
journal, July 2016
- Voronov, Dmitriy L.; Lum, Paul; Naulleau, Patrick
- Applied Physics Letters, Vol. 109, Issue 4
Large area nanoimprint enables ultra-precise x-ray diffraction gratings
journal, January 2017
- Voronov, D. L.; Gullikson, E. M.; Padmore, H. A.
- Optics Express, Vol. 25, Issue 19
Optimized highly efficient multilayer-coated blazed gratings for the tender X-ray region
journal, January 2019
- Sokolov, Andrey; Huang, Qiushi; Senf, Friedmar
- Optics Express, Vol. 27, Issue 12
Wavefront preserving X-ray optics for Synchrotron and Free Electron Laser photon beam transport systems
journal, August 2022
- Cocco, D.; Cutler, G.; Sanchez del Rio, M.
- Physics Reports, Vol. 974
High-resolution tunable spectrograph for x-ray laser linewidth measurements with a plane varied-line-spacing grating
journal, January 1997
- Underwood, James H.; Koch, Jeffrey A.
- Applied Optics, Vol. 36, Issue 21
Resonant inelastic x-ray scattering studies of elementary excitations
journal, June 2011
- Ament, Luuk J. P.; van Veenendaal, Michel; Devereaux, Thomas P.
- Reviews of Modern Physics, Vol. 83, Issue 2
Paving the Way to Ultra-High-Resolution Resonant Inelastic X-ray Scattering with the SIX Beamline at NSLS-II
journal, March 2018
- Jarrige, Ignace; Bisogni, Valentina; Zhu, Yi
- Synchrotron Radiation News, Vol. 31, Issue 2
A 10,000 groove/mm multilayer coated grating for EUV spectroscopy
journal, January 2011
- Voronov, D. L.; Anderson, E. H.; Cambie, R.
- Optics Express, Vol. 19, Issue 7
Some recent theorical results for gratings; Application to their use in the very far ultraviolet region
journal, May 1976
- Maystre, D.; Petit, R.
- Nouvelle Revue d'Optique, Vol. 7, Issue 3