Resistively loaded coplanar waveguide for microwave measurements of induced carriers

Freeman, Matthew L.; Lu, Tzu-Ming; Engel, L. W.

doi:10.1063/5.0085112

Title: Resistively loaded coplanar waveguide for microwave measurements of induced carriers

Journal Article · 01 April 2022 · Review of Scientific Instruments

DOI: https://doi.org/10.1063/5.0085112 · OSTI ID:1870480

^[1];

^[2]; Engel, L. W. ^[1]

Florida State Univ., Tallahassee, FL (United States). National High Magnetic Field Lab. (MagLab)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States). Center for Integrated Nanotechnologies

We describe the use of a coplanar waveguide (CPW) whose slots are filled with a resistive film, a resistively loaded CPW (RLCPW), to measure two-dimensional electron systems (2DESs). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate to control the areal charge density of the 2DES. As a demonstration of this technique, we present measurements on a Si metal–oxide–semiconductor field-effect transistor and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); USDOE

Grant/Contract Number:: NA0003525; FG02-05-ER46212

OSTI ID:: 1870480

Alternate ID(s):: OSTI ID: 1860516

Report Number(s):: SAND2022-4457J; 704960; TRN: US2306546

Journal Information:: Review of Scientific Instruments, Vol. 93, Issue 4; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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