Fabrication of ultrathin suspended membranes from atomic layer deposition films

Elowson, Michael J.; Dhall, Rohan; Schwartzberg, Adam; Chang, Stephanie Y.; Tommasini, Vittoria; Alam, Sardar B.; Chan, Emory M.; Cabrini, Stefano; Aloni, Shaul

doi:10.1116/6.0001309

Title: Fabrication of ultrathin suspended membranes from atomic layer deposition films

Journal Article · 31 January 2022 · Journal of Vacuum Science and Technology B

DOI: https://doi.org/10.1116/6.0001309 · OSTI ID:1843953

^[1]; Dhall, Rohan ^[1];

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^[1]; Tommasini, Vittoria ^[1];

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^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

In this report, ultrathin films suspended as freestanding membranes are critical to many microelectronic and materials science applications. However, fabrication methods are currently limited in either their flexibility, due to material selectivity issues during the final membrane release, or their scalability. Here, we demonstrate a novel fabrication process for suspending ultrathin films with thicknesses as low as 4 nm and lateral dimensions up to 20 x 1000 μm from a variety of materials grown by atomic layer deposition. A silicon nitride membrane serves as the support for a sacrificial polymer layer and an ultrathin atomic layer deposition film which, after plasma etching, will form the membrane. The high chemical selectivity between atomic layer deposition-grown transition metal nitrides and oxides and the sacrificial polymer means that ultrathin films of a variety of materials can be released without damage using a single process. Electrically conductive titanium nitride membranes can be produced by this method and are of significant interest for electron microscopy applications. Electron transparency of titanium nitride membranes was found to be ~14% higher than silicon nitride of the same thickness, and of similar conductivity to graphite, meaning that ultrathin, conductive, and electron transparent membranes can be fabricated at scale. These membranes are ideal supports for electron and photon characterization techniques, as well as microelectromechanical system applications that require a conductive membrane.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1843953

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 2 Vol. 40; ISSN 2166-2746

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
atomic layer deposition
membrane technology
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nanofabrication
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nitrides
thin film devices
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Title: Fabrication of ultrathin suspended membranes from atomic layer deposition films

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