Controlled spalling of (100)-oriented GaAs with a nanoimprint lithography interlayer for thin-film layer transfer without facet formation

Braun, Anna K.; Theingi, San; McMahon, William E.; Ptak, Aaron J.; Packard, Corinne E.

doi:10.1016/j.tsf.2021.139049

Title: Controlled spalling of (100)-oriented GaAs with a nanoimprint lithography interlayer for thin-film layer transfer without facet formation

Journal Article · 31 December 2021 · Thin Solid Films

DOI: https://doi.org/10.1016/j.tsf.2021.139049 · OSTI ID:1836625

Braun, Anna K.; Theingi, San; McMahon, William E.; Ptak, Aaron J.; Packard, Corinne E.

Not Available

View Accepted Manuscript (Publisher)

Cite

Export

Save

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC36-08GO28308

OSTI ID:: 1836625

Journal Information:: Thin Solid Films, Journal Name: Thin Solid Films Journal Issue: C Vol. 742; ISSN 0040-6090

Publisher:: ElsevierCopyright Statement

Country of Publication:: Netherlands

Language:: English

References (33)

19%-efficient and 43 µm-thick crystalline Si solar cell from layer transfer using porous silicon: 19% efficient and 43 µm-thick crystalline Si solar cell Petermann, Jan Hendrik; Zielke, Dimitri; Schmidt, Jan Progress in Photovoltaics: Research and Applications, Vol. 20, Issue 1 https://doi.org/10.1002/pip.1129	journal	July 2011
Techno-economic analysis of three different substrate removal and reuse strategies for III-V solar cells: Techno-economic analysis for III-V solar cells Ward, J. Scott; Remo, Timothy; Horowitz, Kelsey Progress in Photovoltaics: Research and Applications, Vol. 24, Issue 9 https://doi.org/10.1002/pip.2776	journal	May 2016
Wafer reuse for repeated growth of III-V solar cells Bauhuis, G. J.; Mulder, P.; Haverkamp, E. J. Progress in Photovoltaics: Research and Applications, Vol. 18, Issue 3 https://doi.org/10.1002/pip.930	journal	May 2010
Surface structure of GaAs(211) Hren, P.; Tu, D. W.; Kahn, A. Surface Science, Vol. 146, Issue 1 https://doi.org/10.1016/0039-6028(84)90229-2	journal	October 1984
Rapid IR lamp alloying of nickel-based ohmic contacts on n-GaAs Gill, Sukhdev S.; Dawsey, J. R. Thin Solid Films, Vol. 167, Issue 1-2 https://doi.org/10.1016/0040-6090(88)90492-0	journal	December 1988
Lateral overgrowth and epitaxial lift-off of InP by halide vapor-phase epitaxy Park, J.; Barnes, P. A.; Tin, C. C. Journal of Crystal Growth, Vol. 187, Issue 2 https://doi.org/10.1016/S0022-0248(97)00870-1	journal	May 1998
Measurement and simulation of interfacial adhesion strength between SiO2 thin film and III–V material Chou, Tsung-Lin; Yang, Shin-Yueh; Wu, Chung-Jung Microelectronics Reliability, Vol. 51, Issue 9-11 https://doi.org/10.1016/j.microrel.2011.06.045	journal	September 2011
Controlled spalling-based mechanical substrate exfoliation for III-V solar cells: A review Chen, Jie; Packard, Corinne E. Solar Energy Materials and Solar Cells, Vol. 225 https://doi.org/10.1016/j.solmat.2021.111018	journal	June 2021
Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off Schermer, J. J.; Bauhuis, G. J.; Mulder, P. Thin Solid Films, Vol. 511-512, p. 645-653 https://doi.org/10.1016/j.tsf.2005.12.135	journal	July 2006
Description of brittle failure of non-uniform MEMS geometries McCarty, A.; Chasiotis, I. Thin Solid Films, Vol. 515, Issue 6 https://doi.org/10.1016/j.tsf.2006.01.039	journal	February 2007
Increased fracture depth range in controlled spalling of (100)-oriented germanium via electroplating Crouse, Dustin; Simon, John; Schulte, Kevin L. Thin Solid Films, Vol. 649 https://doi.org/10.1016/j.tsf.2018.01.031	journal	March 2018
Development of High-Efficiency GaAs Solar Cells Grown on Nanopatterned GaAs Substrates Mangum, John S.; Theingi, San; Steiner, Myles A. Crystal Growth & Design, Vol. 21, Issue 10 https://doi.org/10.1021/acs.cgd.1c00835	journal	September 2021
Monocrystalline InP Thin Films with Tunable Surface Morphology and Energy Band gap Lee, Yonghwan; Yang, Inseok; Tan, Hark Hoe ACS Applied Materials & Interfaces, Vol. 12, Issue 32 https://doi.org/10.1021/acsami.0c10370	journal	July 2020
Remote epitaxy through graphene enables two-dimensional material-based layer transfer Kim, Yunjo; Cruz, Samuel S.; Lee, Kyusang Nature, Vol. 544, Issue 7650 https://doi.org/10.1038/nature22053	journal	April 2017
Epitaxial layer transfer by bond and etch back of porous Si Yonehara, Takao; Sakaguchi, Kiyofumi; Sato, Nobuhiko Applied Physics Letters, Vol. 64, Issue 16 https://doi.org/10.1063/1.111698	journal	April 1994
Morphological Changes of a Surface of Revolution due to Capillarity‐Induced Surface Diffusion Nichols, F. A.; Mullins, W. W. Journal of Applied Physics, Vol. 36, Issue 6 https://doi.org/10.1063/1.1714360	journal	June 1965
High-efficiency thin-film InGaP/InGaAs/Ge tandem solar cells enabled by controlled spalling technology Shahrjerdi, D.; Bedell, S. W.; Ebert, C. Applied Physics Letters, Vol. 100, Issue 5 https://doi.org/10.1063/1.3681397	journal	January 2012
The importance of high-index surfaces for the morphology of GaAs quantum dots Platen, J.; Kley, A.; Setzer, C. Journal of Applied Physics, Vol. 85, Issue 7 https://doi.org/10.1063/1.369720	journal	April 1999
Mesoporous germanium morphology transformation for lift-off process and substrate re-use Boucherif, Abderraouf; Beaudin, Guillaume; Aimez, Vincent Applied Physics Letters, Vol. 102, Issue 1 https://doi.org/10.1063/1.4775357	journal	January 2013
Controlled exfoliation of (100) GaAs-based devices by spalling fracture Sweet, Cassi A.; Schulte, Kevin L.; Simon, John D. Applied Physics Letters, Vol. 108, Issue 1 https://doi.org/10.1063/1.4939661	journal	January 2016
Perspective: Fundamentals of coalescence-related dislocations, applied to selective-area growth and other epitaxial films McMahon, William E.; Vaisman, Michelle; Zimmerman, Jeramy D. APL Materials, Vol. 6, Issue 12 https://doi.org/10.1063/1.5047945	journal	December 2018
A technique for producing epitaxial films on reuseable substrates McClelland, R. W.; Bozler, C. O.; Fan, J. C. C. Applied Physics Letters, Vol. 37, Issue 6 https://doi.org/10.1063/1.91987	journal	September 1980
Extreme selectivity in the lift‐off of epitaxial GaAs films Yablonovitch, Eli; Gmitter, T.; Harbison, J. P. Applied Physics Letters, Vol. 51, Issue 26, p. 2222-2224 https://doi.org/10.1063/1.98946	journal	December 1987
Layer transfer by controlled spalling Bedell, Stephen W.; Fogel, Keith; Lauro, Paul Journal of Physics D: Applied Physics, Vol. 46, Issue 15 https://doi.org/10.1088/0022-3727/46/15/152002	journal	March 2013
Fracture Toughness, Fracture Strength, and Stress Corrosion Cracking of Silicon Dioxide Thin Films Hatty, V.; Kahn, H.; Heuer, A. H. Journal of Microelectromechanical Systems, Vol. 17, Issue 4 https://doi.org/10.1109/JMEMS.2008.927069	journal	August 2008
Kerf-Less Removal of Si, Ge, and III–V Layers by Controlled Spalling to Enable Low-Cost PV Technologies Bedell, Stephen W.; Shahrjerdi, Davood; Hekmatshoar, Bahman IEEE Journal of Photovoltaics, Vol. 2, Issue 2 https://doi.org/10.1109/JPHOTOV.2012.2184267	journal	April 2012
GaAs Solar Cells on Nanopatterned Si Substrates Vaisman, Michelle; Jain, Nikhil; Li, Qiang IEEE Journal of Photovoltaics, Vol. 8, Issue 6 https://doi.org/10.1109/JPHOTOV.2018.2871423	journal	November 2018
Reformed Mesoporous Ge for Substrate Reuse in III-V Solar Cells Alkurd, Noor; Cavalli, Alessandro; Ley, Brett E. 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) https://doi.org/10.1109/PVSC40753.2019.8980660	conference	June 2019
(110)-Oriented GaAs Devices and Spalling as a Platform for Low-Cost III-V Photovoltaics Metaferia, Wondwosen; Chenenko, Jason; Packard, Corinne E. 2021 IEEE 48th Photovoltaic Specialists Conference (PVSC) https://doi.org/10.1109/PVSC43889.2021.9518754	conference	June 2021
Failure Mechanisms in Ceramic-Fiber/Ceramic-Matrix Composites Marshall, D. B.; Evans, A. G. Journal of the American Ceramic Society, Vol. 68, Issue 5 https://doi.org/10.1111/j.1151-2916.1985.tb15313.x	journal	May 1985
Influence of Reinforcement Content and Diameter on the R-Curve Response in SiC-Whisker-Reinforced Alumina Becher, Paul F.; Hsueh, Chun-Hway; Alexander, Kathleen B. Journal of the American Ceramic Society, Vol. 79, Issue 2 https://doi.org/10.1111/j.1151-2916.1996.tb08120.x	journal	February 1996
Fracture of GaAs Wafers Yasutake, Kiyoshi; Konishi, Yoshito; Adachi, Kaoru Japanese Journal of Applied Physics, Vol. 27, Issue Part 1, No. 12 https://doi.org/10.1143/JJAP.27.2238	journal	December 1988
The History, Physics, and Applications of the Smart-Cut® Process Bruel, Michel MRS Bulletin, Vol. 23, Issue 12 https://doi.org/10.1557/S088376940002981X	journal	December 1998

Similar Records

Controlled Spalling of (100)-Oriented GaAs with a Nanoimprint Lithography Interlayer for Thin-Film Layer Transfer Without Facet Formation

Journal Article · 2021 · Thin Solid Films · OSTI ID:1839370

Braun, Anna K.; Theingi, San; McMahon, William E.; +2 more

Facet Suppression in (100) GaAs Spalling via Use of a Nanoimprint Lithography Release Layer

Conference · 2021 · OSTI ID:1823572

Braun, Anna K.; Theingi, San; Ptak, Aaron J.; +1 more

Engineering Controlled Spalling in (100)-Oriented GaAs for Wafer Reuse

Conference · 2015 · OSTI ID:1313613

Sweet, Cassi A.; McNeely, Joshua E.; Gorman, Brian; +3 more

Title: Controlled spalling of (100)-oriented GaAs with a nanoimprint lithography interlayer for thin-film layer transfer without facet formation

Citation Formats

References (33)

Similar Records

Related Subjects