Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation
Abstract
The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.
- Authors:
-
[1];
[2];
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Univ. of North Texas, Denton, TX (United States)
- Univ. of North Texas, Denton, TX (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1830531
- Alternate Identifier(s):
- OSTI ID: 1830042
- Report Number(s):
- SAND-2021-13560J
Journal ID: ISSN 0734-2101; 701521; TRN: US2216506
- Grant/Contract Number:
- NA0003525
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Volume: 39; Journal Issue: 6; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society / AIP
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Titze, Michael, Pacheco, Jose L., Byers, Todd, Van Deusen, Stuart B., Perry, Daniel L., Weathers, Duncan, and Bielejec, Edward S. Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation. United States: N. p., 2021.
Web. doi:10.1116/6.0001406.
Titze, Michael, Pacheco, Jose L., Byers, Todd, Van Deusen, Stuart B., Perry, Daniel L., Weathers, Duncan, & Bielejec, Edward S. Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation. United States. https://doi.org/10.1116/6.0001406
Titze, Michael, Pacheco, Jose L., Byers, Todd, Van Deusen, Stuart B., Perry, Daniel L., Weathers, Duncan, and Bielejec, Edward S. Mon .
"Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation". United States. https://doi.org/10.1116/6.0001406. https://www.osti.gov/servlets/purl/1830531.
@article{osti_1830531,
title = {Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation},
author = {Titze, Michael and Pacheco, Jose L. and Byers, Todd and Van Deusen, Stuart B. and Perry, Daniel L. and Weathers, Duncan and Bielejec, Edward S.},
abstractNote = {The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.},
doi = {10.1116/6.0001406},
journal = {Journal of Vacuum Science and Technology A},
number = 6,
volume = 39,
place = {United States},
year = {Mon Aug 30 00:00:00 EDT 2021},
month = {Mon Aug 30 00:00:00 EDT 2021}
}
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