Integration of high permittivity BaTiO 3 with AlGaN/GaN for near-theoretical breakdown field kV-class transistors
- Authors:
-
- Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210, USA
- Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210, USA, Department of Material Science and Engineering, The Ohio State University, Columbus, Ohio 43210, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1829326
- Grant/Contract Number:
- NA0003921
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 119 Journal Issue: 19; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Rahman, Mohammad Wahidur, Kalarickal, Nidhin Kurian, Lee, Hyunsoo, Razzak, Towhidur, and Rajan, Siddharth. Integration of high permittivity BaTiO 3 with AlGaN/GaN for near-theoretical breakdown field kV-class transistors. United States: N. p., 2021.
Web. doi:10.1063/5.0070665.
Rahman, Mohammad Wahidur, Kalarickal, Nidhin Kurian, Lee, Hyunsoo, Razzak, Towhidur, & Rajan, Siddharth. Integration of high permittivity BaTiO 3 with AlGaN/GaN for near-theoretical breakdown field kV-class transistors. United States. https://doi.org/10.1063/5.0070665
Rahman, Mohammad Wahidur, Kalarickal, Nidhin Kurian, Lee, Hyunsoo, Razzak, Towhidur, and Rajan, Siddharth. Mon .
"Integration of high permittivity BaTiO 3 with AlGaN/GaN for near-theoretical breakdown field kV-class transistors". United States. https://doi.org/10.1063/5.0070665.
@article{osti_1829326,
title = {Integration of high permittivity BaTiO 3 with AlGaN/GaN for near-theoretical breakdown field kV-class transistors},
author = {Rahman, Mohammad Wahidur and Kalarickal, Nidhin Kurian and Lee, Hyunsoo and Razzak, Towhidur and Rajan, Siddharth},
abstractNote = {},
doi = {10.1063/5.0070665},
journal = {Applied Physics Letters},
number = 19,
volume = 119,
place = {United States},
year = {2021},
month = {11}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/5.0070665
https://doi.org/10.1063/5.0070665
Other availability
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Demonstration of Wide Bandgap AlGaN/GaN Negative‐Capacitance High‐Electron‐Mobility Transistors (NC‐HEMTs) Using Barium Titanate Ferroelectric Gates
journal, July 2020
- Chandrasekar, Hareesh; Razzak, Towhidur; Wang, Caiyu
- Advanced Electronic Materials, Vol. 6, Issue 8
Suppression of Dynamic On-Resistance Increase and Gate Charge Measurements in High-Voltage GaN-HEMTs With Optimized Field-Plate Structure
journal, August 2007
- Saito, W.; Nitta, T.; Kakiuchi, Y.
- IEEE Transactions on Electron Devices, Vol. 54, Issue 8
Low cost high voltage GaN polarization superjunction field effect transistors: Low cost high voltage GaN polarization superjunction field effect transistors
journal, April 2017
- Kawai, H.; Yagi, S.; Hirata, S.
- physica status solidi (a), Vol. 214, Issue 8
Electrostatic Engineering Using Extreme Permittivity Materials for Ultra-Wide Bandgap Semiconductor Transistors
journal, January 2021
- Kalarickal, Nidhin Kurian; Feng, Zixuan; Anhar Uddin Bhuiyan, A. F. M.
- IEEE Transactions on Electron Devices, Vol. 68, Issue 1
1.4-kV Breakdown Voltage for AlGaN/GaN High-Electron-Mobility Transistors on Silicon Substrate
journal, October 2012
- Selvaraj, Susai Lawrence; Watanabe, Arata; Wakejima, Akio
- IEEE Electron Device Letters, Vol. 33, Issue 10
Linearity Improvement With AlGaN Polarization- Graded Field Effect Transistors With Low Pressure Chemical Vapor Deposition Grown SiN x Passivation
journal, January 2020
- Sohel, Shahadat H.; Rahman, Mohammad Wahidur; Xie, Andy
- IEEE Electron Device Letters, Vol. 41, Issue 1
Nanoscale etching of perovskite oxides for field effect transistor applications
journal, January 2020
- Cheng, Junao; Yang, Hao; Wang, Caiyu
- Journal of Vacuum Science & Technology B, Vol. 38, Issue 1
Slanted Tri-Gates for High-Voltage GaN Power Devices
journal, September 2017
- Ma, Jun; Matioli, Elison
- IEEE Electron Device Letters, Vol. 38, Issue 9
Planar Nearly Ideal Edge-Termination Technique for GaN Devices
journal, March 2011
- Ozbek, A. Merve; Baliga, B. Jayant
- IEEE Electron Device Letters, Vol. 32, Issue 3
GaN metal-oxide-semiconductor high-electron-mobility-transistor with atomic layer deposited Al2O3 as gate dielectric
journal, February 2005
- Ye, P. D.; Yang, B.; Ng, K. K.
- Applied Physics Letters, Vol. 86, Issue 6
β-(Al 0.18 Ga 0.82 ) 2 O 3 /Ga 2 O 3 Double Heterojunction Transistor With Average Field of 5.5 MV/cm
journal, June 2021
- Kalarickal, Nidhin Kurian; Xia, Zhanbo; Huang, Hsien-Lien
- IEEE Electron Device Letters, Vol. 42, Issue 6
Design of Transistors Using High-Permittivity Materials
journal, February 2019
- Xia, Zhanbo; Wang, Caiyu; Kalarickal, Nidhin Kurian
- IEEE Transactions on Electron Devices, Vol. 66, Issue 2
Enhancement of breakdown voltage in AlGaN/GaN high electron mobility transistors using a field plate
journal, January 2001
- Karmalkar, S.; Mishra, U. K.
- IEEE Transactions on Electron Devices, Vol. 48, Issue 8, p. 1515-1521
Band structure and optical properties of tetragonal BaTiO 3
journal, May 1973
- Michel-Calendini, F. M.; Mesnard, G.
- Journal of Physics C: Solid State Physics, Vol. 6, Issue 10
Hybrid BaTiO 3 /SiN x /AlGaN/GaN lateral Schottky barrier diodes with low turn-on and high breakdown performance
journal, July 2021
- Rahman, Mohammad Wahidur; Chandrasekar, Hareesh; Razzak, Towhidur
- Applied Physics Letters, Vol. 119, Issue 1
High Breakdown Voltage Achieved on AlGaN/GaN HEMTs With Integrated Slant Field Plates
journal, September 2006
- Dora, Y.; Chakraborty, A.; Mccarthy, L.
- IEEE Electron Device Letters, Vol. 27, Issue 9, p. 713-715
Numerical Analysis of Breakdown Voltage Enhancement in AlGaN/GaN HEMTs With a High-$k$ Passivation Layer
journal, March 2014
- Hanawa, Hideyuki; Onodera, Hiraku; Nakajima, Atsushi
- IEEE Transactions on Electron Devices, Vol. 61, Issue 3
N-Polar GaN HEMTs Exhibiting Record Breakdown Voltage Over 2000 V and Low Dynamic On-Resistance
journal, July 2018
- Koksaldi, Onur S.; Haller, Jeffrey; Li, Haoran
- IEEE Electron Device Letters, Vol. 39, Issue 7
GaN Power Transistors on Si Substrates for Switching Applications
journal, July 2010
- Ikeda, Nariaki; Niiyama, Yuki; Kambayashi, Hiroshi
- Proceedings of the IEEE, Vol. 98, Issue 7
Metal/BaTiO 3 /β-Ga 2 O 3 dielectric heterojunction diode with 5.7 MV/cm breakdown field
journal, December 2019
- Xia, Zhanbo; Chandrasekar, Hareesh; Moore, Wyatt
- Applied Physics Letters, Vol. 115, Issue 25
Prospects for the application of GaN power devices in hybrid electric vehicle drive systems
journal, June 2013
- Su, Ming; Chen, Chingchi; Rajan, Siddharth
- Semiconductor Science and Technology, Vol. 28, Issue 7
Improved two-dimensional electron gas transport characteristics in AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor with atomic layer-deposited Al2O3 as gate insulator
journal, November 2009
- Liu, Z. H.; Ng, G. I.; Arulkumaran, S.
- Applied Physics Letters, Vol. 95, Issue 22
30-W/mm GaN HEMTs by Field Plate Optimization
journal, March 2004
- Wu, Y. -F.; Saxler, A.; Moore, M.
- IEEE Electron Device Letters, Vol. 25, Issue 3
Analytical Field Plate Model for Field Effect Transistors
journal, March 2014
- Coffie, Robert
- IEEE Transactions on Electron Devices, Vol. 61, Issue 3
High Breakdown Voltage AlGaN–GaN HEMTs Achieved by Multiple Field Plates
journal, April 2004
- Xing, H.; Dora, Y.; Chini, A.
- IEEE Electron Device Letters, Vol. 25, Issue 4
High Breakdown ( >1500 V ) AlGaN/GaN HEMTs by Substrate-Transfer Technology
journal, September 2010
- Lu, Bin; Palacios, Tomás
- IEEE Electron Device Letters, Vol. 31, Issue 9, p. 951-953
BaTiO 3 /Al 0.58 Ga 0.42 N lateral heterojunction diodes with breakdown field exceeding 8 MV/cm
journal, January 2020
- Razzak, Towhidur; Chandrasekar, Hareesh; Hussain, Kamal
- Applied Physics Letters, Vol. 116, Issue 2
Breakdown Voltage Enhancement in ScAlN/GaN High-Electron-Mobility Transistors by High- k Bismuth Zinc Niobate Oxide
journal, July 2021
- Cheng, Junao; Rahman, Mohammad Wahidur; Xie, Andy
- IEEE Transactions on Electron Devices, Vol. 68, Issue 7
GaN‐on‐silicon high electron mobility transistors with blocking voltage of 3 kV
journal, September 2015
- Herbecq, N.; Roch‐Jeune, I.; Linge, A.
- Electronics Letters, Vol. 51, Issue 19
1900 V, 1.6 mΩ cm 2 AlN/GaN-on-Si power devices realized by local substrate removal
journal, February 2014
- Herbecq, Nicolas; Roch-Jeune, Isabelle; Rolland, Nathalie
- Applied Physics Express, Vol. 7, Issue 3
High Breakdown Voltage and Low-Current Dispersion in AlGaN/GaN HEMTs With High-Quality AlN Buffer Layer
journal, April 2021
- Kim, Jeong-Gil; Cho, Chuyoung; Kim, Eunjin
- IEEE Transactions on Electron Devices, Vol. 68, Issue 4
3000-V 4.3-$\hbox{m}\Omega \cdot \hbox{cm}^{2}$ InAlN/GaN MOSHEMTs With AlGaN Back Barrier
journal, July 2012
- Lee, Hyung-Seok; Piedra, Daniel; Sun, Min
- IEEE Electron Device Letters, Vol. 33, Issue 7