DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Atomic-precision advanced manufacturing for Si quantum computing

Journal Article · · MRS Bulletin

Abstract A materials synthesis method that we call atomic-precision advanced manufacturing (APAM), which is the only known route to tailor silicon nanoelectronics with full 3D atomic precision, is making an impact as a powerful prototyping tool for quantum computing. Quantum computing schemes using atomic ( 31 P) spin qubits are compelling for future scale-up owing to long dephasing times, one- and two-qubit gates nearing high-fidelity thresholds for fault-tolerant quantum error correction, and emerging routes to manufacturing via proven Si foundry techniques. Multiqubit devices are challenging to fabricate by conventional means owing to tight interqubit pitches forced by short-range spin interactions, and APAM offers the required (Å-scale) precision to systematically investigate solutions. However, applying APAM to fabricate circuitry with increasing numbers of qubits will require significant technique development. Here, we provide a tutorial on APAM techniques and materials and highlight its impacts in quantum computing research. Finally, we describe challenges on the path to multiqubit architectures and opportunities for APAM technique development. Graphic Abstract

Sponsoring Organization:
USDOE
OSTI ID:
1813068
Journal Information:
MRS Bulletin, Journal Name: MRS Bulletin Journal Issue: 7 Vol. 46; ISSN 0883-7694
Publisher:
Cambridge University Press (CUP)Copyright Statement
Country of Publication:
United States
Language:
English

References (47)

Exploiting a Single‐Crystal Environment to Minimize the Charge Noise on Qubits in Silicon journal August 2020
Donor Spins in Silicon for Quantum Technologies journal July 2020
Realization of Atomically Controlled Dopant Devices in Silicon journal April 2007
Prospects for atomically ordered device structures based on STM lithography journal July 1998
STM-Induced Desorption and Lithographic Patterning of Cl–Si(100)-(2 × 1) journal November 2019
AlCl 3 -Dosed Si(100)-2 × 1: Adsorbates, Chlorinated Al Chains, and Incorporated Al journal May 2021
Characterization of a Scalable Donor-Based Singlet–Triplet Qubit Architecture in Silicon journal May 2018
Suppressing Segregation in Highly Phosphorus Doped Silicon Monolayers journal October 2015
Atomic-Scale Patterning of Arsenic in Silicon by Scanning Tunneling Microscopy journal March 2020
A silicon-based nuclear spin quantum computer journal May 1998
Single-shot readout of an electron spin in silicon journal September 2010
High-fidelity readout and control of a nuclear spin qubit in silicon journal April 2013
Spin readout and addressability of phosphorus-donor clusters in silicon journal June 2013
Electron spin coherence exceeding seconds in high-purity silicon journal December 2011
Storing quantum information for 30 seconds in a nanoelectronic device journal October 2014
Highly tunable exchange in donor qubits in silicon journal April 2016
Engineering long spin coherence times of spin–orbit qubits in silicon journal July 2020
Spin read-out in atomic qubits in an all-epitaxial three-dimensional transistor journal January 2019
A two-qubit gate between phosphorus donor electrons in silicon journal July 2019
Quantum supremacy using a programmable superconducting processor journal October 2019
Bipolar device fabrication using a scanning tunnelling microscope journal July 2020
Atomic-scale control of tunneling in donor-based devices journal May 2020
Quantifying atom-scale dopant movement and electrical activation in Si:P monolayers journal January 2018
Nanoscale patterning and oxidation of H‐passivated Si(100)‐2×1 surfaces with an ultrahigh vacuum scanning tunneling microscope journal April 1994
Epitaxial top-gated atomic-scale silicon wire in a three-dimensional architecture journal January 2013
Controllable dissociations of PH 3 molecules on Si(001) journal February 2016
Quantum computing with acceptor spins in silicon journal May 2016
Roadmap on quantum nanotechnologies journal February 2021
Targeted enrichment of 28 Si thin films for quantum computing journal March 2020
Quantum computation with quantum dots journal January 1998
Coherent transport of spin by adiabatic passage in quantum dot arrays journal October 2020
On-chip cavity quantum phonodynamics with an acceptor qubit in silicon journal August 2013
Multivalley effective mass theory simulation of donors in silicon journal June 2015
Exchange in Silicon-Based Quantum Computer Architecture journal December 2001
Single-Shot Spin Readout in Semiconductors Near the Shot-Noise Sensitivity Limit journal October 2019
Silicon quantum electronics journal July 2013
Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation* journal September 2019
Highly parallel scanning tunneling microscope based hydrogen depassivation lithography journal November 2018
Atomically precise digital e-beam lithography conference March 2020
A surface code quantum computer in silicon journal October 2015
Atomically engineered electron spin lifetimes of 30 s in silicon journal March 2017
Addressable electron spin resonance using donors and donor molecules in silicon journal July 2018
Ohm’s Law Survives to the Atomic Scale journal January 2012
Quantum computational advantage using photons journal December 2020
Novel characterization of dopant-based qubits journal July 2021
Materials and device simulations for silicon qubit design and optimization journal July 2021
Crystalline materials for quantum computing: Semiconductor heterostructures and topological insulators exemplars journal August 2021