Towards single-chip radiofrequency signal processing via acoustoelectric electron–phonon interactions

Hackett, Lisa; Miller, Michael; Brimigion, Felicia; Dominguez, Daniel; Peake, Greg; Tauke-Pedretti, Anna; Arterburn, Shawn; Friedmann, Thomas A.; Eichenfield, Matt

doi:10.1038/s41467-021-22935-1

Title: Towards single-chip radiofrequency signal processing via acoustoelectric electron–phonon interactions

Journal Article · 12 May 2021 · Nature Communications

DOI: https://doi.org/10.1038/s41467-021-22935-1 · OSTI ID:1782892

Hackett, Lisa; Miller, Michael; Brimigion, Felicia; Dominguez, Daniel; Peake, Greg; Tauke-Pedretti, Anna; Arterburn, Shawn; Friedmann, Thomas A.;

Abstract The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.

View Journal Article

Cite

Export

Save

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE; USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0003525

OSTI ID:: 1782892

Report Number(s):: SAND--2020-9299J; 2769; PII: 22935

Journal Information:: Nature Communications, Journal Name: Nature Communications Journal Issue: 1 Vol. 12; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (57)

Acoustoelectric interaction in semiconductors Kuzmany, H. Physica Status Solidi (a), Vol. 25, Issue 1 https://doi.org/10.1002/pssa.2210250102	journal	September 1974
Reversing multistrip coupler Danicki, E. Ultrasonics, Vol. 31, Issue 6 https://doi.org/10.1016/0041-624X(93)90050-A	journal	November 1993
Piezoelectric thin AlN films for bulk acoustic wave (BAW) resonators Loebl, H. P.; Klee, M.; Metzmacher, C. Materials Chemistry and Physics, Vol. 79, Issue 2-3 https://doi.org/10.1016/S0254-0584(02)00252-3	journal	April 2003
Microwave applications of soft ferrites Pardavi-Horvath, Martha Journal of Magnetism and Magnetic Materials, Vol. 215-216 https://doi.org/10.1016/S0304-8853(00)00106-2	journal	June 2000
Materials for bulk acoustic wave (BAW) resonators and filters Löbl, H. P.; Klee, M.; Milsom, R. Journal of the European Ceramic Society, Vol. 21, Issue 15 https://doi.org/10.1016/S0955-2219(01)00329-6	journal	January 2001
Magnetic-free non-reciprocity and isolation based on parametrically modulated coupled-resonator loops Estep, Nicholas A.; Sounas, Dimitrios L.; Soric, Jason Nature Physics, Vol. 10, Issue 12 https://doi.org/10.1038/nphys3134	journal	November 2014
Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency Jiang, Wentao; Sarabalis, Christopher J.; Dahmani, Yanni D. Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-14863-3	journal	March 2020
Brillouin integrated photonics Eggleton, Benjamin J.; Poulton, Christopher G.; Rakich, Peter T. Nature Photonics, Vol. 13, Issue 10 https://doi.org/10.1038/s41566-019-0498-z	journal	August 2019
Microwave-to-optics conversion using a mechanical oscillator in its quantum ground state Forsch, Moritz; Stockill, Robert; Wallucks, Andreas Nature Physics, Vol. 16, Issue 1 https://doi.org/10.1038/s41567-019-0673-7	journal	October 2019
Superconducting qubit to optical photon transduction Mirhosseini, Mohammad; Sipahigil, Alp; Kalaee, Mahmoud Nature, Vol. 588, Issue 7839 https://doi.org/10.1038/s41586-020-3038-6	journal	December 2020
New low-loss SAW filter using internal floating electrode reflection types of single-phase unidirectional transducer Yamanouchi, K.; Furuyashiki, H. Electronics Letters, Vol. 20, Issue 24 https://doi.org/10.1049/el:19840672	journal	January 1984
Amplification of Acoustic Surface Waves with Adjacent Semiconductor and Piezoelectric Crystals Collins, J. H.; Lakin, K. M.; Quate, C. F. Applied Physics Letters, Vol. 13, Issue 9 https://doi.org/10.1063/1.1652628	journal	November 1968
Monolithic Acoustic Surface‐Wave Amplifier Coldren, L. A.; Kino, G. S. Applied Physics Letters, Vol. 18, Issue 8 https://doi.org/10.1063/1.1653677	journal	April 1971
Enhancement of Nonlinearity in Surface‐Acoustic‐Wave Propagation from Coupling to Charge Carriers Lee, C. W.; Gunshor, R. L. Applied Physics Letters, Vol. 20, Issue 8 https://doi.org/10.1063/1.1654153	journal	April 1972
Noise figure calculation for the Rayleigh wave amplifier Kino, G. S.; Coldren, L. A. Applied Physics Letters, Vol. 22, Issue 1 https://doi.org/10.1063/1.1654471	journal	January 1973
Acoustic surface wave convolver with bidirectional amplification Solie, Leland P. Applied Physics Letters, Vol. 25, Issue 1 https://doi.org/10.1063/1.1655284	journal	July 1974
Propagation and Amplification of Rayleigh Waves and Piezoelectric Leaky Surface Waves in LiNbO ₃ Yamanouchi, Kazuhiko; Shibayama, Kimio Journal of Applied Physics, Vol. 43, Issue 3 https://doi.org/10.1063/1.1661294	journal	March 1972
Nonlinear interaction of acoustic surface waves from coupling to charge carriers Lee, C. W.; Gunshor, R. L. Journal of Applied Physics, Vol. 44, Issue 11 https://doi.org/10.1063/1.1662048	journal	November 1973
Flux-driven Josephson parametric amplifier Yamamoto, T.; Inomata, K.; Watanabe, M. Applied Physics Letters, Vol. 93, Issue 4 https://doi.org/10.1063/1.2964182	journal	July 2008
High-gain leaky surface acoustic wave amplifier in epitaxial InGaAs on lithium niobate heterostructure Hackett, L.; Siddiqui, A.; Dominguez, D. Applied Physics Letters, Vol. 114, Issue 25 https://doi.org/10.1063/1.5108724	journal	June 2019
Silicon acoustoelectronics with thin film lithium niobate Bhaskar, Umesh Kumar; Bhave, Sunil Ashok; Weinstein, Dana Journal of Physics D: Applied Physics, Vol. 52, Issue 5 https://doi.org/10.1088/1361-6463/aaee59	journal	November 2018
Amplification of Acoustic Waves through Interaction with Conduction Electrons Spector, Harold N. Physical Review, Vol. 127, Issue 4 https://doi.org/10.1103/PhysRev.127.1084	journal	August 1962
Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point Glassbrenner, C. J.; Slack, Glen A. Physical Review, Vol. 134, Issue 4A https://doi.org/10.1103/PhysRev.134.A1058	journal	May 1964
Nonlinear Thoery of Ultrasonic Wave Amplification and Current Saturation in Piezoelectric Semiconductors Tien, P. K. Physical Review, Vol. 171, Issue 3 https://doi.org/10.1103/PhysRev.171.970	journal	July 1968
Cryogenic Control Architecture for Large-Scale Quantum Computing Hornibrook, J. M.; Colless, J. I.; Conway Lamb, I. D. Physical Review Applied, Vol. 3, Issue 2 https://doi.org/10.1103/PhysRevApplied.3.024010	journal	February 2015
Mixing of Acoustic Waves in Piezoelectric Semiconductors Conwell, E. M.; Ganguly, A. K. Physical Review B, Vol. 4, Issue 8 https://doi.org/10.1103/PhysRevB.4.2535	journal	October 1971
Subwavelength ultrasonic circulator based on spatiotemporal modulation Fleury, Romain; Sounas, Dimitrios L.; Alù, Andrea Physical Review B, Vol. 91, Issue 17 https://doi.org/10.1103/PhysRevB.91.174306	journal	May 2015
SAW ring filters with insertion loss of 1 dB Dobershtein, S. A.; Malyukhov, V. A. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 44, Issue 3 https://doi.org/10.1109/58.658311	journal	May 1997
Acoustic loss mechanisms in leaky SAW resonators on lithium tantalate Koskela, J.; Knuuttila, J. V.; Makkonen, T. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 48, Issue 6 https://doi.org/10.1109/58.971702	journal	November 2001
4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends Yang, Yansong; Lu, Ruochen; Gao, Liuqing Journal of Microelectromechanical Systems, Vol. 28, Issue 4 https://doi.org/10.1109/JMEMS.2019.2922935	journal	August 2019
The Traveling-Wave Tube as Amplifier at Microwaves Kompfner, R. Proceedings of the IRE, Vol. 35, Issue 2 https://doi.org/10.1109/JRPROC.1947.231238	journal	February 1947
A 5-GHz fully integrated ESD-protected low-noise amplifier in 90-nm RF CMOS Linten, D.; Thijs, S.; Natarajan, M. I. IEEE Journal of Solid-State Circuits, Vol. 40, Issue 7 https://doi.org/10.1109/JSSC.2005.847490	journal	July 2005
A 1.75-GHz polar modulated CMOS RF power amplifier for GSM-EDGE Reynaert, P.; Steyaert, M. S. J. IEEE Journal of Solid-State Circuits, Vol. 40, Issue 12 https://doi.org/10.1109/JSSC.2005.857425	journal	December 2005
An FBAR Circulator Torunbalci, Mustafa Mert; Odelberg, Trevor J.; Sridaran, Suresh IEEE Microwave and Wireless Components Letters, Vol. 28, Issue 5 https://doi.org/10.1109/LMWC.2018.2815271	journal	May 2018
Dynamic spectrum aggregation for future 5G communications Bogucka, Hanna; Kryszkiewicz, Paweł; Kliks, Adrian IEEE Communications Magazine, Vol. 53, Issue 5 https://doi.org/10.1109/MCOM.2015.7105639	journal	May 2015
LTE-Advanced Pro RF Front-End Implementations to Meet Emerging Carrier Aggregation and DL MIMO Requirements Pehlke, David R.; Walsh, Kevin IEEE Communications Magazine, Vol. 55, Issue 4 https://doi.org/10.1109/MCOM.2017.1601221	journal	April 2017
Micro-Acoustic Quad Circulator with Self-Interference Cancellation Yu, Yao; Rinaldi, Matteo 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) https://doi.org/10.1109/MEMS46641.2020.9056324	conference	January 2020
Magnetic-free radio frequency circulator based on spatiotemporal commutation of MEMS resonators Yu, Yao; Michetti, Giuseppe; Kord, Ahmed 2018 IEEE Micro Electro Mechanical Systems (MEMS) https://doi.org/10.1109/MEMSYS.2018.8346507	conference	January 2018
Integrating the Front End: A Highly Integrated RF Front End for High-SHF Wide-Band Massive MIMO in 5G Shinjo, Shintaro; Nakatani, Keigo; Tsutsumi, Koji IEEE Microwave Magazine, Vol. 18, Issue 5 https://doi.org/10.1109/MMM.2017.2690883	journal	July 2017
Surface wave convolution in piezoelectric semiconductors Wang, W. C.; Das, P. Proceedings of the IEEE, Vol. 60, Issue 9 https://doi.org/10.1109/PROC.1972.8867	journal	January 1972
Acoustoelectric interactions in acoustic-surface-wave devices Kino, G. S. Proceedings of the IEEE, Vol. 64, Issue 5 https://doi.org/10.1109/PROC.1976.10202	journal	January 1976
The Schottky diode acoustoelectric memory and correlator—A novel programmable signal processor Ingebrigtsen, K. A. Proceedings of the IEEE, Vol. 64, Issue 5 https://doi.org/10.1109/PROC.1976.10208	journal	January 1976
Surface elastic-wave propagation and amplification White, R. M. IEEE Transactions on Electron Devices, Vol. 14, Issue 4 https://doi.org/10.1109/T-ED.1967.15926	journal	April 1967
A normal mode theory for the Rayleigh wave amplifier Kino, G. S.; Reeder, T. M. IEEE Transactions on Electron Devices, Vol. 18, Issue 10 https://doi.org/10.1109/T-ED.1971.17304	journal	October 1971
The InSb on a piezoelectric Rayleigh wave amplifier Coldren, L. A.; Kino, G. S. IEEE Transactions on Electron Devices, Vol. 21, Issue 7 https://doi.org/10.1109/T-ED.1974.17943	journal	July 1974
V-8 surface state memory in surface acoustoelectric correlator Bers, A.; Cafarella, J. H. IEEE Transactions on Electron Devices, Vol. 21, Issue 11 https://doi.org/10.1109/T-ED.1974.18041	journal	November 1974
Simple theory of acoustic amplification Adler, Robert IEEE Transactions on Sonics and Ultrasonics, Vol. 18, Issue 3 https://doi.org/10.1109/T-SU.1971.29605	journal	July 1971
Operation of the Ferrite Junction Circulator Fay, C. E.; Comstock, R. L. IEEE Transactions on Microwave Theory and Techniques, Vol. 13, Issue 1 https://doi.org/10.1109/TMTT.1965.1125923	journal	January 1965
Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit Model Smith, W. R.; Gerard, H. M.; Collins, J. H. IEEE Transactions on Microwave Theory and Techniques, Vol. 17, Issue 11 https://doi.org/10.1109/TMTT.1969.1127075	journal	November 1969
A GaAs MESFET Mixer with Very Low Intermodulation Maas, S. A. IEEE Transactions on Microwave Theory and Techniques, Vol. 35, Issue 4 https://doi.org/10.1109/TMTT.1987.1133665	journal	April 1987
A Wideband CMOS/GaAs HBT Envelope Tracking Power Amplifier for 4G LTE Mobile Terminal Applications Hassan, Muhammad; Larson, Lawrence E.; Leung, Vincent W. IEEE Transactions on Microwave Theory and Techniques, Vol. 60, Issue 5 https://doi.org/10.1109/TMTT.2012.2187537	journal	May 2012
5-GHz Antisymmetric Mode Acoustic Delay Lines in Lithium Niobate Thin Film Lu, Ruochen; Yang, Yansong; Li, Ming-Huang IEEE Transactions on Microwave Theory and Techniques, Vol. 68, Issue 2 https://doi.org/10.1109/TMTT.2019.2949808	journal	February 2020
The 5G Effect on RF Filter Technologies Mahon, Steven IEEE Transactions on Semiconductor Manufacturing, Vol. 30, Issue 4 https://doi.org/10.1109/TSM.2017.2757879	journal	November 2017
Experimental Investigation of Surface Acoustic Wave Acoustoelectric Effect Using a Graphene Film on Lithium Niobate Carmichael, Christopher P.; Smith, M. Scott; Weeks, Arthur R. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 65, Issue 11 https://doi.org/10.1109/TUFFC.2018.2870042	journal	November 2018
Gigahertz Low-Loss and Wideband S0 Mode Lithium Niobate Acoustic Delay Lines Lu, Ruochen; Manzaneque, Tomas; Yang, Yansong IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 66, Issue 8 https://doi.org/10.1109/TUFFC.2019.2916259	journal	August 2019
High performance lithium niobate surface acoustic wave transducers in the 4–12 GHz super high frequency range Chen, Xiao; Mohammad, Mohammad Ali; Conway, James Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6 https://doi.org/10.1116/1.4935561	journal	November 2015
Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators Shao, Linbo; Yu, Mengjie; Maity, Smarak Optica, Vol. 6, Issue 12 https://doi.org/10.1364/OPTICA.6.001498	journal	January 2019

Similar Records

Non-reciprocal acoustoelectric microwave amplifiers with net gain and low noise in continuous operation

Journal Article · 2023 · Nature Electronics · OSTI ID:1909279

Hackett, Lisa; Miller, Michael; Weatherred, Scott; +7 more

Hybrid semiconductor-piezoacoustic radiofrequency device

Patent · 2020 · OSTI ID:1650960

Eichenfield, Matt; Olsson, Roy H.; Tauke-Pedretti, Anna; +3 more

Active and Nonreciprocal Radio-Frequency Acoustic Microsystems

Technical Report · 2019 · OSTI ID:1573926

Hackett, Lisa Anne Plucinski; Siddiqui, Aleem; Dominguez, Daniel; +7 more

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING

Title: Towards single-chip radiofrequency signal processing via acoustoelectric electron–phonon interactions

Citation Formats

References (57)

Similar Records

Related Subjects