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Title: Broadband X-ray ptychography using multi-wavelength algorithm

Abstract

Ptychography is a rapidly developing scanning microscopy which is able to view the internal structures of samples at a high resolution beyond the illumination size. The achieved spatial resolution is theoretically dose-limited. A broadband source can provide much higher flux compared with a monochromatic source; however, it conflicts with the necessary coherence requirements of this coherent diffraction imaging technique. In this paper, a multi-wavelength reconstruction algorithm has been developed to deal with the broad bandwidth in ptychography. Compared with the latest development of mixed-state reconstruction approach, this multi-wavelength approach is more accurate in the physical model, and also considers the spot size variation as a function of energy due to the chromatic focusing optics. Therefore, this method has been proved in both simulation and experiment to significantly improve the reconstruction when the source bandwidth, illumination size and scan step size increase. It is worth mentioning that the accurate and detailed information of the energy spectrum for the incident beam is not required in advance for the proposed method. Further, we combine multi-wavelength and mixed-state approaches to jointly solve temporal and spatial partial coherence in ptychography so that it can handle various disadvantageous experimental effects. The significant relaxation in coherence requirements bymore » our approaches allows the use of high-flux broadband X-ray sources for high-efficient and high-resolution ptychographic imaging.« less

Authors:
ORCiD logo; ; ; ; ; ; ; ; ; ; ; ; ORCiD logo
Publication Date:
Research Org.:
Argonne National Laboratory (ANL), Argonne, IL (United States). Advanced Photon Source (APS) and Center for Nanoscale Materials (CNM)
Sponsoring Org.:
USDOE Laboratory Directed Research and Development (LDRD) Program; USDOE Office of Science (SC); Office of the Director of National Intelligence (ODNI); Intelligence Advanced Research Projects Activity (IARPA)
OSTI Identifier:
1745073
Alternate Identifier(s):
OSTI ID: 1760013
Grant/Contract Number:  
AC02-06CH11357; 2015-153-N0
Resource Type:
Published Article
Journal Name:
Journal of Synchrotron Radiation (Online)
Additional Journal Information:
Journal Name: Journal of Synchrotron Radiation (Online) Journal Volume: 28 Journal Issue: 1; Journal ID: ISSN 1600-5775
Publisher:
International Union of Crystallography
Country of Publication:
Denmark
Language:
English
Subject:
73 NUCLEAR PHYSICS AND RADIATION PHYSICS; coherent diffraction imaging; ptychography; partial coherence; high-throughput

Citation Formats

Yao, Yudong, Jiang, Yi, Klug, Jeffrey, Nashed, Youssef, Roehrig, Christian, Preissner, Curt, Marin, Fabricio, Wojcik, Michael, Cossairt, Oliver, Cai, Zhonghou, Vogt, Stefan, Lai, Barry, and Deng, Junjing. Broadband X-ray ptychography using multi-wavelength algorithm. Denmark: N. p., 2021. Web. doi:10.1107/S1600577520014708.
Yao, Yudong, Jiang, Yi, Klug, Jeffrey, Nashed, Youssef, Roehrig, Christian, Preissner, Curt, Marin, Fabricio, Wojcik, Michael, Cossairt, Oliver, Cai, Zhonghou, Vogt, Stefan, Lai, Barry, & Deng, Junjing. Broadband X-ray ptychography using multi-wavelength algorithm. Denmark. https://doi.org/10.1107/S1600577520014708
Yao, Yudong, Jiang, Yi, Klug, Jeffrey, Nashed, Youssef, Roehrig, Christian, Preissner, Curt, Marin, Fabricio, Wojcik, Michael, Cossairt, Oliver, Cai, Zhonghou, Vogt, Stefan, Lai, Barry, and Deng, Junjing. Fri . "Broadband X-ray ptychography using multi-wavelength algorithm". Denmark. https://doi.org/10.1107/S1600577520014708.
@article{osti_1745073,
title = {Broadband X-ray ptychography using multi-wavelength algorithm},
author = {Yao, Yudong and Jiang, Yi and Klug, Jeffrey and Nashed, Youssef and Roehrig, Christian and Preissner, Curt and Marin, Fabricio and Wojcik, Michael and Cossairt, Oliver and Cai, Zhonghou and Vogt, Stefan and Lai, Barry and Deng, Junjing},
abstractNote = {Ptychography is a rapidly developing scanning microscopy which is able to view the internal structures of samples at a high resolution beyond the illumination size. The achieved spatial resolution is theoretically dose-limited. A broadband source can provide much higher flux compared with a monochromatic source; however, it conflicts with the necessary coherence requirements of this coherent diffraction imaging technique. In this paper, a multi-wavelength reconstruction algorithm has been developed to deal with the broad bandwidth in ptychography. Compared with the latest development of mixed-state reconstruction approach, this multi-wavelength approach is more accurate in the physical model, and also considers the spot size variation as a function of energy due to the chromatic focusing optics. Therefore, this method has been proved in both simulation and experiment to significantly improve the reconstruction when the source bandwidth, illumination size and scan step size increase. It is worth mentioning that the accurate and detailed information of the energy spectrum for the incident beam is not required in advance for the proposed method. Further, we combine multi-wavelength and mixed-state approaches to jointly solve temporal and spatial partial coherence in ptychography so that it can handle various disadvantageous experimental effects. The significant relaxation in coherence requirements by our approaches allows the use of high-flux broadband X-ray sources for high-efficient and high-resolution ptychographic imaging.},
doi = {10.1107/S1600577520014708},
journal = {Journal of Synchrotron Radiation (Online)},
number = 1,
volume = 28,
place = {Denmark},
year = {Fri Jan 01 00:00:00 EST 2021},
month = {Fri Jan 01 00:00:00 EST 2021}
}

Works referenced in this record:

Simultaneous sample and spatial coherence characterisation using diffractive imaging
journal, October 2011

  • Clark, Jesse N.; Peele, Andrew G.
  • Applied Physics Letters, Vol. 99, Issue 15
  • DOI: 10.1063/1.3650265

Reconstructing state mixtures from diffraction measurements
journal, February 2013


Multiple wavelength diffractive imaging
journal, February 2009


Simultaneous cryo X-ray ptychographic and fluorescence microscopy of green algae
journal, February 2015

  • Deng, Junjing; Vine, David J.; Chen, Si
  • Proceedings of the National Academy of Sciences, Vol. 112, Issue 8
  • DOI: 10.1073/pnas.1413003112

An improved ptychographical phase retrieval algorithm for diffractive imaging
journal, September 2009


Influence of the overlap parameter on the convergence of the ptychographical iterative engine
journal, April 2008


Coherent-mode representation of Gaussian Schell-model sources and of their radiation fields
journal, January 1982

  • Starikov, A.; Wolf, E.
  • Journal of the Optical Society of America, Vol. 72, Issue 7
  • DOI: 10.1364/JOSA.72.000923

Iterative least-squares solver for generalized maximum-likelihood ptychography
journal, January 2018

  • Odstrčil, Michal; Menzel, Andreas; Guizar-Sicairos, Manuel
  • Optics Express, Vol. 26, Issue 3
  • DOI: 10.1364/OE.26.003108

Hard x-ray nanobeam characterization by coherent diffraction microscopy
journal, March 2010

  • Schropp, A.; Boye, P.; Feldkamp, J. M.
  • Applied Physics Letters, Vol. 96, Issue 9
  • DOI: 10.1063/1.3332591

Continuous motion scan ptychography: characterization for increased speed in coherent x-ray imaging
journal, January 2015

  • Deng, Junjing; Nashed, Youssef S. G.; Chen, Si
  • Optics Express, Vol. 23, Issue 5
  • DOI: 10.1364/OE.23.005438

Coherent x-ray scattering
journal, July 2004


Coherent imaging at the diffraction limit
journal, August 2014

  • Thibault, Pierre; Guizar-Sicairos, Manuel; Menzel, Andreas
  • Journal of Synchrotron Radiation, Vol. 21, Issue 5
  • DOI: 10.1107/S1600577514015343

High-throughput ptychography using Eiger-scanning X-ray nano-imaging of extended regions
journal, January 2014

  • Guizar-Sicairos, Manuel; Johnson, Ian; Diaz, Ana
  • Optics Express, Vol. 22, Issue 12
  • DOI: 10.1364/OE.22.014859

Achromatic Fresnel optics for wideband extreme-ultraviolet and X-ray imaging
journal, July 2003

  • Wang, Yuxin; Yun, Wenbing; Jacobsen, Chris
  • Nature, Vol. 424, Issue 6944, p. 50-53
  • DOI: 10.1038/nature01756

Three-dimensional magnetization structures revealed with X-ray vector nanotomography
journal, July 2017

  • Donnelly, Claire; Guizar-Sicairos, Manuel; Scagnoli, Valerio
  • Nature, Vol. 547, Issue 7663
  • DOI: 10.1038/nature23006

Quantitative Nanoscale Imaging of Lattice Distortions in Epitaxial Semiconductor Heterostructures Using Nanofocused X-ray Bragg Projection Ptychography
journal, September 2012

  • Hruszkewycz, S. O.; Holt, M. V.; Murray, C. E.
  • Nano Letters, Vol. 12, Issue 10
  • DOI: 10.1021/nl303201w

Lensless imaging using broadband X-ray sources
journal, June 2011


Fly-scan ptychography
journal, March 2015

  • Huang, Xiaojing; Lauer, Kenneth; Clark, Jesse N.
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep09074

High-Resolution Scanning X-ray Diffraction Microscopy
journal, July 2008


X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution
journal, January 2014

  • Holler, M.; Diaz, A.; Guizar-Sicairos, M.
  • Scientific Reports, Vol. 4, Issue 1
  • DOI: 10.1038/srep03857

Diffractive Imaging Using Partially Coherent X Rays
journal, December 2009


The Velociprobe: An ultrafast hard X-ray nanoprobe for high-resolution ptychographic imaging
journal, August 2019

  • Deng, Junjing; Preissner, Curt; Klug, Jeffrey A.
  • Review of Scientific Instruments, Vol. 90, Issue 8
  • DOI: 10.1063/1.5103173

On-the-fly scans for X-ray ptychography
journal, December 2014

  • Pelz, Philipp M.; Guizar-Sicairos, Manuel; Thibault, Pierre
  • Applied Physics Letters, Vol. 105, Issue 25
  • DOI: 10.1063/1.4904943

Dose requirements for resolving a given feature in an object by coherent x-ray diffraction imaging
journal, March 2010


Dynamic Imaging Using Ptychography
journal, March 2014


Chemical composition mapping with nanometre resolution by soft X-ray microscopy
journal, September 2014


An annealing algorithm to correct positioning errors in ptychography
journal, September 2012


Nanoscale x-ray imaging of circuit features without wafer etching
journal, March 2017


Diffraction imaging: The limits of partial coherence
journal, December 2012


Translation position determination in ptychographic coherent diffraction imaging
journal, January 2013

  • Zhang, Fucai; Peterson, Isaac; Vila-Comamala, Joan
  • Optics Express, Vol. 21, Issue 11
  • DOI: 10.1364/OE.21.013592

Hard-X-Ray Lensless Imaging of Extended Objects
journal, January 2007


Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics
journal, March 2010


X-ray ptychography
journal, December 2017


Strategies for high-throughput focused-beam ptychography
journal, August 2017

  • Jacobsen, Chris; Deng, Junjing; Nashed, Youssef
  • Journal of Synchrotron Radiation, Vol. 24, Issue 5
  • DOI: 10.1107/S1600577517009869

Quantitative biological imaging by ptychographic x-ray diffraction microscopy
journal, December 2009

  • Giewekemeyer, K.; Thibault, P.; Kalbfleisch, S.
  • Proceedings of the National Academy of Sciences, Vol. 107, Issue 2
  • DOI: 10.1073/pnas.0905846107

Three-dimensional mass density mapping of cellular ultrastructure by ptychographic X-ray nanotomography
journal, December 2015


High-resolution non-destructive three-dimensional imaging of integrated circuits
journal, March 2017

  • Holler, Mirko; Guizar-Sicairos, Manuel; Tsai, Esther H. R.
  • Nature, Vol. 543, Issue 7645
  • DOI: 10.1038/nature21698

Ptychography with broad-bandwidth radiation
journal, April 2014

  • Enders, B.; Dierolf, M.; Cloetens, P.
  • Applied Physics Letters, Vol. 104, Issue 17
  • DOI: 10.1063/1.4874304

Coherence and sampling requirements for diffractive imaging
journal, November 2004


Correlative 3D x-ray fluorescence and ptychographic tomography of frozen-hydrated green algae
journal, November 2018

  • Deng, Junjing; Lo, Yuan Hung; Gallagher-Jones, Marcus
  • Science Advances, Vol. 4, Issue 11
  • DOI: 10.1126/sciadv.aau4548