Langasite crystal based pressure sensor with temperature compensation

Yenuganti, Sujan; Zhang, Haifeng; Zhang, Chen

doi:10.1016/j.sna.2018.07.012

Title: Langasite crystal based pressure sensor with temperature compensation

Journal Article · 30 September 2018 · Sensors and Actuators. A, Physical

DOI: https://doi.org/10.1016/j.sna.2018.07.012 · OSTI ID:1702805

Yenuganti, Sujan; Zhang, Haifeng; Zhang, Chen

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Sponsoring Organization:: USDOE

Grant/Contract Number:: NE0000747

OSTI ID:: 1702805

Journal Information:: Sensors and Actuators. A, Physical, Journal Name: Sensors and Actuators. A, Physical Journal Issue: C Vol. 281; ISSN 0924-4247

Publisher:: ElsevierCopyright Statement

Country of Publication:: Switzerland

Language:: English

References (14)

Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm Cheng, Rongjun; Zhao, Yulong; Li, Cun Microsystem Technologies, Vol. 21, Issue 3 https://doi.org/10.1007/s00542-014-2108-9	journal	February 2014
Sensing liquid properties with thickness-shear mode resonators Martin, S. J.; Frye, G. C.; Wessendorf, K. O. Sensors and Actuators A: Physical, Vol. 44, Issue 3 https://doi.org/10.1016/0924-4247(94)00806-X	journal	September 1994
Validation of the quartz-crystal microbalance response in liquid for sensor applications Bouche-Pillon, D.; Gabrielli, C.; Perrot, H. Sensors and Actuators B: Chemical, Vol. 24, Issue 1-3 https://doi.org/10.1016/0925-4005(95)85054-6	journal	March 1995
Chemical sensors based on electrically sensitive quartz resonators Zhang, C.; Vetelino, J. F. Sensors and Actuators B: Chemical, Vol. 91, Issue 1-3 https://doi.org/10.1016/S0925-4005(03)00094-7	journal	June 2003
A new apparatus for the measurement of force-frequency effect of crystal resonators Pham, Thanh Tuong; Zhang, Haifeng Measurement, Vol. 93 https://doi.org/10.1016/j.measurement.2016.07.057	journal	November 2016
Media compatible stainless steel capacitive pressure sensors Ho, Shih-Shian; Rajgopal, Srihari; Mehregany, Mehran Sensors and Actuators A: Physical, Vol. 189 https://doi.org/10.1016/j.sna.2012.09.022	journal	January 2013
Design and testing of piezoelectric resonant pressure sensor Sujan, Y.; Uma, G.; Umapathy, M. Sensors and Actuators A: Physical, Vol. 250 https://doi.org/10.1016/j.sna.2016.09.031	journal	October 2016
A highly linear humidity sensor based on quartz crystal microbalance coated with urea formaldehyde resin/nano silica composite films Lv, Rixin; Peng, Jun; Chen, Shen Sensors and Actuators B: Chemical, Vol. 250 https://doi.org/10.1016/j.snb.2017.03.074	journal	October 2017
A dual-mode thickness-shear quartz pressure sensor Besson, R. J.; Boy, J. J.; Glotin, B. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 40, Issue 5 https://doi.org/10.1109/58.238112	journal	September 1993
Quartz thickness-shear mode pressure sensor design for enhanced sensitivity Clayton, L. D.; EerNisse, E. P. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 45, Issue 5 https://doi.org/10.1109/58.726443	journal	September 1998
Review of thickness-shear mode quartz resonator sensors for temperature and pressure EerNisse, E. P.; Wiggins, R. B. IEEE Sensors Journal, Vol. 1, Issue 1 https://doi.org/10.1109/JSEN.2001.923590	journal	June 2001
Design, Modeling, and Experiment of a Piezoelectric Pressure Sensor Based on a Thickness-Shear-Mode Crystal Resonator Pham, Thanh Tuong; Zhang, Haifeng; Yenuganti, Sujan IEEE Transactions on Industrial Electronics, Vol. 64, Issue 11 https://doi.org/10.1109/TIE.2017.2733498	journal	November 2017
Stress- and temperature-compensated orientations for thickness-shear langasite resonators for high-temperature and high-pressure environment Patel, Mihir S.; Sinha, Bikash K. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 62, Issue 6 https://doi.org/10.1109/TUFFC.2014.006857	journal	June 2015
A Micromachined Piezoresistive Pressure Sensor with a Shield Layer Cao, Gang; Wang, Xiaoping; Xu, Yong Sensors, Vol. 16, Issue 8 https://doi.org/10.3390/s16081286	journal	August 2016

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