Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy
Abstract
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1677518
- Alternate Identifier(s):
- OSTI ID: 1725765
- Report Number(s):
- BNL-220655-2020-JAAM
Journal ID: ISSN 2072-666X; PII: mi11100939
- Grant/Contract Number:
- LDRD 17-017; SC0012704
- Resource Type:
- Published Article
- Journal Name:
- Micromachines
- Additional Journal Information:
- Journal Name: Micromachines Journal Volume: 11 Journal Issue: 10; Journal ID: ISSN 2072-666X
- Publisher:
- MDPI
- Country of Publication:
- Switzerland
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; MEMS; microfabrication; multilayer Laue lenses; x-ray microscopy
Citation Formats
Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong, and Nazaretski, Evgeny. Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy. Switzerland: N. p., 2020.
Web. doi:10.3390/mi11100939.
Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong, & Nazaretski, Evgeny. Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy. Switzerland. https://doi.org/10.3390/mi11100939
Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong, and Nazaretski, Evgeny. Thu .
"Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy". Switzerland. https://doi.org/10.3390/mi11100939.
@article{osti_1677518,
title = {Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy},
author = {Xu, Wei and Xu, Weihe and Bouet, Nathalie and Zhou, Juan and Yan, Hanfei and Huang, Xiaojing and Lu, Ming and Zalalutdinov, Maxim and Chu, Yong and Nazaretski, Evgeny},
abstractNote = {We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy.},
doi = {10.3390/mi11100939},
journal = {Micromachines},
number = 10,
volume = 11,
place = {Switzerland},
year = {Thu Oct 15 00:00:00 EDT 2020},
month = {Thu Oct 15 00:00:00 EDT 2020}
}
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