skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams

Abstract

Silicon is a commonly used material for the fabrication of beams for use in micro-electrical-mechanical systems (MEMS). Although silicon is a brittle material, it has been shown to accumulate fatigue damage at the micro-scale. Understanding the effect this has on the overall device performance is critical to the design of reliable devices. Analytical methods for modeling damage provide expedient results but are limited by broad modeling assumptions. Numerical models account for more detailed physical phenomena but can be computationally intensive. In this work, two different crack scenarios are modeled using both analytical techniques and 3D computational simulations. First, the effects of a single surface crack on the static deflection and natural frequency of an electrostatically actuated micro-beam are formulated and compared. Then, a new method for approximating damage associated with realistic distributed crack networks is formulated for use in an analytical model and numerical simulations. A method for utilizing experimentally derived crack statistics to inform the analytical and numerical distributed crack models is developed. Good agreement between the analytical and numerical models is obtained for both crack scenarios. Altogether, these models can be used to effectively simulate a variety of damage and fatigue behaviors in silicon-based MEMS devices.

Authors:
 [1]; ORCiD logo [2];  [3]
  1. New Mexico State University, Las Cruces, NM (United States); Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
  2. Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
  3. New Mexico State University, Las Cruces, NM (United States)
Publication Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org.:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
OSTI Identifier:
1673376
Alternate Identifier(s):
OSTI ID: 1809261
Report Number(s):
LA-UR-20-24703
Journal ID: ISSN 0020-7403
Grant/Contract Number:  
89233218CNA000001
Resource Type:
Accepted Manuscript
Journal Name:
International Journal of Mechanical Sciences
Additional Journal Information:
Journal Volume: 192; Journal ID: ISSN 0020-7403
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Larkin, Kevin, Hunter, Abigail, and Abdelkefi, Abdessattar. Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams. United States: N. p., 2020. Web. https://doi.org/10.1016/j.ijmecsci.2020.106139.
Larkin, Kevin, Hunter, Abigail, & Abdelkefi, Abdessattar. Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams. United States. https://doi.org/10.1016/j.ijmecsci.2020.106139
Larkin, Kevin, Hunter, Abigail, and Abdelkefi, Abdessattar. Thu . "Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams". United States. https://doi.org/10.1016/j.ijmecsci.2020.106139. https://www.osti.gov/servlets/purl/1673376.
@article{osti_1673376,
title = {Comparative investigations of multi-fidelity modeling on performance of electrostatically-actuated cracked micro-beams},
author = {Larkin, Kevin and Hunter, Abigail and Abdelkefi, Abdessattar},
abstractNote = {Silicon is a commonly used material for the fabrication of beams for use in micro-electrical-mechanical systems (MEMS). Although silicon is a brittle material, it has been shown to accumulate fatigue damage at the micro-scale. Understanding the effect this has on the overall device performance is critical to the design of reliable devices. Analytical methods for modeling damage provide expedient results but are limited by broad modeling assumptions. Numerical models account for more detailed physical phenomena but can be computationally intensive. In this work, two different crack scenarios are modeled using both analytical techniques and 3D computational simulations. First, the effects of a single surface crack on the static deflection and natural frequency of an electrostatically actuated micro-beam are formulated and compared. Then, a new method for approximating damage associated with realistic distributed crack networks is formulated for use in an analytical model and numerical simulations. A method for utilizing experimentally derived crack statistics to inform the analytical and numerical distributed crack models is developed. Good agreement between the analytical and numerical models is obtained for both crack scenarios. Altogether, these models can be used to effectively simulate a variety of damage and fatigue behaviors in silicon-based MEMS devices.},
doi = {10.1016/j.ijmecsci.2020.106139},
journal = {International Journal of Mechanical Sciences},
number = ,
volume = 192,
place = {United States},
year = {2020},
month = {10}
}

Works referenced in this record:

A review of principles of MEMS pressure sensing with its aerospace applications
journal, September 2019


Defense Applications of MEMS
journal, April 2001

  • Tang, William C.; Lee, Abraham P.
  • MRS Bulletin, Vol. 26, Issue 4
  • DOI: 10.1557/mrs2001.70

Review on Wearable Technology Sensors Used in Consumer Sport Applications
journal, April 2019

  • Aroganam, Gobinath; Manivannan, Nadarajah; Harrison, David
  • Sensors, Vol. 19, Issue 9
  • DOI: 10.3390/s19091983

Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element
journal, January 2020


Nonlinear structural behavior of a size-dependent MEMS gyroscope assuming a non-trivial shaped proof mass
journal, July 2019


Distributed MEMS Mass-Sensor Based on Piezoelectric Resonant Micro-Cantilevers
journal, June 2019

  • Joshi, Priyanka; Kumar, Sanjeev; Jain, V. K.
  • Journal of Microelectromechanical Systems, Vol. 28, Issue 3
  • DOI: 10.1109/JMEMS.2019.2908879

Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield
journal, March 2019

  • Sivasundari, K.; Sugantharathnam, D. Mary; Daniel, R. Joseph
  • Microsystem Technologies, Vol. 25, Issue 7
  • DOI: 10.1007/s00542-019-04388-1

Design and performance analysis of double cantilever type capacitive shunt RF MEMS switch
journal, June 2019

  • Girija Sravani, K.; Srinivasa Rao, K.; Prathyusha, D.
  • Microsystem Technologies, Vol. 26, Issue 2
  • DOI: 10.1007/s00542-019-04505-0

Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction
journal, November 2018

  • Nguyen, Chi Cuong; Ngo, Vo Ke Thanh; Le, Hoai Quoc
  • Microsystem Technologies, Vol. 25, Issue 7
  • DOI: 10.1007/s00542-018-4239-x

Review on the Modeling of Electrostatic MEMS
journal, June 2010

  • Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen
  • Sensors, Vol. 10, Issue 6
  • DOI: 10.3390/s100606149

Predicting Fracture in Micrometer-Scale Polycrystalline Silicon MEMS Structures
journal, August 2011

  • Reedy, E. David; Boyce, Brad L.; Foulk, James W.
  • Journal of Microelectromechanical Systems, Vol. 20, Issue 4
  • DOI: 10.1109/JMEMS.2011.2153824

Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens
journal, June 2013

  • Gaither, Michael S.; Gates, Richard S.; Kirkpatrick, Rebecca
  • Journal of Microelectromechanical Systems, Vol. 22, Issue 3
  • DOI: 10.1109/JMEMS.2012.2234724

Determination of polysilicon Weibull parameters from indentation fracture
journal, November 2017


Predicting strength distributions of MEMS structures using flaw size and spatial density
journal, November 2019

  • Cook, Robert F.; DelRio, Frank W.; Boyce, Brad L.
  • Microsystems & Nanoengineering, Vol. 5, Issue 1
  • DOI: 10.1038/s41378-019-0093-y

A Renewal Weakest-Link Model of Strength Distribution of Polycrystalline Silicon MEMS Structures
journal, May 2019

  • Xu, Zhifeng; Ballarini, Roberto; Le, Jia-Liang
  • Journal of Applied Mechanics, Vol. 86, Issue 8
  • DOI: 10.1115/1.4043440

Fatigue of polycrystalline silicon under long-term cyclic loading
journal, January 2003


Surface topography evolution and fatigue fracture in polysilicon mems structures
journal, June 2003

  • Allameh, S. M.; Shrotriya, P.; Butterwick, A.
  • Journal of Microelectromechanical Systems, Vol. 12, Issue 3
  • DOI: 10.1109/JMEMS.2003.809957

High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air
journal, November 2001


Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems
journal, March 2002

  • Muhlstein, C. L.; Stach, E. A.; Ritchie, R. O.
  • Applied Physics Letters, Vol. 80, Issue 9
  • DOI: 10.1063/1.1455142

Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions
journal, January 2004


Very high-cycle fatigue failure in micron-scale polycrystalline silicon films: Effects of environment and surface oxide thickness
journal, January 2007

  • Alsem, D. H.; Timmerman, R.; Boyce, B. L.
  • Journal of Applied Physics, Vol. 101, Issue 1
  • DOI: 10.1063/1.2403841

Fatigue failure in thin-film polycrystalline silicon is due to subcritical cracking within the oxide layer
journal, January 2005

  • Alsem, D. H.; Stach, E. A.; Muhlstein, C. L.
  • Applied Physics Letters, Vol. 86, Issue 4
  • DOI: 10.1063/1.1856689

A new on-chip test structure for real time fatigue analysis in polysilicon MEMS
journal, February 2009


Fatigue studies of nanoscale structures for MEMS/NEMS applications using nanoindentation techniques
journal, January 2003


A study of the effect of transient stresses on the fatigue life of RF MEMS switches
journal, February 2019

  • Xi, Wei; Elsinawi, Ameen; Guha, Koushik
  • International Journal of Numerical Modelling: Electronic Networks, Devices and Fields, Vol. 32, Issue 3
  • DOI: 10.1002/jnm.2570

A computational and experimental comparison on the nucleation of fatigue cracks in statistical volume elements
journal, August 2020


A variational model based on isogeometric interpolation for the analysis of cracked bodies
journal, July 2014


Effects of Crack Faults on the Dynamics of Piezoelectric Cantilever-Based MEMS Sensor
journal, October 2017

  • Shoaib, Muhammad; Hamid, Nor Hisham; Tariq Jan, Mohammad
  • IEEE Sensors Journal, Vol. 17, Issue 19
  • DOI: 10.1109/JSEN.2017.2737044

Free and forced vibration of cracked inhomogeneous beams under an axial force and a moving load
journal, April 2008


Effect of Damage Parameters on Vibration Signatures of a Cantilever Beam
journal, January 2012


Free Vibration of the Cracked Non-uniform Beam with Cross Section Varying as Polynomial Functions
journal, June 2018


Vibratory characteristics of cracked non-uniform beams with different boundary conditions
journal, January 2019

  • Liu, Hanbing; Wei, Zhigang; Tan, Guojin
  • Journal of Mechanical Science and Technology, Vol. 33, Issue 1
  • DOI: 10.1007/s12206-018-1238-x

Identification of multiple open and fatigue cracks in beam-like structures using wavelets on deflection signals
journal, May 2015


Modeling and Vibration Characteristics of Cracked Nano-Beams Made of Nanocrystalline Materials
journal, September 2016

  • Shaat, Mohammed; Akbarzadeh Khorshidi, Majid; Abdelkefi, Abdessattar
  • International Journal of Mechanical Sciences, Vol. 115-116
  • DOI: 10.1016/j.ijmecsci.2016.07.037

Micromechanical Damage Models for Brittle Solids. Part I: Tensile Loadings
journal, July 1991


Stability of columns with a single crack subjected to follower and vertical loads
journal, January 1983


Scale bridging damage model for quasi-brittle metals informed with crack evolution statistics
journal, May 2020

  • Larkin, Kevin; Rougier, Esteban; Chau, Viet
  • Journal of the Mechanics and Physics of Solids, Vol. 138
  • DOI: 10.1016/j.jmps.2020.103921

Modeling and analysis of high-explosive driven perturbed plate experiments at Los Alamos
journal, May 2014


Significance of size dependent and material structure coupling on the characteristics and performance of nanocrystalline micro/nano gyroscopes
journal, May 2018

  • Larkin, K.; Ghommem, M.; Abdelkefi, A.
  • Physica E: Low-dimensional Systems and Nanostructures, Vol. 99
  • DOI: 10.1016/j.physe.2018.01.020

Effective Elastic Moduli of Two-Dimensional Brittle Solids With Interacting Microcracks, Part I: Basic Formulations
journal, June 1994

  • Ju, J. W.; Chen, Tsung-Muh
  • Journal of Applied Mechanics, Vol. 61, Issue 2
  • DOI: 10.1115/1.2901451

Effective Elastic Moduli of Two-Dimensional Brittle Solids With Interacting Microcracks, Part II: Evolutionary Damage Models
journal, June 1994

  • Ju, J. W.; Chen, Tsung-Muh
  • Journal of Applied Mechanics, Vol. 61, Issue 2
  • DOI: 10.1115/1.2901452

Statistically informed upscaling of damage evolution in brittle materials
journal, August 2019


Nonlinear size dependent analysis and effectiveness of nanocrystalline micro/nanogyroscopes
journal, March 2020


Griffith Criterion for Nanoscale Stress Singularity in Brittle Silicon
journal, May 2017


Static assessment of nanoscale notched silicon beams using the averaged strain energy density method
journal, June 2018

  • Gallo, Pasquale; Sumigawa, Takashi; Kitamura, Takayuki
  • Theoretical and Applied Fracture Mechanics, Vol. 95
  • DOI: 10.1016/j.tafmec.2018.03.007

Nonlinear modeling and performance analysis of cracked beam microgyroscopes
journal, December 2020