High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
Abstract
Integrating solid-state quantum emitters with nanophotonic resonators is essential for efficient spin-photon interfacing and optical networking applications. While diamond color centers have proven to be excellent candidates for emerging quantum technologies, their integration with optical resonators remains challenging. Conventional approaches based on etching resonators into diamond often negatively impact color center performance and offer low device yield. In this work, we developed an integrated photonics platform based on templated atomic layer deposition of TiO2 on diamond membranes. Our fabrication method yields high-performance nanophotonic devices while avoiding etching wavelength-scale features into diamond. Moreover, this technique generates highly reproducible optical resonances and can be iterated on individual diamond samples, a unique processing advantage. Our approach is suitable for a broad range of both wavelengths and substrates and can enable high-cooperativity interfacing between cavity photons and coherent defects in diamond or silicon carbide, rare earth ions, or other material systems.
- Authors:
-
[1];
[3];
- Univ. of Chicago, IL (United States)
- Argonne National Lab. (ANL), Lemont, IL (United States)
- Univ. of Chicago, IL (United States); Argonne National Lab. (ANL), Lemont, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- National Science Foundation (NSF); USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; Defense Advanced Research Projects Agency (DARPA); US Air Force Office of Scientific Research (AFOSR); Boeing
- OSTI Identifier:
- 1660383
- Grant/Contract Number:
- AC02-06CH11357; DMR-0820054; DGE-1746045
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nano Letters
- Additional Journal Information:
- Journal Volume: 20; Journal Issue: 6; Journal ID: ISSN 1530-6984
- Publisher:
- American Chemical Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; integrated photonics; atomic layer deposition; diamond membrane; microring resonator; photonic crystal cavity
Citation Formats
Butcher, Amy, Guo, Xinghan, Shreiner, Robert, Delegan, Nazar, Hao, Kai, Duda III, Peter J., Awschalom, David D., Heremans, F. Joseph, and High, Alexander A. High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2. United States: N. p., 2020.
Web. doi:10.1021/acs.nanolett.0c01467.
Butcher, Amy, Guo, Xinghan, Shreiner, Robert, Delegan, Nazar, Hao, Kai, Duda III, Peter J., Awschalom, David D., Heremans, F. Joseph, & High, Alexander A. High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2. United States. https://doi.org/10.1021/acs.nanolett.0c01467
Butcher, Amy, Guo, Xinghan, Shreiner, Robert, Delegan, Nazar, Hao, Kai, Duda III, Peter J., Awschalom, David D., Heremans, F. Joseph, and High, Alexander A. Fri .
"High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2". United States. https://doi.org/10.1021/acs.nanolett.0c01467. https://www.osti.gov/servlets/purl/1660383.
@article{osti_1660383,
title = {High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2},
author = {Butcher, Amy and Guo, Xinghan and Shreiner, Robert and Delegan, Nazar and Hao, Kai and Duda III, Peter J. and Awschalom, David D. and Heremans, F. Joseph and High, Alexander A.},
abstractNote = {Integrating solid-state quantum emitters with nanophotonic resonators is essential for efficient spin-photon interfacing and optical networking applications. While diamond color centers have proven to be excellent candidates for emerging quantum technologies, their integration with optical resonators remains challenging. Conventional approaches based on etching resonators into diamond often negatively impact color center performance and offer low device yield. In this work, we developed an integrated photonics platform based on templated atomic layer deposition of TiO2 on diamond membranes. Our fabrication method yields high-performance nanophotonic devices while avoiding etching wavelength-scale features into diamond. Moreover, this technique generates highly reproducible optical resonances and can be iterated on individual diamond samples, a unique processing advantage. Our approach is suitable for a broad range of both wavelengths and substrates and can enable high-cooperativity interfacing between cavity photons and coherent defects in diamond or silicon carbide, rare earth ions, or other material systems.},
doi = {10.1021/acs.nanolett.0c01467},
journal = {Nano Letters},
number = 6,
volume = 20,
place = {United States},
year = {Fri May 22 00:00:00 EDT 2020},
month = {Fri May 22 00:00:00 EDT 2020}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Cited by: 8 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Quantum technologies with optically interfaced solid-state spins
journal, August 2018
- Awschalom, David D.; Hanson, Ronald; Wrachtrup, Jörg
- Nature Photonics, Vol. 12, Issue 9
Resonance Absorption by Nuclear Magnetic Moments in a Solid
journal, January 1946
- Purcell, E. M.; Torrey, H. C.; Pound, R. V.
- Physical Review, Vol. 69, Issue 1-2, p. 37-38
Quantum nanophotonics in diamond [Invited]
journal, January 2016
- Schröder, Tim; Mouradian, Sara L.; Zheng, Jiabao
- Journal of the Optical Society of America B, Vol. 33, Issue 4
Free-Standing Mechanical and Photonic Nanostructures in Single-Crystal Diamond
journal, February 2012
- Burek, Michael J.; de Leon, Nathalie P.; Shields, Brendan J.
- Nano Letters, Vol. 12, Issue 12, p. 6084-6089
High quality-factor optical nanocavities in bulk single-crystal diamond
journal, December 2014
- Burek, Michael J.; Chu, Yiwen; Liddy, Madelaine S. Z.
- Nature Communications, Vol. 5, Issue 1
Fabrication of triangular nanobeam waveguide networks in bulk diamond using single-crystal silicon hard masks
journal, November 2014
- Bayn, I.; Mouradian, S.; Li, L.
- Applied Physics Letters, Vol. 105, Issue 21
Rectangular photonic crystal nanobeam cavities in bulk diamond
journal, July 2017
- Mouradian, Sara; Wan, Noel H.; Schröder, Tim
- Applied Physics Letters, Vol. 111, Issue 2
Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows
journal, April 2016
- Piracha, Afaq H.; Rath, Patrik; Ganesan, Kumaravelu
- Nano Letters, Vol. 16, Issue 5
Quantum photonic devices in single-crystal diamond
journal, February 2013
- Faraon, Andrei; Santori, Charles; Huang, Zhihong
- New Journal of Physics, Vol. 15, Issue 2
Integrated Diamond Networks for Quantum Nanophotonics
journal, February 2012
- Hausmann, Birgit J. M.; Shields, Brendan; Quan, Qimin
- Nano Letters, Vol. 12, Issue 3
Efficient Extraction of Zero-Phonon-Line Photons from Single Nitrogen-Vacancy Centers in an Integrated GaP-on-Diamond Platform
journal, July 2016
- Gould, Michael; Schmidgall, Emma R.; Dadgostar, Shabnam
- Physical Review Applied, Vol. 6, Issue 1
Frequency Control of Single Quantum Emitters in Integrated Photonic Circuits
journal, January 2018
- Schmidgall, Emma R.; Chakravarthi, Srivatsa; Gould, Michael
- Nano Letters, Vol. 18, Issue 2
Chip-based microcavities coupled to nitrogen-vacancy centers in single crystal diamond
journal, November 2009
- Barclay, Paul E.; Fu, Kai-Mei C.; Santori, Charles
- Applied Physics Letters, Vol. 95, Issue 19
Coherent spin control of a nanocavity-enhanced qubit in diamond
journal, January 2015
- Li, Luozhou; Schröder, Tim; Chen, Edward H.
- Nature Communications, Vol. 6, Issue 1
An integrated diamond nanophotonics platform for quantum-optical networks
journal, October 2016
- Sipahigil, A.; Evans, R. E.; Sukachev, D. D.
- Science, Vol. 354, Issue 6314
Probing Surface Noise with Depth-Calibrated Spins in Diamond
journal, July 2014
- Myers, B. A.; Das, A.; Dartiailh, M. C.
- Physical Review Letters, Vol. 113, Issue 2
Decoherence of Near-Surface Nitrogen-Vacancy Centers Due to Electric Field Noise
journal, August 2015
- Kim, M.; Mamin, H. J.; Sherwood, M. H.
- Physical Review Letters, Vol. 115, Issue 8
Origins of Diamond Surface Noise Probed by Correlating Single-Spin Measurements with Surface Spectroscopy
journal, September 2019
- Sangtawesin, Sorawis; Dwyer, Bo L.; Srinivasan, Srikanth
- Physical Review X, Vol. 9, Issue 3
Quantum Control over Single Spins in Diamond
journal, April 2013
- Dobrovitski, V. V.; Fuchs, G. D.; Falk, A. L.
- Annual Review of Condensed Matter Physics, Vol. 4, Issue 1
Electronic Structure of the Silicon Vacancy Color Center in Diamond
journal, January 2014
- Hepp, Christian; Müller, Tina; Waselowski, Victor
- Physical Review Letters, Vol. 112, Issue 3
Indistinguishable Photons from Separated Silicon-Vacancy Centers in Diamond
journal, September 2014
- Sipahigil, A.; Jahnke, K. D.; Rogers, L. J.
- Physical Review Letters, Vol. 113, Issue 11
Quantum Nonlinear Optics with a Germanium-Vacancy Color Center in a Nanoscale Diamond Waveguide
journal, May 2017
- Bhaskar, M. K.; Sukachev, D. D.; Sipahigil, A.
- Physical Review Letters, Vol. 118, Issue 22
Optical and microwave control of germanium-vacancy center spins in diamond
journal, August 2017
- Siyushev, Petr; Metsch, Mathias H.; Ijaz, Aroosa
- Physical Review B, Vol. 96, Issue 8
Tin-Vacancy Quantum Emitters in Diamond
journal, December 2017
- Iwasaki, Takayuki; Miyamoto, Yoshiyuki; Taniguchi, Takashi
- Physical Review Letters, Vol. 119, Issue 25
A theoretical analysis of scattering loss from planar optical waveguides
journal, October 1994
- Payne, F. P.; Lacey, J. P. R.
- Optical and Quantum Electronics, Vol. 26, Issue 10
Broadband high-efficiency dielectric metasurfaces for the visible spectrum
journal, September 2016
- Devlin, Robert C.; Khorasaninejad, Mohammadreza; Chen, Wei Ting
- Proceedings of the National Academy of Sciences, Vol. 113, Issue 38
Visible-frequency hyperbolic metasurface
journal, June 2015
- High, Alexander A.; Devlin, Robert C.; Dibos, Alan
- Nature, Vol. 522, Issue 7555
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
journal, June 2016
- Khorasaninejad, Mohammadreza; Chen, Wei Ting; Devlin, Robert C.
- Science, Vol. 352, Issue 6290
Integrated TiO_2 resonators for visible photonics
journal, January 2012
- Choy, Jennifer T.; Bradley, Jonathan D. B.; Deotare, Parag B.
- Optics Letters, Vol. 37, Issue 4
Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition
journal, August 1997
- Aarik, Jaan; Aidla, Aleks; Kiisler, Alma-Asta
- Thin Solid Films, Vol. 305, Issue 1-2
Silicon microring resonators
journal, September 2011
- Bogaerts, W.; De Heyn, P.; Van Vaerenbergh, T.
- Laser & Photonics Reviews, Vol. 6, Issue 1
Review Label-free detection with high-Q microcavities: a review of biosensing mechanisms for integrated devices
journal, January 2012
- Vollmer, Frank; Yang, Lan
- Nanophotonics, Vol. 1, Issue 3-4
Chiral Emission into Nanophotonic Resonators
journal, February 2019
- Martin-Cano, Diego; Haakh, Harald R.; Rotenberg, Nir
- ACS Photonics, Vol. 6, Issue 4
Fabrication of thin, luminescent, single-crystal diamond membranes
journal, August 2011
- Magyar, Andrew P.; Lee, Jonathan C.; Limarga, Andi M.
- Applied Physics Letters, Vol. 99, Issue 8
Facile Fabrication of Single-Crystal-Diamond Nanostructures with Ultrahigh Aspect Ratio
journal, June 2013
- Tao, Ye; Degen, Christian
- Advanced Materials, Vol. 25, Issue 29
Reproducible fabrication and characterization of diamond membranes for photonic crystal cavities: Reproducible fabrication and characterization of diamond membranes
journal, September 2016
- Jung, Thomas; Kreiner, Laura; Pauly, Christoph
- physica status solidi (a), Vol. 213, Issue 12
Strongly Cavity-Enhanced Spontaneous Emission from Silicon-Vacancy Centers in Diamond
journal, January 2018
- Zhang, Jingyuan Linda; Sun, Shuo; Burek, Michael J.
- Nano Letters, Vol. 18, Issue 2
Experimental demonstration of memory-enhanced quantum communication
journal, March 2020
- Bhaskar, M. K.; Riedinger, R.; Machielse, B.
- Nature, Vol. 580, Issue 7801
Scanning a photonic crystal slab nanocavity by condensation of xenon
journal, October 2005
- Mosor, S.; Hendrickson, J.; Richards, B. C.
- Applied Physics Letters, Vol. 87, Issue 14
Isolated electron spins in silicon carbide with millisecond coherence times
journal, December 2014
- Christle, David J.; Falk, Abram L.; Andrich, Paolo
- Nature Materials, Vol. 14, Issue 2
Coherent control of single spins in silicon carbide at room temperature
journal, December 2014
- Widmann, Matthias; Lee, Sang-Yun; Rendler, Torsten
- Nature Materials, Vol. 14, Issue 2
Purcell Enhancement of a Single Silicon Carbide Color Center with Coherent Spin Control
journal, March 2020
- Crook, Alexander L.; Anderson, Christopher P.; Miao, Kevin C.
- Nano Letters, Vol. 20, Issue 5
Emerging rare-earth doped material platforms for quantum nanophotonics
journal, September 2019
- Zhong, Tian; Goldner, Philippe
- Nanophotonics, Vol. 8, Issue 11