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Title: Understanding KO t Bu in atomic layer deposition – in situ mechanistic studies of the KNbO 3 growth process

Abstract

Providing a deeper understanding of alkali metal-containing ternary processes in ALD by in situ FT-IR and QCM mechanistic studies.

Authors:
ORCiD logo [1];  [2];  [2];  [3]; ORCiD logo [4];  [2]; ORCiD logo [2]
  1. Department of Chemistry, University of Oslo, Blindern, Norway, Argonne National Laboratory
  2. Department of Chemistry, University of Oslo, Blindern, Norway
  3. Argonne National Laboratory, Argonne, USA
  4. Argonne National Laboratory, Argonne, USA, Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont
Publication Date:
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1650407
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Dalton Transactions
Additional Journal Information:
Journal Name: Dalton Transactions Journal Volume: 49 Journal Issue: 38; Journal ID: ISSN 1477-9226
Publisher:
Royal Society of Chemistry (RSC)
Country of Publication:
United Kingdom
Language:
English

Citation Formats

Sønsteby, Henrik H., Killi, Veronica A. -L. K., Storaas, Thomas A., Choudhury, Devika, Elam, Jeffrey W., Fjellvåg, Helmer, and Nilsen, Ola. Understanding KO t Bu in atomic layer deposition – in situ mechanistic studies of the KNbO 3 growth process. United Kingdom: N. p., 2020. Web. https://doi.org/10.1039/D0DT02324H.
Sønsteby, Henrik H., Killi, Veronica A. -L. K., Storaas, Thomas A., Choudhury, Devika, Elam, Jeffrey W., Fjellvåg, Helmer, & Nilsen, Ola. Understanding KO t Bu in atomic layer deposition – in situ mechanistic studies of the KNbO 3 growth process. United Kingdom. https://doi.org/10.1039/D0DT02324H
Sønsteby, Henrik H., Killi, Veronica A. -L. K., Storaas, Thomas A., Choudhury, Devika, Elam, Jeffrey W., Fjellvåg, Helmer, and Nilsen, Ola. Tue . "Understanding KO t Bu in atomic layer deposition – in situ mechanistic studies of the KNbO 3 growth process". United Kingdom. https://doi.org/10.1039/D0DT02324H.
@article{osti_1650407,
title = {Understanding KO t Bu in atomic layer deposition – in situ mechanistic studies of the KNbO 3 growth process},
author = {Sønsteby, Henrik H. and Killi, Veronica A. -L. K. and Storaas, Thomas A. and Choudhury, Devika and Elam, Jeffrey W. and Fjellvåg, Helmer and Nilsen, Ola},
abstractNote = {Providing a deeper understanding of alkali metal-containing ternary processes in ALD by in situ FT-IR and QCM mechanistic studies.},
doi = {10.1039/D0DT02324H},
journal = {Dalton Transactions},
number = 38,
volume = 49,
place = {United Kingdom},
year = {2020},
month = {10}
}

Journal Article:
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