Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

Welch, Brian C.; McIntee, Olivia M.; Ode, Anand B.; McKenzie, Bonnie B.; Greenberg, Alan R.; Bright, Victor M.; George, Steven M.

doi:10.1116/6.0000271

Title: Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

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Authors:

^[1];

^[2]; McKenzie, Bonnie B. ^[3];

^[4];

^[1];

^[2]

Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
Department of Chemistry, University of Colorado, Boulder, Colorado 80309
Sandia National Laboratories, Albuquerque, New Mexico 87185
Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309, Membrane Science, Engineering and Technology Center, University of Colorado, Boulder, Colorado 80309

Publication Date:: 2020-09-01

Sponsoring Org.:: USDOE

OSTI Identifier:: 1650213

Grant/Contract Number:: EE0005771

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Vacuum Science and Technology A

Additional Journal Information:: Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 38 Journal Issue: 5; Journal ID: ISSN 0734-2101

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

Citation Formats


                    Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., and George, Steven M. Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition.  United States: N. p., 2020. 
Web.  doi:10.1116/6.0000271.

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                    Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., & George, Steven M. Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition.  United States.  https://doi.org/10.1116/6.0000271

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                    Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., and George, Steven M. Tue .  
"Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition".  United States.  https://doi.org/10.1116/6.0000271.

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@article{osti_1650213,

  title        = {Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition},

  author       = {Welch, Brian C. and McIntee, Olivia M. and Ode, Anand B. and McKenzie, Bonnie B. and Greenberg, Alan R. and Bright, Victor M. and George, Steven M.},

  abstractNote = {},

  doi          = {10.1116/6.0000271},

  journal      = {Journal of Vacuum Science and Technology A},

  number       = 5,

  volume       = 38,

  place        = {United States},

  year         = {2020},

  month        = {9}

}

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