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Title: Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition

Authors:
ORCiD logo [1]; ORCiD logo [1]; ORCiD logo [2];  [3]; ORCiD logo [4]; ORCiD logo [1]; ORCiD logo [2]
  1. Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309
  2. Department of Chemistry, University of Colorado, Boulder, Colorado 80309
  3. Sandia National Laboratories, Albuquerque, New Mexico 87185
  4. Department of Mechanical Engineering, University of Colorado, Boulder, Colorado 80309, Membrane Science, Engineering and Technology Center, University of Colorado, Boulder, Colorado 80309
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1650213
Grant/Contract Number:  
EE0005771
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology A
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 38 Journal Issue: 5; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Country of Publication:
United States
Language:
English

Citation Formats

Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., and George, Steven M. Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition. United States: N. p., 2020. Web. https://doi.org/10.1116/6.0000271.
Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., & George, Steven M. Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition. United States. https://doi.org/10.1116/6.0000271
Welch, Brian C., McIntee, Olivia M., Ode, Anand B., McKenzie, Bonnie B., Greenberg, Alan R., Bright, Victor M., and George, Steven M. Tue . "Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition". United States. https://doi.org/10.1116/6.0000271.
@article{osti_1650213,
title = {Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition},
author = {Welch, Brian C. and McIntee, Olivia M. and Ode, Anand B. and McKenzie, Bonnie B. and Greenberg, Alan R. and Bright, Victor M. and George, Steven M.},
abstractNote = {},
doi = {10.1116/6.0000271},
journal = {Journal of Vacuum Science and Technology A},
number = 5,
volume = 38,
place = {United States},
year = {2020},
month = {9}
}

Journal Article:
Free Publicly Available Full Text
This content will become publicly available on August 24, 2021
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