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Title: Mechanical properties of homogeneous and nitrogen graded TiN thin films


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Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., and Schön, Cláudio G. Mechanical properties of homogeneous and nitrogen graded TiN thin films. Netherlands: N. p., 2020. Web. https://doi.org/10.1016/j.tsf.2020.138268.
Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., & Schön, Cláudio G. Mechanical properties of homogeneous and nitrogen graded TiN thin films. Netherlands. https://doi.org/10.1016/j.tsf.2020.138268
Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., and Schön, Cláudio G. Tue . "Mechanical properties of homogeneous and nitrogen graded TiN thin films". Netherlands. https://doi.org/10.1016/j.tsf.2020.138268.
@article{osti_1647245,
title = {Mechanical properties of homogeneous and nitrogen graded TiN thin films},
author = {Silva, Felipe C. and Tunes, Matheus A. and Sagás, Julio C. and Fontana, Luis C. and de Lima, Nelson B. and Schön, Cláudio G.},
abstractNote = {},
doi = {10.1016/j.tsf.2020.138268},
journal = {Thin Solid Films},
number = C,
volume = 710,
place = {Netherlands},
year = {2020},
month = {9}
}

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