Mechanical properties of homogeneous and nitrogen graded TiN thin films

Silva, Felipe C.; Tunes, Matheus A.; Sagás, Julio C.; Fontana, Luis C.; de Lima, Nelson B.; Schön, Cláudio G.

doi:10.1016/j.tsf.2020.138268

Title: Mechanical properties of homogeneous and nitrogen graded TiN thin films

Authors:

;

; de Lima, Nelson B.;

Publication Date:: 2020-09-01

Sponsoring Org.:: USDOE

OSTI Identifier:: 1647245

Grant/Contract Number:: AC05-06OR23100

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Thin Solid Films

Additional Journal Information:: Journal Name: Thin Solid Films Journal Volume: 710 Journal Issue: C; Journal ID: ISSN 0040-6090

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

Citation Formats


                    Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., and Schön, Cláudio G. Mechanical properties of homogeneous and nitrogen graded TiN thin films.  Netherlands: N. p., 2020. 
Web.  doi:10.1016/j.tsf.2020.138268.

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                    Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., & Schön, Cláudio G. Mechanical properties of homogeneous and nitrogen graded TiN thin films.  Netherlands.  https://doi.org/10.1016/j.tsf.2020.138268

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                    Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Fontana, Luis C., de Lima, Nelson B., and Schön, Cláudio G. Tue .  
"Mechanical properties of homogeneous and nitrogen graded TiN thin films".  Netherlands.  https://doi.org/10.1016/j.tsf.2020.138268.

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@article{osti_1647245,

  title        = {Mechanical properties of homogeneous and nitrogen graded TiN thin films},

  author       = {Silva, Felipe C. and Tunes, Matheus A. and Sagás, Julio C. and Fontana, Luis C. and de Lima, Nelson B. and Schön, Cláudio G.},

  abstractNote = {},

  doi          = {10.1016/j.tsf.2020.138268},

  journal      = {Thin Solid Films},

  number       = C,

  volume       = 710,

  place        = {Netherlands},

  year         = {2020},

  month        = {9}

}

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Title: Mechanical properties of homogeneous and nitrogen graded TiN thin films

Citation Formats

The influence of metallic interlayers on the adhesion of PVD TiN coatings on high-speed steel journal, April 2008

The effect of steel substrate pre-hardening on structural, mechanical, and tribological properties of magnetron sputtered TiN and TiAlN coatings journal, April 2016

The performance of TiN-coated high speed steel tool inserts in turning journal, July 1999

Nano-scratch testing of (Ti,Fe)N x thin films on silicon journal, January 2017

Microstructure and mechanical properties of CVD TiN/TiBN multilayer coatings journal, July 2019

The effect of B and C addition on microstructure and mechanical properties of TiN hard coatings grown by chemical vapor deposition journal, October 2019

Effect of deposition conditions and post deposition anneal on reactively sputtered titanium nitride thin films journal, March 2015

Electrical and optical properties of titanium nitride coatings prepared by atmospheric pressure chemical vapor deposition journal, February 2008

Microstructural and electrochemical comparison between TiN coatings deposited through HIPIMS and DCMS techniques journal, February 2018

The effect of nitrogen content on the structure and mechanical properties of TiN films produced by magnetron sputtering journal, May 1996

TiN coating of tool steels: a review journal, October 1993

Ceramic coating for corrosion (c3) resistance of nuclear fuel cladding journal, November 2015

Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding journal, September 2016

Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels? journal, December 2018

Radiation resistance of thin TiN films as a result of irradiation with low-energy Kr14+ ions journal, April 2020

Morphology and Mechanical Properties of TiN Coatings Prepared with Different PVD Methods journal, December 2016

Magnetron sputtering: a review of recent developments and applications journal, March 2000

Characteristics of triode magnetron sputtering: the morphology of deposited titanium films journal, August 1998

Triode magnetron sputtering TiN film deposition journal, April 1999

Influence of electromagnetic confinement on the characteristics of a triode magnetron sputtering system journal, January 2011

Effect of oxygen concentration and system geometry on the current–voltage relations during reactive sputter deposition of titanium dioxide thin films journal, April 2011

Unusual behaviour of current–voltage relations in an unbalanced grid-assisted magnetron sputtering system journal, November 2012

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System journal, October 2017

Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system journal, December 2011

X-ray residual stress measurement in TiN, ZrN and HfN films using the Seemann-Bohlin method journal, July 1992

Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering journal, January 2006

Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition journal, July 2010

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films journal, April 2020

Influence, of Ti Intermediate Layer on Properties of Tin Coatings Deposited on Various Substrates journal, January 1989

Initial growth and epitaxy of PVD TiN layers on austenitic steel journal, June 1989

Interface study of TiN- and TiTiN-coated stainless steel AISI 304 with asymmetric glancing angle X-ray diffraction and classical Bragg-Brentano X-ray diffraction journal, March 1991

Tutorial: Hysteresis during the reactive magnetron sputtering process journal, December 2018

On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation journal, March 1992

Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate journal, February 2009

Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films journal, January 2018

Measurement of the ultimate shear strength of a metal-ceramic interface journal, April 1989

Evaluation of the adhesion strength in DLC film-coated systems using the film-cracking technique journal, January 1998

Measurement of mechanical properties by ultra-low load indentation journal, September 1998

A study on friction coefficient and wear coefficient of coated systems submitted to micro-scale abrasion tests journal, January 2013

Relationships between hardness, Young's modulus and elastic recovery in hard nanocomposite coatings journal, May 2002

The influence of metallic interlayers on the adhesion of PVD TiN coatings on high-speed steel
journal, April 2008

The effect of steel substrate pre-hardening on structural, mechanical, and tribological properties of magnetron sputtered TiN and TiAlN coatings
journal, April 2016

The performance of TiN-coated high speed steel tool inserts in turning
journal, July 1999

Nano-scratch testing of (Ti,Fe)N x thin films on silicon
journal, January 2017

Microstructure and mechanical properties of CVD TiN/TiBN multilayer coatings
journal, July 2019

The effect of B and C addition on microstructure and mechanical properties of TiN hard coatings grown by chemical vapor deposition
journal, October 2019

Effect of deposition conditions and post deposition anneal on reactively sputtered titanium nitride thin films
journal, March 2015

Electrical and optical properties of titanium nitride coatings prepared by atmospheric pressure chemical vapor deposition
journal, February 2008

Microstructural and electrochemical comparison between TiN coatings deposited through HIPIMS and DCMS techniques
journal, February 2018

The effect of nitrogen content on the structure and mechanical properties of TiN films produced by magnetron sputtering
journal, May 1996

TiN coating of tool steels: a review
journal, October 1993

Ceramic coating for corrosion (c3) resistance of nuclear fuel cladding
journal, November 2015

Multilayer (TiN, TiAlN) ceramic coatings for nuclear fuel cladding
journal, September 2016

Energetic particle irradiation study of TiN coatings: are these films appropriate for accident tolerant fuels?
journal, December 2018

Radiation resistance of thin TiN films as a result of irradiation with low-energy Kr14+ ions
journal, April 2020

Morphology and Mechanical Properties of TiN Coatings Prepared with Different PVD Methods
journal, December 2016

Magnetron sputtering: a review of recent developments and applications
journal, March 2000

Characteristics of triode magnetron sputtering: the morphology of deposited titanium films
journal, August 1998

Triode magnetron sputtering TiN film deposition
journal, April 1999

Influence of electromagnetic confinement on the characteristics of a triode magnetron sputtering system
journal, January 2011

Effect of oxygen concentration and system geometry on the current–voltage relations during reactive sputter deposition of titanium dioxide thin films
journal, April 2011

Unusual behaviour of current–voltage relations in an unbalanced grid-assisted magnetron sputtering system
journal, November 2012

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System
journal, October 2017

Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system
journal, December 2011

X-ray residual stress measurement in TiN, ZrN and HfN films using the Seemann-Bohlin method
journal, July 1992

Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering
journal, January 2006

Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition
journal, July 2010

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
journal, April 2020

Influence, of Ti Intermediate Layer on Properties of Tin Coatings Deposited on Various Substrates
journal, January 1989

Initial growth and epitaxy of PVD TiN layers on austenitic steel
journal, June 1989

Interface study of TiN- and TiTiN-coated stainless steel AISI 304 with asymmetric glancing angle X-ray diffraction and classical Bragg-Brentano X-ray diffraction
journal, March 1991

Tutorial: Hysteresis during the reactive magnetron sputtering process
journal, December 2018

On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentation
journal, March 1992

Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate
journal, February 2009

Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films
journal, January 2018

Measurement of the ultimate shear strength of a metal-ceramic interface
journal, April 1989

Evaluation of the adhesion strength in DLC film-coated systems using the film-cracking technique
journal, January 1998

Measurement of mechanical properties by ultra-low load indentation
journal, September 1998

A study on friction coefficient and wear coefficient of coated systems submitted to micro-scale abrasion tests
journal, January 2013

Relationships between hardness, Young's modulus and elastic recovery in hard nanocomposite coatings
journal, May 2002