Microengineering Pressure Sensor Active Layers for Improved Performance

Ruth, Sara Rachel Arussy; Feig, Vivian Rachel; Tran, Helen; Bao, Zhenan

doi:10.1002/adfm.202003491

Title: Microengineering Pressure Sensor Active Layers for Improved Performance

Journal Article · 09 August 2020 · Advanced Functional Materials

DOI: https://doi.org/10.1002/adfm.202003491 · OSTI ID:1646922

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Department of Chemical Engineering Stanford University Stanford CA 94305 USA
Department of Material Science and Engineering Stanford University Stanford CA 94305 USA

Abstract Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer—the layer that deforms under pressure and dictates changes in the output signal—of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae, microspheres, micropores, and microcylinders, each offering different advantages for a particular application. It is important to compare the techniques by which the microengineered active layers are designed and fabricated as they may provide additional insights on compatibility and sensing range limits. To evaluate each fabrication method, it is critical to take into account the active layer uniformity, ease of fabrication, shape and size versatility and tunability, and scalability of both the device and the fabrication process. By better understanding how microengineering techniques and design compares, pressure sensors can be targetedly designed and implemented.

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Sponsoring Organization:: USDOE

OSTI ID:: 1646922

Journal Information:: Advanced Functional Materials, Journal Name: Advanced Functional Materials Journal Issue: 39 Vol. 30; ISSN 1616-301X

Publisher:: Wiley Blackwell (John Wiley & Sons)Copyright Statement

Country of Publication:: Germany

Language:: English

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