Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions

Donald, Scott B.; Stanford, Jeff A.; Gollott, Rory T.; Roberts, David J.; Nelson, Art J.; McLean, W.

doi:10.1116/6.0000301

Title: Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions

Abstract

An oxide layer with a known thickness and chemistry was grown on delta stabilized Pu and sputtered with 1–5 keV Ar+ ions over a range of incident ion angle between 22° and 72°. From the time required to remove the oxide layer, sputter yields of PuO2 were calculated. The sputter yields appear to increase with higher Ar+ ion beam energy in the range of 1–5 keV at an incident sputter ion angle of 42° and were found to increase with a decreasing angle of incidence up to 62°. The degree of oxide reduction induced during the sputter process was found to vary with the incident sputter ion angle.

Authors:: Donald, Scott B.; Stanford, Jeff A.; Gollott, Rory T.; Roberts, David J.; Nelson, Art J.; McLean, W.

Publication Date:: Mon Jul 27 00:00:00 EDT 2020

Sponsoring Org.:: USDOE

OSTI Identifier:: 1643193

Grant/Contract Number:: AC52-07NA27344

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Vacuum Science and Technology A

Additional Journal Information:: Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 38 Journal Issue: 5; Journal ID: ISSN 0734-2101

Publisher:: American Vacuum Society

Country of Publication:: United States

Language:: English

Citation Formats


                    Donald, Scott B., Stanford, Jeff A., Gollott, Rory T., Roberts, David J., Nelson, Art J., and McLean, W. Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions.  United States: N. p., 2020. 
Web.  doi:10.1116/6.0000301.

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                    Donald, Scott B., Stanford, Jeff A., Gollott, Rory T., Roberts, David J., Nelson, Art J., & McLean, W. Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions.  United States.  https://doi.org/10.1116/6.0000301

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                    Donald, Scott B., Stanford, Jeff A., Gollott, Rory T., Roberts, David J., Nelson, Art J., and McLean, W. Mon .  
"Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions".  United States.  https://doi.org/10.1116/6.0000301.

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@article{osti_1643193,

  title        = {Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions},

  author       = {Donald, Scott B. and Stanford, Jeff A. and Gollott, Rory T. and Roberts, David J. and Nelson, Art J. and McLean, W.},

  abstractNote = {An oxide layer with a known thickness and chemistry was grown on delta stabilized Pu and sputtered with 1–5 keV Ar+ ions over a range of incident ion angle between 22° and 72°. From the time required to remove the oxide layer, sputter yields of PuO2 were calculated. The sputter yields appear to increase with higher Ar+ ion beam energy in the range of 1–5 keV at an incident sputter ion angle of 42° and were found to increase with a decreasing angle of incidence up to 62°. The degree of oxide reduction induced during the sputter process was found to vary with the incident sputter ion angle.},

  doi          = {10.1116/6.0000301},

  journal      = {Journal of Vacuum Science and Technology A},

  number       = 5,

  volume       = 38,

  place        = {United States},

  year         = {Mon Jul 27 00:00:00 EDT 2020},

  month        = {Mon Jul 27 00:00:00 EDT 2020}

}

Copy to clipboard

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Works referenced in this record:

Sputtering yields
journal, May 2008

Eckstein, W.
Vacuum, Vol. 82, Issue 9
DOI: 10.1016/j.vacuum.2007.12.004

Collection and sputtering experiments with noble gas ions
journal, January 1961

Almén, O.; Bruce, G.
Nuclear Instruments and Methods, Vol. 11
DOI: 10.1016/0029-554X(61)90026-X

Influence of the Angle of Incidence on Sputtering Yields
journal, November 1959

Wehner, Gottfried
Journal of Applied Physics, Vol. 30, Issue 11
DOI: 10.1063/1.1735051

Reaction kinetics for the high temperature oxidation of Pu-1wt.%Ga in water vapor
journal, March 1990

Stakebake, Jerry L.; Saba, Mark A.
Journal of the Less Common Metals, Vol. 158, Issue 2
DOI: 10.1016/0022-5088(90)90058-R

New insight into δ-Pu alloy oxidation kinetics highlighted by using in-situ X-ray diffraction coupled with an original Rietveld refinement method
journal, July 2018

Ravat, B.; Jolly, L.; Oudot, B.
Corrosion Science, Vol. 138
DOI: 10.1016/j.corsci.2018.03.046

Depth of origin of sputtered atoms: Experimental and theoretical study of Cu/Ru(0001)
journal, May 1988

Burnett, J. W.; Biersack, J. P.; Gruen, D. M.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 3
DOI: 10.1116/1.575604

Altered layer formation and sputtering yields for 5 keV Ar+ bombardment of MoO3 and WO3
journal, September 1987

Driscoll, T. J.; McCormick, L. D.; Lederer, W. C.
Surface Science, Vol. 187, Issue 2-3
DOI: 10.1016/S0039-6028(87)80074-2

Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
journal, February 1985

Zalar, A.
Thin Solid Films, Vol. 124, Issue 3-4
DOI: 10.1016/0040-6090(85)90269-X

Sputtering and surface topography of oxides
journal, March 1990

Nenadović, T.; Perraillon, B.; Bogdanov, Ž.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 48, Issue 1-4
DOI: 10.1016/0168-583X(90)90178-W

Does preferential sputtering depend on the angle of incidence?
journal, October 1985

Baretzky, B.; Taglauer, E.
Surface Science, Vol. 162, Issue 1-3
DOI: 10.1016/0039-6028(85)91012-X

X-ray photoelectron spectroscopic studies of PbO surfaces bombarded with He+, Ne+, Ar+, Xe+ and Kr+
journal, April 1976

Kim, K. S.; Baitinger, W. E.; Winograd, N.
Surface Science, Vol. 55, Issue 1
DOI: 10.1016/0039-6028(76)90390-3

Measurement of PuO2 film thickness by electron probe microanalysis (EPMA) calibration curve method
journal, March 2020

Stanford, J. A.; Teslich, N.; Donald, S.
Journal of Nuclear Materials, Vol. 530
DOI: 10.1016/j.jnucmat.2019.151968

Characterization and stability of thin oxide films on plutonium surfaces
journal, February 2011

Flores, H. G. García; Roussel, P.; Moore, D. P.
Surface Science, Vol. 605, Issue 3-4
DOI: 10.1016/j.susc.2010.10.034

Oxidation kinetics of plutonium in air: consequences for environmental dispersal
journal, June 1998

Haschke, John M.; Allen, Thomas H.; Martz, Joseph C.
Journal of Alloys and Compounds, Vol. 271-273
DOI: 10.1016/S0925-8388(98)00056-5

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
journal, August 1969

Sigmund, Peter
Physical Review, Vol. 184, Issue 2
DOI: 10.1103/PhysRev.184.383

Energy Dependence of Ion-Induced Sputtering Yields from Monatomic Solids at Normal Incidence
journal, March 1996

Yamamura, Yasunori; Tawara, Hiro
Atomic Data and Nuclear Data Tables, Vol. 62, Issue 2
DOI: 10.1006/adnd.1996.0005

Formulation for XPS spectral change of oxides by ion bombardment as a function of sputtering time
journal, May 2004

Hashimoto, Satoshi; Tanaka, Akihiro; Murata, Aki
Surface Science, Vol. 556, Issue 1
DOI: 10.1016/j.susc.2004.03.002

First-principles explorations of the universal picture of oxide layer structure over metallic plutonium
journal, June 2019

Ao, Bingyun; Qiu, Ruizhi
Corrosion Science, Vol. 153
DOI: 10.1016/j.corsci.2019.03.047

Sputtering Yields for Low Energy He ⁺ ‐, Kr ⁺ ‐, and Xe ⁺ ‐Ion Bombardment
journal, May 1962

Rosenberg, D.; Wehner, G. K.
Journal of Applied Physics, Vol. 33, Issue 5
DOI: 10.1063/1.1728843

The kinetics and oxygen pressure dependence of the high temperature oxidation of Pu-1wt.%Ga
journal, January 1988

Stakebake, Jerry L.; Lewis, Lloyd A.
Journal of the Less Common Metals, Vol. 136, Issue 2
DOI: 10.1016/0022-5088(88)90438-9

Low energy electron diffraction and electron spectroscopy studies of the clean (110) and (100) titanium dioxide (rutile) crystal surfaces
journal, May 1977

Chung, Y. W.; Lo, W. J.; Somorjai, G. A.
Surface Science, Vol. 64, Issue 2
DOI: 10.1016/0039-6028(77)90064-4

Photoemission of surface oxides and hydrides of delta plutonium
journal, November 2004

Butterfield, M. T.; Durakiewicz, T.; Guziewicz, E.
Surface Science, Vol. 571, Issue 1-3
DOI: 10.1016/j.susc.2004.07.054

AES and XPS study of plutonium oxidation
journal, January 1980

Larson, D. T.
Journal of Vacuum Science and Technology, Vol. 17, Issue 1
DOI: 10.1116/1.570503

Preferential sputtering of compounds due to light ion bombardment
journal, November 1982

Varga, P.; Taglauer, E.
Journal of Nuclear Materials, Vol. 111-112
DOI: 10.1016/0022-3115(82)90296-3

ESCA studies of metal-oxygen surfaces using argon and oxygen ion-bombardment
journal, January 1974

Kim, K. S.; Baitinger, W. E.; Amy, J. W.
Journal of Electron Spectroscopy and Related Phenomena, Vol. 5, Issue 1
DOI: 10.1016/0368-2048(74)85023-1

A comparison of hybrid density functional theory with photoemission of surface oxides of δ-plutonium
journal, April 2006

Butterfield, M. T.; Durakiewicz, T.; Prodan, I. D.
Surface Science, Vol. 600, Issue 8
DOI: 10.1016/j.susc.2005.11.051

Hydrothermal Solutions
journal, November 1982

Tödheide, K.
Berichte der Bunsengesellschaft für physikalische Chemie, Vol. 86, Issue 11
DOI: 10.1002/bbpc.198200007

Sputtering Yields of Metals for Ar ⁺ and Ne ⁺ Ions with Energies from 50 to 600 ev
journal, March 1961

Laegreid, Nils; Wehner, G. K.
Journal of Applied Physics, Vol. 32, Issue 3
DOI: 10.1063/1.1736012

Confirmation of sample quality: X-ray and ultraviolet photoelectron spectroscopies of uranium dioxide
journal, March 2011

Yu, S. -W.; Tobin, J. G.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 29, Issue 2
DOI: 10.1116/1.3549118

Composition changes in bombarded oxides and carbides: the distinction between ballistic, chemically guided, and chemically random behavior
journal, January 1993

Kelly, Roger; Bertóti, Imre; Miotello, Antonio
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 80-81
DOI: 10.1016/0168-583X(93)90755-U

Application of linear least squares to the analysis of Auger electron spectroscopy depth profiles of plutonium oxides
journal, May 2018

Donald, Scott B.; Stanford, Jeff A.; McLean, William
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 36, Issue 3
DOI: 10.1116/1.5021587

Angular resolved x-ray photoemission study of defects induced by ion bombardment on the TiO2 surface
journal, August 1988

Bardi, U.; Tamura, K.; Owari, M.
Applied Surface Science, Vol. 32, Issue 4
DOI: 10.1016/0169-4332(88)90087-6

Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2
journal, September 2010

Baer, D. R.; Engelhard, M. H.; Lea, A. S.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 28, Issue 5
DOI: 10.1116/1.3456123

Smoothing and Differentiation of Data by Simplified Least Squares Procedures.
journal, July 1964

Savitzky, Abraham.; Golay, M. J. E.
Analytical Chemistry, Vol. 36, Issue 8
DOI: 10.1021/ac60214a047

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Similar Records

Title: Variation in plutonium dioxide sputter yields for 1–5 keV Ar+ ions

Abstract

Citation Formats

Sputtering yields journal, May 2008

Collection and sputtering experiments with noble gas ions journal, January 1961

Influence of the Angle of Incidence on Sputtering Yields journal, November 1959

Reaction kinetics for the high temperature oxidation of Pu-1wt.%Ga in water vapor journal, March 1990

New insight into δ-Pu alloy oxidation kinetics highlighted by using in-situ X-ray diffraction coupled with an original Rietveld refinement method journal, July 2018

Depth of origin of sputtered atoms: Experimental and theoretical study of Cu/Ru(0001) journal, May 1988

Altered layer formation and sputtering yields for 5 keV Ar+ bombardment of MoO3 and WO3 journal, September 1987

Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling journal, February 1985

Sputtering and surface topography of oxides journal, March 1990

Does preferential sputtering depend on the angle of incidence? journal, October 1985

X-ray photoelectron spectroscopic studies of PbO surfaces bombarded with He+, Ne+, Ar+, Xe+ and Kr+ journal, April 1976

Measurement of PuO2 film thickness by electron probe microanalysis (EPMA) calibration curve method journal, March 2020

Characterization and stability of thin oxide films on plutonium surfaces journal, February 2011

Oxidation kinetics of plutonium in air: consequences for environmental dispersal journal, June 1998

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets journal, August 1969

Energy Dependence of Ion-Induced Sputtering Yields from Monatomic Solids at Normal Incidence journal, March 1996

Formulation for XPS spectral change of oxides by ion bombardment as a function of sputtering time journal, May 2004

First-principles explorations of the universal picture of oxide layer structure over metallic plutonium journal, June 2019

Sputtering Yields for Low Energy He + ‐, Kr + ‐, and Xe + ‐Ion Bombardment journal, May 1962

The kinetics and oxygen pressure dependence of the high temperature oxidation of Pu-1wt.%Ga journal, January 1988

Low energy electron diffraction and electron spectroscopy studies of the clean (110) and (100) titanium dioxide (rutile) crystal surfaces journal, May 1977

Photoemission of surface oxides and hydrides of delta plutonium journal, November 2004

AES and XPS study of plutonium oxidation journal, January 1980

Preferential sputtering of compounds due to light ion bombardment journal, November 1982

ESCA studies of metal-oxygen surfaces using argon and oxygen ion-bombardment journal, January 1974

A comparison of hybrid density functional theory with photoemission of surface oxides of δ-plutonium journal, April 2006

Hydrothermal Solutions journal, November 1982

Sputtering Yields of Metals for Ar + and Ne + Ions with Energies from 50 to 600 ev journal, March 1961

Confirmation of sample quality: X-ray and ultraviolet photoelectron spectroscopies of uranium dioxide journal, March 2011

Composition changes in bombarded oxides and carbides: the distinction between ballistic, chemically guided, and chemically random behavior journal, January 1993

Application of linear least squares to the analysis of Auger electron spectroscopy depth profiles of plutonium oxides journal, May 2018

Angular resolved x-ray photoemission study of defects induced by ion bombardment on the TiO2 surface journal, August 1988

Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2 journal, September 2010

Smoothing and Differentiation of Data by Simplified Least Squares Procedures. journal, July 1964

Sputtering yields
journal, May 2008

Collection and sputtering experiments with noble gas ions
journal, January 1961

Influence of the Angle of Incidence on Sputtering Yields
journal, November 1959

Reaction kinetics for the high temperature oxidation of Pu-1wt.%Ga in water vapor
journal, March 1990

New insight into δ-Pu alloy oxidation kinetics highlighted by using in-situ X-ray diffraction coupled with an original Rietveld refinement method
journal, July 2018

Depth of origin of sputtered atoms: Experimental and theoretical study of Cu/Ru(0001)
journal, May 1988

Altered layer formation and sputtering yields for 5 keV Ar+ bombardment of MoO3 and WO3
journal, September 1987

Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
journal, February 1985

Sputtering and surface topography of oxides
journal, March 1990

Does preferential sputtering depend on the angle of incidence?
journal, October 1985

X-ray photoelectron spectroscopic studies of PbO surfaces bombarded with He+, Ne+, Ar+, Xe+ and Kr+
journal, April 1976

Measurement of PuO2 film thickness by electron probe microanalysis (EPMA) calibration curve method
journal, March 2020

Characterization and stability of thin oxide films on plutonium surfaces
journal, February 2011

Oxidation kinetics of plutonium in air: consequences for environmental dispersal
journal, June 1998

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
journal, August 1969

Energy Dependence of Ion-Induced Sputtering Yields from Monatomic Solids at Normal Incidence
journal, March 1996

Formulation for XPS spectral change of oxides by ion bombardment as a function of sputtering time
journal, May 2004

First-principles explorations of the universal picture of oxide layer structure over metallic plutonium
journal, June 2019

Sputtering Yields for Low Energy He ⁺ ‐, Kr ⁺ ‐, and Xe ⁺ ‐Ion Bombardment
journal, May 1962

The kinetics and oxygen pressure dependence of the high temperature oxidation of Pu-1wt.%Ga
journal, January 1988

Low energy electron diffraction and electron spectroscopy studies of the clean (110) and (100) titanium dioxide (rutile) crystal surfaces
journal, May 1977

Photoemission of surface oxides and hydrides of delta plutonium
journal, November 2004

AES and XPS study of plutonium oxidation
journal, January 1980

Preferential sputtering of compounds due to light ion bombardment
journal, November 1982

ESCA studies of metal-oxygen surfaces using argon and oxygen ion-bombardment
journal, January 1974

A comparison of hybrid density functional theory with photoemission of surface oxides of δ-plutonium
journal, April 2006

Hydrothermal Solutions
journal, November 1982

Sputtering Yields of Metals for Ar ⁺ and Ne ⁺ Ions with Energies from 50 to 600 ev
journal, March 1961

Confirmation of sample quality: X-ray and ultraviolet photoelectron spectroscopies of uranium dioxide
journal, March 2011

Composition changes in bombarded oxides and carbides: the distinction between ballistic, chemically guided, and chemically random behavior
journal, January 1993

Application of linear least squares to the analysis of Auger electron spectroscopy depth profiles of plutonium oxides
journal, May 2018

Angular resolved x-ray photoemission study of defects induced by ion bombardment on the TiO2 surface
journal, August 1988

Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2
journal, September 2010

Smoothing and Differentiation of Data by Simplified Least Squares Procedures.
journal, July 1964