DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu–Fe thin films

Abstract

Bicontinuous, nanocomposite thin film morphologies depend largely on the deposition conditions applied during physical vapor deposition. With the introduction of high power impulse magnetron sputtering (HiPIMS), the range of potential morphologies achieved during deposition has been increased. In this work, we compare the deposition outcomes between traditional direct-current magnetron sputtering (DCMS) and HiPIMS for a thin film co deposit of Cu and Fe. Modular control of the columnarity, porosity and roughness was achieved by varying the Cu and Fe metal ion currents during deposition. The directionality of the nanostructured phase-separated morphology was also controlled as the ion current increased. At zero ion current for both Cu and Fe sputtered species during DCMS, the film exhibited lateral concentration modulations of Cu and Fe. The directionality of the Cu- and Fe-rich phases shifted to vertical concentration modulations at low ion currents of IFe = 1A and ICu = 0:1A and to lateral concentration modulations at relatively moderate ion currents of IFe = 5A and ICu = 2A: At high ion currents of IFe = 18A and ICu = 2A; a more randomized phase domain structure was observed on the nanoscale. This structural shift is rationalized using an interdiffusion model. Here, the rolemore » of different kinds of phase separated morphologies, achieved during DCMS deposition, on the mechanical properties has also been studied. Results indicated increase in hardness, indentation modulus and flow strength values with the increase in indentation strain rates. Bicontinuous Cu-Fe nanocomposites are found to be stronger than multilayer Cu-Fe samples.« less

Authors:
ORCiD logo [1];  [1];  [1]
  1. Univ. of Michigan, Ann Arbor, MI (United States)
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1639910
Alternate Identifier(s):
OSTI ID: 1638901
Grant/Contract Number:  
NA0003857
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 128; Journal Issue: 3; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Physical vapor deposition; sputter deposition; surface physics; nano-indentation; phase transitions; ions and properties; thin films; magnetron sputtering; nanocomposites

Citation Formats

Derby, Benjamin K., Chatterjee, Arya, and Misra, Amit. Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu–Fe thin films. United States: N. p., 2020. Web. doi:10.1063/5.0014441.
Derby, Benjamin K., Chatterjee, Arya, & Misra, Amit. Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu–Fe thin films. United States. https://doi.org/10.1063/5.0014441
Derby, Benjamin K., Chatterjee, Arya, and Misra, Amit. Fri . "Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu–Fe thin films". United States. https://doi.org/10.1063/5.0014441. https://www.osti.gov/servlets/purl/1639910.
@article{osti_1639910,
title = {Metal-ion-controlled growth and nanoindentation response of 3D, bicontinuous Cu–Fe thin films},
author = {Derby, Benjamin K. and Chatterjee, Arya and Misra, Amit},
abstractNote = {Bicontinuous, nanocomposite thin film morphologies depend largely on the deposition conditions applied during physical vapor deposition. With the introduction of high power impulse magnetron sputtering (HiPIMS), the range of potential morphologies achieved during deposition has been increased. In this work, we compare the deposition outcomes between traditional direct-current magnetron sputtering (DCMS) and HiPIMS for a thin film co deposit of Cu and Fe. Modular control of the columnarity, porosity and roughness was achieved by varying the Cu and Fe metal ion currents during deposition. The directionality of the nanostructured phase-separated morphology was also controlled as the ion current increased. At zero ion current for both Cu and Fe sputtered species during DCMS, the film exhibited lateral concentration modulations of Cu and Fe. The directionality of the Cu- and Fe-rich phases shifted to vertical concentration modulations at low ion currents of IFe = 1A and ICu = 0:1A and to lateral concentration modulations at relatively moderate ion currents of IFe = 5A and ICu = 2A: At high ion currents of IFe = 18A and ICu = 2A; a more randomized phase domain structure was observed on the nanoscale. This structural shift is rationalized using an interdiffusion model. Here, the role of different kinds of phase separated morphologies, achieved during DCMS deposition, on the mechanical properties has also been studied. Results indicated increase in hardness, indentation modulus and flow strength values with the increase in indentation strain rates. Bicontinuous Cu-Fe nanocomposites are found to be stronger than multilayer Cu-Fe samples.},
doi = {10.1063/5.0014441},
journal = {Journal of Applied Physics},
number = 3,
volume = 128,
place = {United States},
year = {Fri Jul 17 00:00:00 EDT 2020},
month = {Fri Jul 17 00:00:00 EDT 2020}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 6 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Average energy deposited per atom: A universal parameter for describing ion‐assisted film growth?
journal, July 1993

  • Petrov, I.; Adibi, F.; Greene, J. E.
  • Applied Physics Letters, Vol. 63, Issue 1
  • DOI: 10.1063/1.109742

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
journal, February 2010


Phase separation during film growth
journal, July 1992

  • Atzmon, M.; Kessler, D. A.; Srolovitz, D. J.
  • Journal of Applied Physics, Vol. 72, Issue 2
  • DOI: 10.1063/1.351872

Mechanical properties of thin films
journal, November 1989


Fundamental structure forming phenomena of polycrystalline films and the structure zone models
journal, April 1998


Plasma dynamics in a highly ionized pulsed magnetron discharge
journal, June 2005

  • Alami, J.; Gudmundsson, J. T.; Bohlmark, J.
  • Plasma Sources Science and Technology, Vol. 14, Issue 3
  • DOI: 10.1088/0963-0252/14/3/015

A molecular dynamics study of nickel vapor deposition: Temperature, incident angle, and adatom energy effects
journal, April 1997


Processing of novel pseudomorphic Cu–Mo hierarchies in thin films
journal, November 2018


Structure formation in Ag-X (X = Au, Cu) alloys synthesized far-from-equilibrium
journal, April 2018

  • Elofsson, V.; Almyras, G. A.; Lü, B.
  • Journal of Applied Physics, Vol. 123, Issue 16
  • DOI: 10.1063/1.5018907

Mechanical behavior of nanocomposites
journal, January 2019


A structure zone diagram including plasma-based deposition and ion etching
journal, May 2010


Revealing the Maximum Strength in Nanotwinned Copper
journal, January 2009


Stress and microstructure of sputter‐deposited thin films: Molecular dynamics investigations
journal, September 1987

  • Müller, Karl‐Heinz
  • Journal of Applied Physics, Vol. 62, Issue 5
  • DOI: 10.1063/1.339559

An overview of interface-dominated deformation mechanisms in metallic nanocomposites elucidated using in situ straining in a TEM
journal, March 2019

  • Cui, Yuchi; Li, Nan; Misra, Amit
  • Journal of Materials Research, Vol. 34, Issue 9
  • DOI: 10.1557/jmr.2019.66

Phase separation during co-deposition of Al–Ge thin films
journal, March 1992

  • Adams, C. D.; Atzmon, M.; Cheng, Y-T.
  • Journal of Materials Research, Vol. 7, Issue 3
  • DOI: 10.1557/JMR.1992.0653

In-situ monitoring of the electronic properties and growth evolution of TiN films
journal, March 2004


Deformation of nanocrystalline materials by molecular-dynamics simulation: relationship to experiments?
journal, January 2005


3-D phase-field simulations of self-organized composite morphologies in physical vapor deposited phase-separating binary alloys
journal, August 2019

  • Ankit, Kumar; Derby, Benjamin; Raghavan, Rahul
  • Journal of Applied Physics, Vol. 126, Issue 7
  • DOI: 10.1063/1.5110410

An introduction to thin film processing using high-power impulse magnetron sputtering
journal, February 2012

  • Lundin, Daniel; Sarakinos, Kostas
  • Journal of Materials Research, Vol. 27, Issue 5
  • DOI: 10.1557/jmr.2012.8

Formation of misfit dislocations in nanoscale Ni–Cu bilayer films
journal, March 2004


Atomic arrangement in immiscible Ag–Cu alloys synthesized far-from-equilibrium
journal, May 2016


Theoretical and experimental study of metastable solid solutions and phase stability within the immiscible Ag-Mo binary system
journal, March 2016

  • Sarakinos, K.; Greczynski, G.; Elofsson, V.
  • Journal of Applied Physics, Vol. 119, Issue 9
  • DOI: 10.1063/1.4942840

A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
journal, October 2014


Interactions between glide dislocations and parallel interfacial dislocations in nanoscale strained layers
journal, August 2007

  • Akasheh, F.; Zbib, H. M.; Hirth, J. P.
  • Journal of Applied Physics, Vol. 102, Issue 3
  • DOI: 10.1063/1.2757082

Interface microstructure engineering by high power impulse magnetron sputtering for the enhancement of adhesion
journal, March 2007

  • Ehiasarian, A. P.; Wen, J. G.; Petrov, I.
  • Journal of Applied Physics, Vol. 101, Issue 5
  • DOI: 10.1063/1.2697052

Microstructure control of CrNx films during high power impulse magnetron sputtering
journal, September 2010


Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings
journal, July 1975

  • Thornton, John A.
  • Journal of Vacuum Science and Technology, Vol. 12, Issue 4
  • DOI: 10.1116/1.568682

High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering
journal, December 2007

  • Anders, André; Andersson, Joakim; Ehiasarian, Arutiun
  • Journal of Applied Physics, Vol. 102, Issue 11
  • DOI: 10.1063/1.2817812

High‐flux low‐energy (≂20 eV) N + 2 ion irradiation during TiN deposition by reactive magnetron sputtering: Effects on microstructure and preferred orientation
journal, November 1995

  • Hultman, L.; Sundgren, J. ‐E.; Greene, J. E.
  • Journal of Applied Physics, Vol. 78, Issue 9
  • DOI: 10.1063/1.359720

Length-scale-dependent deformation mechanisms in incoherent metallic multilayered composites
journal, October 2005


Dislocation dynamics analysis of dislocation intersections in nanoscale metallic multilayered composites
journal, April 2007

  • Akasheh, F.; Zbib, H. M.; Hirth, J. P.
  • Journal of Applied Physics, Vol. 101, Issue 8
  • DOI: 10.1063/1.2721093

Strain rate sensitivity and activation volume of Cu/Ni metallic multilayer thin films measured via micropillar compression
journal, July 2012

  • Carpenter, J. S.; Misra, A.; Uchic, M. D.
  • Applied Physics Letters, Vol. 101, Issue 5
  • DOI: 10.1063/1.4739521

Design of bicontinuous metallic nanocomposites for high-strength and plasticity
journal, March 2019


Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films
journal, December 2004

  • Patsalas, P.; Gravalidis, C.; Logothetidis, S.
  • Journal of Applied Physics, Vol. 96, Issue 11
  • DOI: 10.1063/1.1811389

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
journal, July 1974

  • Thornton, John A.
  • Journal of Vacuum Science and Technology, Vol. 11, Issue 4
  • DOI: 10.1116/1.1312732

Equilibrium bicontinuous structure
journal, September 1976


A unified mechanistic model for size-dependent deformation in nanocrystalline and nanotwinned metals
journal, October 2011


Microstructure Map for Self-Organized Phase Separation during Film Deposition
journal, August 2012


A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs
journal, April 2001

  • Anders, A.
  • IEEE Transactions on Plasma Science, Vol. 29, Issue 2
  • DOI: 10.1109/27.922752