Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Jiang, Zhang; Strzalka, Joseph W.; Walko, Donald A.; Wang, Jin

doi:10.1038/s41467-020-16980-5

Title: Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Journal Article · 23 June 2020 · Nature Communications

DOI: https://doi.org/10.1038/s41467-020-16980-5 · OSTI ID:1634846

;

; Walko, Donald A.; Wang, Jin

Not Available

View Journal Article

Cite

Export

Save

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States); Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)

Sponsoring Organization:: USDOE Office of Science (SC); USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1634846

Journal Information:: Nature Communications, Journal Name: Nature Communications Journal Issue: 1 Vol. 11; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United Kingdom

Language:: English

References (42)

Glancing-incidence and glancing-takeoff x-ray fluorescence analysis of Ni-GaAs interface reactions Tsuji, Kouichi; Wagatsuma, Kazuaki; Oku, Takeo X-Ray Spectrometry, Vol. 29, Issue 2 https://doi.org/10.1002/(SICI)1097-4539(200003/04)29:2<155::AID-XRS403>3.0.CO;2-K	journal	March 2000
X-Ray Scattering from Soft-Matter Thin Films Tolan, Metin Springer Tracts in Modern Physics https://doi.org/10.1007/BFb0112834	book	January 1999
Photon cross sections from 1 keV to 100 MeV for elements Z=1 to Z=100 Storm, Lellery; Israel, Harvey I. Atomic Data and Nuclear Data Tables, Vol. 7, Issue 6 https://doi.org/10.1016/S0092-640X(70)80017-1	journal	June 1970
Enhancement of X-ray fluorescence intensity from an ultra-thin sandwiched layer at grazing-emission angles Tsuji, Kouichi; Takenaka, Hisataka; Wagatsuma, Kazuaki Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 54, Issue 13 https://doi.org/10.1016/S0584-8547(99)00143-3	journal	December 1999
Combined evaluation of grazing incidence X-ray fluorescence and X-ray reflectivity data for improved profiling of ultra-shallow depth distributions Ingerle, D.; Meirer, F.; Pepponi, G. Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 99 https://doi.org/10.1016/j.sab.2014.06.019	journal	September 2014
Depth-Resolved X-ray Absorption Spectroscopy by Means of Grazing Emission X-ray Fluorescence Kayser, Yves; Sá, Jacinto; Szlachetko, Jakub Analytical Chemistry, Vol. 87, Issue 21 https://doi.org/10.1021/acs.analchem.5b03346	journal	July 2015
Laboratory Setup for Scanning-Free Grazing Emission X-ray Fluorescence Baumann, J.; Herzog, C.; Spanier, M. Analytical Chemistry, Vol. 89, Issue 3 https://doi.org/10.1021/acs.analchem.6b04449	journal	January 2017
Dynamics of Polymer/Metal Nanocomposite Films at Short Times As Studied by X-ray Standing Waves Guico, Rodney S.; Narayanan, Suresh; Wang, Jin Macromolecules, Vol. 37, Issue 22 https://doi.org/10.1021/ma0486593	journal	November 2004
Structural studies of membranes and surface layers up to 1,000 Å thick using X-ray standing waves Wang, Jin; Bedzyk, Michael J.; Penner, Thomas L. Nature, Vol. 354, Issue 6352 https://doi.org/10.1038/354377a0	journal	December 1991
X-ray holography with atomic resolution Tegze, Miklós; Faigel, Gyula Nature, Vol. 380, Issue 6569 https://doi.org/10.1038/380049a0	journal	March 1996
Experimental phase determination of the structure factor from Kossel line profile Faigel, G.; Bortel, G.; Tegze, M. Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep22904	journal	March 2016
Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence Kayser, Yves; Hönicke, Philipp; Banaś, Dariusz Journal of Analytical Atomic Spectrometry, Vol. 30, Issue 5 https://doi.org/10.1039/C4JA00461B	journal	January 2015
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence Soltwisch, Victor; Hönicke, Philipp; Kayser, Yves Nanoscale, Vol. 10, Issue 13 https://doi.org/10.1039/C8NR00328A	journal	January 2018
Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy Hönicke, P.; Kayser, Y.; Beckhoff, B. Journal of Analytical Atomic Spectrometry, Vol. 27, Issue 9 https://doi.org/10.1039/c2ja10385k	journal	January 2012
Perturbation to the resonance modes by gold nanoparticles in a thin-film-based x-ray waveguide Lee, D. R.; Hagman, A.; Li, Xuefa Applied Physics Letters, Vol. 88, Issue 15 https://doi.org/10.1063/1.2191091	journal	April 2006
Morphologies of discontinuous gold films on amorphous polymer substrates Kunz, Martin S.; Shull, Kenneth R.; Kellock, Andrew J. Journal of Applied Physics, Vol. 72, Issue 9 https://doi.org/10.1063/1.352362	journal	November 1992
Scanning-free grazing emission x-ray fluorescence by means of an angular dispersive arrangement with a two-dimensional position-sensitive area detector Kayser, Y.; Szlachetko, J.; Sà, J. Review of Scientific Instruments, Vol. 84, Issue 12 https://doi.org/10.1063/1.4838575	journal	December 2013
Surface Studies of Solids by Total Reflection of X-Rays Parratt, L. G. Physical Review, Vol. 95, Issue 2 https://doi.org/10.1103/PhysRev.95.359	journal	July 1954
X-ray and neutron scattering from rough surfaces Sinha, S. K.; Sirota, E. B.; Garoff, S. Physical Review B, Vol. 38, Issue 4 https://doi.org/10.1103/PhysRevB.38.2297	journal	August 1988
Kossel diffraction in perfect crystals: X-ray standing waves in reverse Gog, T.; Bahr, D.; Materlik, G. Physical Review B, Vol. 51, Issue 10 https://doi.org/10.1103/PhysRevB.51.6761	journal	March 1995
X-ray fluorescence holography: Going beyond the diffraction limit Marchesini, S.; Fadley, C. S. Physical Review B, Vol. 67, Issue 2 https://doi.org/10.1103/PhysRevB.67.024115	journal	January 2003
Three-dimensional atomic-arrangement reconstruction from an Auger-electron hologram Matsushita, Tomohiro; Guo, Fang Zhun; Matsui, F. Physical Review B, Vol. 75, Issue 8 https://doi.org/10.1103/PhysRevB.75.085419	journal	February 2007
Observation of ultralow-level Al impurities on a silicon surface by high-resolution grazing emission x-ray fluorescence excited by synchrotron radiation Kubala-Kukuś, A.; Banaś, D.; Cao, W. Physical Review B, Vol. 80, Issue 11 https://doi.org/10.1103/PhysRevB.80.113305	journal	September 2009
Waveguide-enhanced grazing-incidence small-angle x-ray scattering of buried nanostructures in thin films Jiang, Zhang; Lee, Dong Ryeol; Narayanan, Suresh Physical Review B, Vol. 84, Issue 7 https://doi.org/10.1103/PhysRevB.84.075440	journal	August 2011
X-Ray Evanescent-Wave Absorption and Emission Becker, R. S.; Golovchenko, J. A.; Patel, J. R. Physical Review Letters, Vol. 50, Issue 3 https://doi.org/10.1103/PhysRevLett.50.153	journal	January 1983
Photoelectron Holography Barton, John J. Physical Review Letters, Vol. 61, Issue 12 https://doi.org/10.1103/PhysRevLett.61.1356	journal	September 1988
X-ray standing waves at a reflecting mirror surface Bedzyk, M. J.; Bommarito, G. M.; Schildkraut, J. S. Physical Review Letters, Vol. 62, Issue 12 https://doi.org/10.1103/PhysRevLett.62.1376	journal	March 1989
Removing multiple scattering and twin images from holographic images Barton, J. J. Physical Review Letters, Vol. 67, Issue 22 https://doi.org/10.1103/PhysRevLett.67.3106	journal	November 1991
Multiple-Energy X-Ray Holography: Atomic Images of Hematite (F e 2 O 3 ) Gog, T.; Len, P. M.; Materlik, G. Physical Review Letters, Vol. 76, Issue 17 https://doi.org/10.1103/PhysRevLett.76.3132	journal	April 1996
Real-Time Evolution of the Distribution of Nanoparticles in an Ultrathin-Polymer-Film-Based Waveguide Narayanan, Suresh; Lee, Dong Ryeol; Guico, Rodney S. Physical Review Letters, Vol. 94, Issue 14 https://doi.org/10.1103/PhysRevLett.94.145504	journal	April 2005
Application of spline functions to the correction of resolution errors in small-angle scattering Schelten, J.; Hossfeld, F. Journal of Applied Crystallography, Vol. 4, Issue 3 https://doi.org/10.1107/S0021889871006733	journal	June 1971
Model-independent determination of the surface scattering-length-density profile from specular reflectivity data Pedersen, J. S. Journal of Applied Crystallography, Vol. 25, Issue 2 https://doi.org/10.1107/S0021889891010907	journal	April 1992
The interference theory of ideal paracrystals Hosemann, R.; Bagchi, S. N. Acta Crystallographica, Vol. 5, Issue 5 https://doi.org/10.1107/S0365110X52001702	journal	September 1952
X-ray fluorescence induced by standing waves in the grazing-incidence and grazing-exit modes: study of the Mg–Co–Zr system Tu, Yuchun; Yuan, Yanyan; Le Guen, Karine Journal of Synchrotron Radiation, Vol. 22, Issue 6 https://doi.org/10.1107/S1600577515016239	journal	September 2015
Advanced grazing-incidence techniques for modern soft-matter materials analysis Hexemer, Alexander; Müller-Buschbaum, Peter IUCrJ, Vol. 2, Issue 1 https://doi.org/10.1107/S2052252514024178	journal	January 2015
Resonance-enhanced x-rays in thin films: a structure probe for membranes and surface layers Wang, J.; Bedzyk, M.; Caffrey, M. Science, Vol. 258, Issue 5083 https://doi.org/10.1126/science.1439784	journal	October 1992
Diffuse-double layer at a membrane-aqueous interface measured with x-ray standing waves Bedzyk, M.; Bommarito, G.; Caffrey, M. Science, Vol. 248, Issue 4951 https://doi.org/10.1126/science.2321026	journal	April 1990
X-ray standing waves: a molecular yardstick for biological membranes Bedzyk, M.; Bilderback, D.; Bommarito, G. Science, Vol. 241, Issue 4874 https://doi.org/10.1126/science.3175619	journal	September 1988
Fluorescent X-ray interference from a protein monolayer Sasaki, Y.; Suzuki, Y.; Ishibashi, T. Science, Vol. 263, Issue 5143 https://doi.org/10.1126/science.8272866	journal	January 1994
X-ray divergent-beam (Kossel) technique: A review Lider, V. V. Crystallography Reports, Vol. 56, Issue 2 https://doi.org/10.1134/S106377451102012X	journal	March 2011
MCMC Using Hamiltonian Dynamics Neal, Radford; Brooks, Steve; Gelman, Andrew Handbook of Markov Chain Monte Carlo https://doi.org/10.1201/b10905-6	book	May 2011
A new approach for three-dimensional atomic-image reconstruction from a single-energy photoelectron hologram Matsushita, T.; Agui, A.; Yoshigoe, A. Europhysics Letters (EPL), Vol. 65, Issue 2 https://doi.org/10.1209/epl/i2003-10074-6	journal	January 2004

Similar Records

Hyperspectral image reconstruction for x-ray fluorescence tomography

Journal Article · 2014 · Optics Express · OSTI ID:1392113

Gürsoy, Doǧa; Biçer, Tekin; Lanzirotti, Antonio; +2 more

Joint reconstruction of x-ray fluorescence and transmission tomography

Journal Article · 2017 · Optics Express · OSTI ID:1364659

Di, Zichao; Chen, Si; Hong, Young Pyo; +3 more

Waveguide-enhanced grazing-incidence small-angle x-ray scattering of buried nanostructures in thin films

Journal Article · 2011 · Physical Review B · OSTI ID:1100503

Jiang, Zhang; Lee, Dong Ryeol; Narayanan, Suresh; +2 more

Related Subjects

36 MATERIALS SCIENCE

Title: Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Citation Formats

References (42)

Similar Records

Related Subjects