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Title: Interferometric measurements of graphene-based membranes for micromechanical applications

Abstract

Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. Herein, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.

Authors:
 [1];  [1];  [2];  [3];  [1]; ORCiD logo [4];  [1];  [5]
  1. Ural Federal Univ., Ekaterinburg (Russia)
  2. National Univ. of Science and Technology MISiS, Moscow (Russia)
  3. National Univ. of Science and Technology MISiS, Moscow (Russia); Univ. of Aveiro (Portugal)
  4. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
  5. Ural Federal Univ., Ekaterinburg (Russia); National Univ. of Science and Technology MISiS, Moscow (Russia); Univ. of Aveiro (Portugal)
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); Russian Foundation for Basic Research; Government of the Russian Federation
OSTI Identifier:
1633141
Grant/Contract Number:  
AC05-00OR22725; 16-29-14050-ofrm
Resource Type:
Accepted Manuscript
Journal Name:
Ferroelectrics
Additional Journal Information:
Journal Volume: 560; Journal Issue: 1; Journal ID: ISSN 0015-0193
Publisher:
Taylor & Francis
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; piezoelectricity; graphene; membrane; FEM; resonance; interferometry

Citation Formats

Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., and Kholkin, Andrei L. Interferometric measurements of graphene-based membranes for micromechanical applications. United States: N. p., 2020. Web. doi:10.1080/00150193.2020.1722889.
Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., & Kholkin, Andrei L. Interferometric measurements of graphene-based membranes for micromechanical applications. United States. doi:https://doi.org/10.1080/00150193.2020.1722889
Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., and Kholkin, Andrei L. Tue . "Interferometric measurements of graphene-based membranes for micromechanical applications". United States. doi:https://doi.org/10.1080/00150193.2020.1722889.
@article{osti_1633141,
title = {Interferometric measurements of graphene-based membranes for micromechanical applications},
author = {Ushakov, Andrei D. and Akhmatkhanov, Andrei R. and Chichkov, Maxim V. and Turutin, Andrei V. and Chuvakova, Maria A. and Kravchenko, Ivan and Shur, Vladimir Ya. and Kholkin, Andrei L.},
abstractNote = {Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. Herein, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.},
doi = {10.1080/00150193.2020.1722889},
journal = {Ferroelectrics},
number = 1,
volume = 560,
place = {United States},
year = {2020},
month = {5}
}

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