Interferometric measurements of graphene-based membranes for micromechanical applications
Abstract
Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. Herein, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.
- Authors:
-
[4];
- Ural Federal Univ., Ekaterinburg (Russia)
- National Univ. of Science and Technology MISiS, Moscow (Russia)
- National Univ. of Science and Technology MISiS, Moscow (Russia); Univ. of Aveiro (Portugal)
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
- Ural Federal Univ., Ekaterinburg (Russia); National Univ. of Science and Technology MISiS, Moscow (Russia); Univ. of Aveiro (Portugal)
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); Russian Foundation for Basic Research; Government of the Russian Federation
- OSTI Identifier:
- 1633141
- Grant/Contract Number:
- AC05-00OR22725; 16-29-14050-ofrm
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Ferroelectrics
- Additional Journal Information:
- Journal Volume: 560; Journal Issue: 1; Journal ID: ISSN 0015-0193
- Publisher:
- Taylor & Francis
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; piezoelectricity; graphene; membrane; FEM; resonance; interferometry
Citation Formats
Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., and Kholkin, Andrei L. Interferometric measurements of graphene-based membranes for micromechanical applications. United States: N. p., 2020.
Web. doi:10.1080/00150193.2020.1722889.
Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., & Kholkin, Andrei L. Interferometric measurements of graphene-based membranes for micromechanical applications. United States. https://doi.org/10.1080/00150193.2020.1722889
Ushakov, Andrei D., Akhmatkhanov, Andrei R., Chichkov, Maxim V., Turutin, Andrei V., Chuvakova, Maria A., Kravchenko, Ivan, Shur, Vladimir Ya., and Kholkin, Andrei L. Tue .
"Interferometric measurements of graphene-based membranes for micromechanical applications". United States. https://doi.org/10.1080/00150193.2020.1722889. https://www.osti.gov/servlets/purl/1633141.
@article{osti_1633141,
title = {Interferometric measurements of graphene-based membranes for micromechanical applications},
author = {Ushakov, Andrei D. and Akhmatkhanov, Andrei R. and Chichkov, Maxim V. and Turutin, Andrei V. and Chuvakova, Maria A. and Kravchenko, Ivan and Shur, Vladimir Ya. and Kholkin, Andrei L.},
abstractNote = {Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. Herein, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.},
doi = {10.1080/00150193.2020.1722889},
journal = {Ferroelectrics},
number = 1,
volume = 560,
place = {United States},
year = {Tue May 26 00:00:00 EDT 2020},
month = {Tue May 26 00:00:00 EDT 2020}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Engineered Piezoelectricity in Graphene
journal, January 2012
- Ong, Mitchell T.; Reed, Evan J.
- ACS Nano, Vol. 6, Issue 2
Strong piezoelectricity in single-layer graphene deposited on SiO2 grating substrates
journal, June 2015
- da Cunha Rodrigues, Gonçalo; Zelenovskiy, Pavel; Romanyuk, Konstantin
- Nature Communications, Vol. 6, Issue 1
Electromechanical Measurements Of Gd-Doped Ceria Thin Films By Laser Interferometry
journal, October 2016
- Ushakov, A. D.; Yavo, N.; Mishuk, E.
- KnE Materials Science, Vol. 1, Issue 1
Measurement of piezoelectricity in quartz and electrostriction in SiO2-glass by interferometric method
journal, July 1996
- Tan, C. Z.; Arndt, J.
- Physica B: Condensed Matter, Vol. 225, Issue 3-4
Stretchable electronics: functional materials, fabrication strategies and applications
journal, March 2019
- Wu, Wei
- Science and Technology of Advanced Materials, Vol. 20, Issue 1
Mechanical Stress of CVD-Dielectrics
journal, January 1992
- Stadtmüeller, M.
- Journal of The Electrochemical Society, Vol. 139, Issue 12
Piezoelectric Membrane Actuators for Micropump Applications Using PVDF-TrFE
journal, February 2018
- Akin Yildirim, Yagmur; Toprak, Alperen; Tigli, Onur
- Journal of Microelectromechanical Systems, Vol. 27, Issue 1
Intrinsic Piezoelectricity in Two-Dimensional Materials
journal, September 2012
- Duerloo, Karel-Alexander N.; Ong, Mitchell T.; Reed, Evan J.
- The Journal of Physical Chemistry Letters, Vol. 3, Issue 19
The rise of graphene
journal, March 2007
- Geim, A. K.; Novoselov, K. S.
- Nature Materials, Vol. 6, Issue 3, p. 183-191
Ferroelectric memories and their applications
journal, November 2001
- Takasu, Hidemi
- Microelectronic Engineering, Vol. 59, Issue 1-4
Piezoelectricity of Functionalized Graphene: A Quantum-Mechanical Rationalization
journal, March 2016
- El-Kelany, Khaled E.; Carbonnière, Philippe; Erba, Alessandro
- The Journal of Physical Chemistry C, Vol. 120, Issue 14
Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process
journal, October 2015
- Yanagi, Itaru; Ishida, Takeshi; Fujisaki, Koji
- Scientific Reports, Vol. 5, Issue 1
The Effect of Hydrogen and Fluorine Coadsorption on the Piezoelectric Properties of Graphene
journal, February 2013
- Ong, Mitchell T.; Duerloo, Karel-Alexander N.; Reed, Evan J.
- The Journal of Physical Chemistry C, Vol. 117, Issue 7
Coaxing graphene to be piezoelectric
journal, January 2012
- Chandratre, Swapnil; Sharma, Pradeep
- Applied Physics Letters, Vol. 100, Issue 2
Sublattice-induced symmetry breaking and band-gap formation in graphene
journal, January 2014
- Skomski, Ralph; Dowben, P. A.; Sky Driver, M.
- Mater. Horiz., Vol. 1, Issue 6
Interferometric measurements of electric field‐induced displacements in piezoelectric thin films
journal, May 1996
- Kholkin, A. L.; Wütchrich, Ch.; Taylor, D. V.
- Review of Scientific Instruments, Vol. 67, Issue 5
On the Nature of CVD Si-Rich SiO[sub 2] and Si[sub 3]N[sub 4] Films
journal, January 1980
- Irene, E. A.
- Journal of The Electrochemical Society, Vol. 127, Issue 11
Characterization of the effective electrostriction coefficients in ferroelectric thin films
journal, June 2001
- Kholkin, A. L.; Akdogan, E. K.; Safari, A.
- Journal of Applied Physics, Vol. 89, Issue 12
Nanopores and nucleic acids: prospects for ultrarapid sequencing
journal, April 2000
- Deamer, David W.; Akeson, Mark
- Trends in Biotechnology, Vol. 18, Issue 4, p. 147-151