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Title: Three-dimensional measurements of fundamental plasma parameters in pulsed ICP operation

Authors:
ORCiD logo [1];  [1]; ORCiD logo [1];  [2]
  1. University of California, Los Angeles, California 90024, USA
  2. Lam Research Corp, Fremont, California 90024, USA
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1631496
Grant/Contract Number:  
SC0001319; SC0014132
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Name: Physics of Plasmas Journal Volume: 27 Journal Issue: 6; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Country of Publication:
United States
Language:
English

Citation Formats

Han, Jia, Pribyl, Patrick, Gekelman, Walter, and Paterson, Alex. Three-dimensional measurements of fundamental plasma parameters in pulsed ICP operation. United States: N. p., 2020. Web. doi:10.1063/5.0007288.
Han, Jia, Pribyl, Patrick, Gekelman, Walter, & Paterson, Alex. Three-dimensional measurements of fundamental plasma parameters in pulsed ICP operation. United States. doi:https://doi.org/10.1063/5.0007288
Han, Jia, Pribyl, Patrick, Gekelman, Walter, and Paterson, Alex. Mon . "Three-dimensional measurements of fundamental plasma parameters in pulsed ICP operation". United States. doi:https://doi.org/10.1063/5.0007288.
@article{osti_1631496,
title = {Three-dimensional measurements of fundamental plasma parameters in pulsed ICP operation},
author = {Han, Jia and Pribyl, Patrick and Gekelman, Walter and Paterson, Alex},
abstractNote = {},
doi = {10.1063/5.0007288},
journal = {Physics of Plasmas},
number = 6,
volume = 27,
place = {United States},
year = {2020},
month = {6}
}

Journal Article:
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