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Title: 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy

Abstract

We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of ~14 nm by ~13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. Approaching 10 nm resolution with integrated 2D MLL optic is a significant step forward in applications of multilayer Laue lenses for high-resolution hard x-ray microscopy and their adoption by the general x-ray microscopy community.

Authors:
; ; ; ; ; ; ; ORCiD logo; ; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1631185
Alternate Identifier(s):
OSTI ID: 1644004
Report Number(s):
BNL-216205-2020-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:  
LDRD 17-017; SC0012704
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Name: Optics Express Journal Volume: 28 Journal Issue: 12; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Pattammattel, Ajith, Gao, Yuan, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong S., and Nazaretski, Evgeny. 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy. United States: N. p., 2020. Web. doi:10.1364/OE.389555.
Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Pattammattel, Ajith, Gao, Yuan, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong S., & Nazaretski, Evgeny. 2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy. United States. doi:https://doi.org/10.1364/OE.389555
Xu, Wei, Xu, Weihe, Bouet, Nathalie, Zhou, Juan, Yan, Hanfei, Huang, Xiaojing, Pattammattel, Ajith, Gao, Yuan, Lu, Ming, Zalalutdinov, Maxim, Chu, Yong S., and Nazaretski, Evgeny. Thu . "2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy". United States. doi:https://doi.org/10.1364/OE.389555.
@article{osti_1631185,
title = {2D MEMS-based multilayer Laue lens nanofocusing optics for high-resolution hard x-ray microscopy},
author = {Xu, Wei and Xu, Weihe and Bouet, Nathalie and Zhou, Juan and Yan, Hanfei and Huang, Xiaojing and Pattammattel, Ajith and Gao, Yuan and Lu, Ming and Zalalutdinov, Maxim and Chu, Yong S. and Nazaretski, Evgeny},
abstractNote = {We report on the development of 2D integrated multilayer Laue lens (MLL) nanofocusing optics used for high-resolution x-ray microscopy. A Micro-Electro-Mechanical-Systems (MEMS) - based template has been designed and fabricated to accommodate two linear MLL optics in pre-aligned configuration. The orthogonality requirement between two MLLs has been satisfied to a better than 6 millidegrees level, and the separation along the x-ray beam direction was controlled on a micrometer scale. Developed planar 2D MLL structure has demonstrated astigmatism free point focus of ~14 nm by ~13 nm in horizontal and vertical directions, respectively, at 13.6 keV photon energy. Approaching 10 nm resolution with integrated 2D MLL optic is a significant step forward in applications of multilayer Laue lenses for high-resolution hard x-ray microscopy and their adoption by the general x-ray microscopy community.},
doi = {10.1364/OE.389555},
journal = {Optics Express},
number = 12,
volume = 28,
place = {United States},
year = {2020},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: https://doi.org/10.1364/OE.389555

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